9/22/2011	7:48:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	7:48:46 AM	Recipe started at 7:48 AM
9/22/2011	7:48:46 AM	Helium valve closed
9/22/2011	7:48:46 AM	H2 valve closed
9/22/2011	7:48:46 AM	BCl3 valve closed
9/22/2011	7:48:46 AM	PH3 valve closed
9/22/2011	7:48:46 AM	SiCl4 pre valve closed
9/22/2011	7:48:46 AM	SiCl4 post valve closed
9/22/2011	7:48:46 AM	Main Vac valve closed
9/22/2011	7:48:46 AM	Bypass valve closed
9/22/2011	7:48:46 AM	Bubbler valve closed
9/22/2011	7:48:46 AM	Helium MFC set to  0.000000
9/22/2011	7:48:46 AM	H2 MFC set to  0.000000
9/22/2011	7:48:46 AM	BCl3 MFC set to  0.000000
9/22/2011	7:48:46 AM	PHl3 MFC set to  0.000000
9/22/2011	7:48:46 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:48:46 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:48:46 AM	Tube furnace set to 0
9/22/2011	7:48:49 AM	H2 valve closed
9/22/2011	7:48:49 AM	BCl3 valve closed
9/22/2011	7:48:49 AM	PH3 valve closed
9/22/2011	7:48:49 AM	SiCl4 pre valve closed
9/22/2011	7:48:49 AM	SiCl4 post valve closed
9/22/2011	7:48:49 AM	Main Vac valve closed
9/22/2011	7:48:49 AM	Bypass valve closed
9/22/2011	7:48:49 AM	Bubbler valve closed
9/22/2011	7:48:49 AM	Helium valve opened
9/22/2011	7:48:49 AM	Helium MFC set to  500.000000
9/22/2011	7:48:49 AM	H2 MFC set to  0.000000
9/22/2011	7:48:49 AM	BCl3 MFC set to  0.000000
9/22/2011	7:48:49 AM	PHl3 MFC set to  0.000000
9/22/2011	7:48:49 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:48:49 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:48:50 AM	Tube furnace set to 0
9/22/2011	7:49:55 AM	Helium valve closed
9/22/2011	7:49:55 AM	H2 valve closed
9/22/2011	7:49:55 AM	BCl3 valve closed
9/22/2011	7:49:55 AM	PH3 valve closed
9/22/2011	7:49:55 AM	SiCl4 pre valve closed
9/22/2011	7:49:55 AM	SiCl4 post valve closed
9/22/2011	7:49:55 AM	Main Vac valve closed
9/22/2011	7:49:55 AM	Bypass valve closed
9/22/2011	7:49:55 AM	Bubbler valve closed
9/22/2011	7:49:55 AM	Helium MFC set to  0.000000
9/22/2011	7:49:55 AM	H2 MFC set to  0.000000
9/22/2011	7:49:55 AM	BCl3 MFC set to  0.000000
9/22/2011	7:49:55 AM	PHl3 MFC set to  0.000000
9/22/2011	7:49:55 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:49:55 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:49:55 AM	Tube furnace set to 0
9/22/2011	7:49:56 AM	Run finished at 7:49 AM
9/22/2011	7:49:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	7:57:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	7:57:33 AM	Recipe started at 7:57 AM
9/22/2011	7:57:33 AM	Helium valve closed
9/22/2011	7:57:33 AM	H2 valve closed
9/22/2011	7:57:33 AM	BCl3 valve closed
9/22/2011	7:57:33 AM	PH3 valve closed
9/22/2011	7:57:33 AM	SiCl4 pre valve closed
9/22/2011	7:57:33 AM	SiCl4 post valve closed
9/22/2011	7:57:33 AM	Main Vac valve closed
9/22/2011	7:57:33 AM	Bubbler valve closed
9/22/2011	7:57:33 AM	Bypass valve opened
9/22/2011	7:57:33 AM	Helium MFC set to  0.000000
9/22/2011	7:57:33 AM	H2 MFC set to  0.000000
9/22/2011	7:57:33 AM	BCl3 MFC set to  0.000000
9/22/2011	7:57:33 AM	PHl3 MFC set to  0.000000
9/22/2011	7:57:33 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:57:33 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:57:33 AM	Tube furnace set to 0
9/22/2011	7:58:45 AM	Helium valve closed
9/22/2011	7:58:45 AM	H2 valve closed
9/22/2011	7:58:45 AM	BCl3 valve closed
9/22/2011	7:58:45 AM	PH3 valve closed
9/22/2011	7:58:45 AM	SiCl4 pre valve closed
9/22/2011	7:58:45 AM	SiCl4 post valve closed
9/22/2011	7:58:45 AM	Main Vac valve closed
9/22/2011	7:58:45 AM	Bubbler valve closed
9/22/2011	7:58:45 AM	Bypass valve opened
9/22/2011	7:58:45 AM	Helium MFC set to  0.000000
9/22/2011	7:58:45 AM	H2 MFC set to  0.000000
9/22/2011	7:58:45 AM	BCl3 MFC set to  0.000000
9/22/2011	7:58:45 AM	PHl3 MFC set to  0.000000
9/22/2011	7:58:45 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:58:45 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:58:45 AM	Tube furnace set to 0
9/22/2011	7:59:02 AM	Helium valve closed
9/22/2011	7:59:02 AM	H2 valve closed
9/22/2011	7:59:02 AM	BCl3 valve closed
9/22/2011	7:59:02 AM	PH3 valve closed
9/22/2011	7:59:02 AM	SiCl4 pre valve closed
9/22/2011	7:59:02 AM	SiCl4 post valve closed
9/22/2011	7:59:02 AM	Bypass valve closed
9/22/2011	7:59:02 AM	Bubbler valve closed
9/22/2011	7:59:02 AM	Main Vac valve opened
9/22/2011	7:59:02 AM	Helium MFC set to  0.000000
9/22/2011	7:59:02 AM	H2 MFC set to  0.000000
9/22/2011	7:59:02 AM	BCl3 MFC set to  0.000000
9/22/2011	7:59:02 AM	PHl3 MFC set to  0.000000
9/22/2011	7:59:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:59:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:59:02 AM	Tube furnace set to 0
9/22/2011	7:59:03 AM	Run finished at 7:59 AM
9/22/2011	7:59:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	7:59:57 AM	Recipe started at 7:59 AM
9/22/2011	7:59:57 AM	Helium valve closed
9/22/2011	7:59:57 AM	H2 valve closed
9/22/2011	7:59:57 AM	BCl3 valve closed
9/22/2011	7:59:57 AM	PH3 valve closed
9/22/2011	7:59:57 AM	SiCl4 pre valve closed
9/22/2011	7:59:57 AM	SiCl4 post valve closed
9/22/2011	7:59:57 AM	Bypass valve closed
9/22/2011	7:59:57 AM	Bubbler valve closed
9/22/2011	7:59:57 AM	Main Vac valve opened
9/22/2011	7:59:57 AM	Helium MFC set to  0.000000
9/22/2011	7:59:57 AM	H2 MFC set to  0.000000
9/22/2011	7:59:57 AM	BCl3 MFC set to  0.000000
9/22/2011	7:59:57 AM	PHl3 MFC set to  0.000000
9/22/2011	7:59:57 AM	SiCl4 MFC set to  0.000000
9/22/2011	7:59:57 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:59:58 AM	Tube furnace set to 150
9/22/2011	8:00:28 AM	H2 valve closed
9/22/2011	8:00:28 AM	BCl3 valve closed
9/22/2011	8:00:28 AM	PH3 valve closed
9/22/2011	8:00:28 AM	SiCl4 pre valve closed
9/22/2011	8:00:28 AM	SiCl4 post valve closed
9/22/2011	8:00:28 AM	Bypass valve closed
9/22/2011	8:00:28 AM	Bubbler valve closed
9/22/2011	8:00:28 AM	Helium valve opened
9/22/2011	8:00:28 AM	Main Vac valve opened
9/22/2011	8:00:28 AM	Helium MFC set to  20.000000
9/22/2011	8:00:28 AM	H2 MFC set to  0.000000
9/22/2011	8:00:28 AM	BCl3 MFC set to  0.000000
9/22/2011	8:00:28 AM	PHl3 MFC set to  0.000000
9/22/2011	8:00:28 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:00:28 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:00:28 AM	Tube furnace set to 150
9/22/2011	8:00:58 AM	Helium valve closed
9/22/2011	8:00:58 AM	H2 valve closed
9/22/2011	8:00:58 AM	BCl3 valve closed
9/22/2011	8:00:58 AM	PH3 valve closed
9/22/2011	8:00:58 AM	SiCl4 pre valve closed
9/22/2011	8:00:58 AM	SiCl4 post valve closed
9/22/2011	8:00:58 AM	Bypass valve closed
9/22/2011	8:00:58 AM	Bubbler valve closed
9/22/2011	8:00:58 AM	Main Vac valve opened
9/22/2011	8:00:58 AM	Helium MFC set to  0.000000
9/22/2011	8:00:58 AM	H2 MFC set to  0.000000
9/22/2011	8:00:58 AM	BCl3 MFC set to  0.000000
9/22/2011	8:00:58 AM	PHl3 MFC set to  0.000000
9/22/2011	8:00:58 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:00:58 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:00:58 AM	Tube furnace set to 150
9/22/2011	8:01:28 AM	H2 valve closed
9/22/2011	8:01:28 AM	BCl3 valve closed
9/22/2011	8:01:28 AM	PH3 valve closed
9/22/2011	8:01:28 AM	SiCl4 pre valve closed
9/22/2011	8:01:28 AM	SiCl4 post valve closed
9/22/2011	8:01:28 AM	Bypass valve closed
9/22/2011	8:01:28 AM	Bubbler valve closed
9/22/2011	8:01:28 AM	Helium valve opened
9/22/2011	8:01:28 AM	Main Vac valve opened
9/22/2011	8:01:28 AM	Helium MFC set to  20.000000
9/22/2011	8:01:28 AM	H2 MFC set to  0.000000
9/22/2011	8:01:28 AM	BCl3 MFC set to  0.000000
9/22/2011	8:01:28 AM	PHl3 MFC set to  0.000000
9/22/2011	8:01:28 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:01:28 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:01:28 AM	Tube furnace set to 150
9/22/2011	8:01:58 AM	Helium valve closed
9/22/2011	8:01:58 AM	H2 valve closed
9/22/2011	8:01:58 AM	BCl3 valve closed
9/22/2011	8:01:58 AM	PH3 valve closed
9/22/2011	8:01:58 AM	SiCl4 pre valve closed
9/22/2011	8:01:58 AM	SiCl4 post valve closed
9/22/2011	8:01:58 AM	Bypass valve closed
9/22/2011	8:01:58 AM	Bubbler valve closed
9/22/2011	8:01:58 AM	Main Vac valve opened
9/22/2011	8:01:58 AM	Helium MFC set to  0.000000
9/22/2011	8:01:58 AM	H2 MFC set to  0.000000
9/22/2011	8:01:58 AM	BCl3 MFC set to  0.000000
9/22/2011	8:01:58 AM	PHl3 MFC set to  0.000000
9/22/2011	8:01:58 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:01:58 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:01:58 AM	Tube furnace set to 150
9/22/2011	8:02:28 AM	H2 valve closed
9/22/2011	8:02:28 AM	BCl3 valve closed
9/22/2011	8:02:28 AM	PH3 valve closed
9/22/2011	8:02:28 AM	SiCl4 pre valve closed
9/22/2011	8:02:28 AM	SiCl4 post valve closed
9/22/2011	8:02:28 AM	Bypass valve closed
9/22/2011	8:02:28 AM	Bubbler valve closed
9/22/2011	8:02:28 AM	Helium valve opened
9/22/2011	8:02:28 AM	Main Vac valve opened
9/22/2011	8:02:28 AM	Helium MFC set to  20.000000
9/22/2011	8:02:28 AM	H2 MFC set to  0.000000
9/22/2011	8:02:28 AM	BCl3 MFC set to  0.000000
9/22/2011	8:02:28 AM	PHl3 MFC set to  0.000000
9/22/2011	8:02:28 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:02:28 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:02:29 AM	Tube furnace set to 150
9/22/2011	8:02:59 AM	Helium valve closed
9/22/2011	8:02:59 AM	H2 valve closed
9/22/2011	8:02:59 AM	BCl3 valve closed
9/22/2011	8:02:59 AM	PH3 valve closed
9/22/2011	8:02:59 AM	SiCl4 pre valve closed
9/22/2011	8:02:59 AM	SiCl4 post valve closed
9/22/2011	8:02:59 AM	Bypass valve closed
9/22/2011	8:02:59 AM	Bubbler valve closed
9/22/2011	8:02:59 AM	Main Vac valve opened
9/22/2011	8:02:59 AM	Helium MFC set to  0.000000
9/22/2011	8:02:59 AM	H2 MFC set to  0.000000
9/22/2011	8:02:59 AM	BCl3 MFC set to  0.000000
9/22/2011	8:02:59 AM	PHl3 MFC set to  0.000000
9/22/2011	8:02:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:02:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:02:59 AM	Tube furnace set to 150
9/22/2011	8:03:29 AM	H2 valve closed
9/22/2011	8:03:29 AM	BCl3 valve closed
9/22/2011	8:03:29 AM	PH3 valve closed
9/22/2011	8:03:29 AM	SiCl4 pre valve closed
9/22/2011	8:03:29 AM	SiCl4 post valve closed
9/22/2011	8:03:29 AM	Bypass valve closed
9/22/2011	8:03:29 AM	Bubbler valve closed
9/22/2011	8:03:29 AM	Helium valve opened
9/22/2011	8:03:29 AM	Main Vac valve opened
9/22/2011	8:03:29 AM	Helium MFC set to  20.000000
9/22/2011	8:03:29 AM	H2 MFC set to  0.000000
9/22/2011	8:03:29 AM	BCl3 MFC set to  0.000000
9/22/2011	8:03:29 AM	PHl3 MFC set to  0.000000
9/22/2011	8:03:29 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:03:29 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:03:29 AM	Tube furnace set to 150
9/22/2011	8:03:59 AM	Helium valve closed
9/22/2011	8:03:59 AM	H2 valve closed
9/22/2011	8:03:59 AM	BCl3 valve closed
9/22/2011	8:03:59 AM	PH3 valve closed
9/22/2011	8:03:59 AM	SiCl4 pre valve closed
9/22/2011	8:03:59 AM	SiCl4 post valve closed
9/22/2011	8:03:59 AM	Bypass valve closed
9/22/2011	8:03:59 AM	Bubbler valve closed
9/22/2011	8:03:59 AM	Main Vac valve opened
9/22/2011	8:03:59 AM	Helium MFC set to  0.000000
9/22/2011	8:03:59 AM	H2 MFC set to  0.000000
9/22/2011	8:03:59 AM	BCl3 MFC set to  0.000000
9/22/2011	8:03:59 AM	PHl3 MFC set to  0.000000
9/22/2011	8:03:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:03:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:03:59 AM	Tube furnace set to 150
9/22/2011	8:04:29 AM	H2 valve closed
9/22/2011	8:04:29 AM	BCl3 valve closed
9/22/2011	8:04:29 AM	PH3 valve closed
9/22/2011	8:04:29 AM	SiCl4 pre valve closed
9/22/2011	8:04:29 AM	SiCl4 post valve closed
9/22/2011	8:04:29 AM	Bypass valve closed
9/22/2011	8:04:29 AM	Bubbler valve closed
9/22/2011	8:04:29 AM	Helium valve opened
9/22/2011	8:04:29 AM	Main Vac valve opened
9/22/2011	8:04:29 AM	Helium MFC set to  20.000000
9/22/2011	8:04:29 AM	H2 MFC set to  0.000000
9/22/2011	8:04:29 AM	BCl3 MFC set to  0.000000
9/22/2011	8:04:29 AM	PHl3 MFC set to  0.000000
9/22/2011	8:04:29 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:04:29 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:04:29 AM	Tube furnace set to 150
9/22/2011	8:04:59 AM	Helium valve closed
9/22/2011	8:04:59 AM	H2 valve closed
9/22/2011	8:04:59 AM	BCl3 valve closed
9/22/2011	8:04:59 AM	PH3 valve closed
9/22/2011	8:04:59 AM	SiCl4 pre valve closed
9/22/2011	8:04:59 AM	SiCl4 post valve closed
9/22/2011	8:04:59 AM	Bypass valve closed
9/22/2011	8:04:59 AM	Bubbler valve closed
9/22/2011	8:04:59 AM	Main Vac valve opened
9/22/2011	8:04:59 AM	Helium MFC set to  0.000000
9/22/2011	8:04:59 AM	H2 MFC set to  0.000000
9/22/2011	8:04:59 AM	BCl3 MFC set to  0.000000
9/22/2011	8:04:59 AM	PHl3 MFC set to  0.000000
9/22/2011	8:04:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:04:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:05:00 AM	Tube furnace set to 150
9/22/2011	8:05:30 AM	H2 valve closed
9/22/2011	8:05:30 AM	BCl3 valve closed
9/22/2011	8:05:30 AM	PH3 valve closed
9/22/2011	8:05:30 AM	SiCl4 pre valve closed
9/22/2011	8:05:30 AM	SiCl4 post valve closed
9/22/2011	8:05:30 AM	Bypass valve closed
9/22/2011	8:05:30 AM	Bubbler valve closed
9/22/2011	8:05:30 AM	Helium valve opened
9/22/2011	8:05:30 AM	Main Vac valve opened
9/22/2011	8:05:30 AM	Helium MFC set to  20.000000
9/22/2011	8:05:30 AM	H2 MFC set to  0.000000
9/22/2011	8:05:30 AM	BCl3 MFC set to  0.000000
9/22/2011	8:05:30 AM	PHl3 MFC set to  0.000000
9/22/2011	8:05:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:05:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:05:30 AM	Tube furnace set to 150
9/22/2011	8:06:00 AM	Helium valve closed
9/22/2011	8:06:00 AM	H2 valve closed
9/22/2011	8:06:00 AM	BCl3 valve closed
9/22/2011	8:06:00 AM	PH3 valve closed
9/22/2011	8:06:00 AM	SiCl4 pre valve closed
9/22/2011	8:06:00 AM	SiCl4 post valve closed
9/22/2011	8:06:00 AM	Bypass valve closed
9/22/2011	8:06:00 AM	Bubbler valve closed
9/22/2011	8:06:00 AM	Main Vac valve opened
9/22/2011	8:06:00 AM	Helium MFC set to  0.000000
9/22/2011	8:06:00 AM	H2 MFC set to  0.000000
9/22/2011	8:06:00 AM	BCl3 MFC set to  0.000000
9/22/2011	8:06:00 AM	PHl3 MFC set to  0.000000
9/22/2011	8:06:00 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:06:00 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:06:00 AM	Tube furnace set to 150
9/22/2011	8:06:30 AM	H2 valve closed
9/22/2011	8:06:30 AM	BCl3 valve closed
9/22/2011	8:06:30 AM	PH3 valve closed
9/22/2011	8:06:30 AM	SiCl4 pre valve closed
9/22/2011	8:06:30 AM	SiCl4 post valve closed
9/22/2011	8:06:30 AM	Bypass valve closed
9/22/2011	8:06:30 AM	Bubbler valve closed
9/22/2011	8:06:30 AM	Helium valve opened
9/22/2011	8:06:30 AM	Main Vac valve opened
9/22/2011	8:06:30 AM	Helium MFC set to  20.000000
9/22/2011	8:06:30 AM	H2 MFC set to  0.000000
9/22/2011	8:06:30 AM	BCl3 MFC set to  0.000000
9/22/2011	8:06:30 AM	PHl3 MFC set to  0.000000
9/22/2011	8:06:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:06:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:06:30 AM	Tube furnace set to 150
9/22/2011	8:07:00 AM	Helium valve closed
9/22/2011	8:07:00 AM	H2 valve closed
9/22/2011	8:07:00 AM	BCl3 valve closed
9/22/2011	8:07:00 AM	PH3 valve closed
9/22/2011	8:07:00 AM	SiCl4 pre valve closed
9/22/2011	8:07:00 AM	SiCl4 post valve closed
9/22/2011	8:07:00 AM	Bypass valve closed
9/22/2011	8:07:00 AM	Bubbler valve closed
9/22/2011	8:07:00 AM	Main Vac valve opened
9/22/2011	8:07:00 AM	Helium MFC set to  0.000000
9/22/2011	8:07:00 AM	H2 MFC set to  0.000000
9/22/2011	8:07:00 AM	BCl3 MFC set to  0.000000
9/22/2011	8:07:00 AM	PHl3 MFC set to  0.000000
9/22/2011	8:07:00 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:07:00 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:07:00 AM	Tube furnace set to 150
9/22/2011	8:07:30 AM	H2 valve closed
9/22/2011	8:07:30 AM	BCl3 valve closed
9/22/2011	8:07:30 AM	PH3 valve closed
9/22/2011	8:07:30 AM	SiCl4 pre valve closed
9/22/2011	8:07:30 AM	SiCl4 post valve closed
9/22/2011	8:07:30 AM	Bypass valve closed
9/22/2011	8:07:30 AM	Bubbler valve closed
9/22/2011	8:07:30 AM	Helium valve opened
9/22/2011	8:07:30 AM	Main Vac valve opened
9/22/2011	8:07:30 AM	Helium MFC set to  20.000000
9/22/2011	8:07:30 AM	H2 MFC set to  0.000000
9/22/2011	8:07:30 AM	BCl3 MFC set to  0.000000
9/22/2011	8:07:30 AM	PHl3 MFC set to  0.000000
9/22/2011	8:07:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:07:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:07:31 AM	Tube furnace set to 150
9/22/2011	8:08:01 AM	Helium valve closed
9/22/2011	8:08:01 AM	H2 valve closed
9/22/2011	8:08:01 AM	BCl3 valve closed
9/22/2011	8:08:01 AM	PH3 valve closed
9/22/2011	8:08:01 AM	SiCl4 pre valve closed
9/22/2011	8:08:01 AM	SiCl4 post valve closed
9/22/2011	8:08:01 AM	Bypass valve closed
9/22/2011	8:08:01 AM	Bubbler valve closed
9/22/2011	8:08:01 AM	Main Vac valve opened
9/22/2011	8:08:01 AM	Helium MFC set to  0.000000
9/22/2011	8:08:01 AM	H2 MFC set to  0.000000
9/22/2011	8:08:01 AM	BCl3 MFC set to  0.000000
9/22/2011	8:08:01 AM	PHl3 MFC set to  0.000000
9/22/2011	8:08:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:08:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:08:01 AM	Tube furnace set to 150
9/22/2011	8:08:31 AM	H2 valve closed
9/22/2011	8:08:31 AM	BCl3 valve closed
9/22/2011	8:08:31 AM	PH3 valve closed
9/22/2011	8:08:31 AM	SiCl4 pre valve closed
9/22/2011	8:08:31 AM	SiCl4 post valve closed
9/22/2011	8:08:31 AM	Bypass valve closed
9/22/2011	8:08:31 AM	Bubbler valve closed
9/22/2011	8:08:31 AM	Helium valve opened
9/22/2011	8:08:31 AM	Main Vac valve opened
9/22/2011	8:08:31 AM	Helium MFC set to  20.000000
9/22/2011	8:08:31 AM	H2 MFC set to  0.000000
9/22/2011	8:08:31 AM	BCl3 MFC set to  0.000000
9/22/2011	8:08:31 AM	PHl3 MFC set to  0.000000
9/22/2011	8:08:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:08:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:08:31 AM	Tube furnace set to 150
9/22/2011	8:09:01 AM	Helium valve closed
9/22/2011	8:09:01 AM	H2 valve closed
9/22/2011	8:09:01 AM	BCl3 valve closed
9/22/2011	8:09:01 AM	PH3 valve closed
9/22/2011	8:09:01 AM	SiCl4 pre valve closed
9/22/2011	8:09:01 AM	SiCl4 post valve closed
9/22/2011	8:09:01 AM	Bypass valve closed
9/22/2011	8:09:01 AM	Bubbler valve closed
9/22/2011	8:09:01 AM	Main Vac valve opened
9/22/2011	8:09:01 AM	Helium MFC set to  0.000000
9/22/2011	8:09:01 AM	H2 MFC set to  0.000000
9/22/2011	8:09:01 AM	BCl3 MFC set to  0.000000
9/22/2011	8:09:01 AM	PHl3 MFC set to  0.000000
9/22/2011	8:09:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:09:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:09:01 AM	Tube furnace set to 150
9/22/2011	8:09:31 AM	H2 valve closed
9/22/2011	8:09:31 AM	BCl3 valve closed
9/22/2011	8:09:31 AM	PH3 valve closed
9/22/2011	8:09:31 AM	SiCl4 pre valve closed
9/22/2011	8:09:31 AM	SiCl4 post valve closed
9/22/2011	8:09:31 AM	Bypass valve closed
9/22/2011	8:09:31 AM	Bubbler valve closed
9/22/2011	8:09:31 AM	Helium valve opened
9/22/2011	8:09:31 AM	Main Vac valve opened
9/22/2011	8:09:31 AM	Helium MFC set to  20.000000
9/22/2011	8:09:31 AM	H2 MFC set to  0.000000
9/22/2011	8:09:31 AM	BCl3 MFC set to  0.000000
9/22/2011	8:09:31 AM	PHl3 MFC set to  0.000000
9/22/2011	8:09:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:09:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:09:31 AM	Tube furnace set to 150
9/22/2011	8:10:01 AM	Helium valve closed
9/22/2011	8:10:01 AM	H2 valve closed
9/22/2011	8:10:01 AM	BCl3 valve closed
9/22/2011	8:10:01 AM	PH3 valve closed
9/22/2011	8:10:01 AM	SiCl4 pre valve closed
9/22/2011	8:10:01 AM	SiCl4 post valve closed
9/22/2011	8:10:01 AM	Bypass valve closed
9/22/2011	8:10:01 AM	Bubbler valve closed
9/22/2011	8:10:01 AM	Main Vac valve opened
9/22/2011	8:10:01 AM	Helium MFC set to  0.000000
9/22/2011	8:10:01 AM	H2 MFC set to  0.000000
9/22/2011	8:10:01 AM	BCl3 MFC set to  0.000000
9/22/2011	8:10:01 AM	PHl3 MFC set to  0.000000
9/22/2011	8:10:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:10:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:10:02 AM	Tube furnace set to 150
9/22/2011	8:10:03 AM	Run finished at 8:10 AM
9/22/2011	8:10:48 AM	Recipe started at 8:10 AM
9/22/2011	8:10:48 AM	Helium valve closed
9/22/2011	8:10:48 AM	H2 valve closed
9/22/2011	8:10:48 AM	BCl3 valve closed
9/22/2011	8:10:48 AM	PH3 valve closed
9/22/2011	8:10:48 AM	SiCl4 pre valve closed
9/22/2011	8:10:48 AM	SiCl4 post valve closed
9/22/2011	8:10:48 AM	Bypass valve closed
9/22/2011	8:10:48 AM	Bubbler valve closed
9/22/2011	8:10:48 AM	Main Vac valve opened
9/22/2011	8:10:48 AM	Helium MFC set to  0.000000
9/22/2011	8:10:48 AM	H2 MFC set to  0.000000
9/22/2011	8:10:48 AM	BCl3 MFC set to  0.000000
9/22/2011	8:10:48 AM	PHl3 MFC set to  0.000000
9/22/2011	8:10:48 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:10:48 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:10:49 AM	Tube furnace set to 150
9/22/2011	8:11:19 AM	H2 valve closed
9/22/2011	8:11:19 AM	BCl3 valve closed
9/22/2011	8:11:19 AM	PH3 valve closed
9/22/2011	8:11:19 AM	SiCl4 pre valve closed
9/22/2011	8:11:19 AM	SiCl4 post valve closed
9/22/2011	8:11:19 AM	Bypass valve closed
9/22/2011	8:11:19 AM	Bubbler valve closed
9/22/2011	8:11:19 AM	Helium valve opened
9/22/2011	8:11:19 AM	Main Vac valve opened
9/22/2011	8:11:19 AM	Helium MFC set to  20.000000
9/22/2011	8:11:19 AM	H2 MFC set to  0.000000
9/22/2011	8:11:19 AM	BCl3 MFC set to  0.000000
9/22/2011	8:11:19 AM	PHl3 MFC set to  0.000000
9/22/2011	8:11:19 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:11:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:11:19 AM	Tube furnace set to 150
9/22/2011	8:11:49 AM	Helium valve closed
9/22/2011	8:11:49 AM	H2 valve closed
9/22/2011	8:11:49 AM	BCl3 valve closed
9/22/2011	8:11:49 AM	PH3 valve closed
9/22/2011	8:11:49 AM	SiCl4 pre valve closed
9/22/2011	8:11:49 AM	SiCl4 post valve closed
9/22/2011	8:11:49 AM	Bypass valve closed
9/22/2011	8:11:49 AM	Bubbler valve closed
9/22/2011	8:11:49 AM	Main Vac valve opened
9/22/2011	8:11:49 AM	Helium MFC set to  0.000000
9/22/2011	8:11:49 AM	H2 MFC set to  0.000000
9/22/2011	8:11:49 AM	BCl3 MFC set to  0.000000
9/22/2011	8:11:49 AM	PHl3 MFC set to  0.000000
9/22/2011	8:11:49 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:11:49 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:11:49 AM	Tube furnace set to 150
9/22/2011	8:12:19 AM	H2 valve closed
9/22/2011	8:12:19 AM	BCl3 valve closed
9/22/2011	8:12:19 AM	PH3 valve closed
9/22/2011	8:12:19 AM	SiCl4 pre valve closed
9/22/2011	8:12:19 AM	SiCl4 post valve closed
9/22/2011	8:12:19 AM	Bypass valve closed
9/22/2011	8:12:19 AM	Bubbler valve closed
9/22/2011	8:12:19 AM	Helium valve opened
9/22/2011	8:12:19 AM	Main Vac valve opened
9/22/2011	8:12:19 AM	Helium MFC set to  20.000000
9/22/2011	8:12:19 AM	H2 MFC set to  0.000000
9/22/2011	8:12:19 AM	BCl3 MFC set to  0.000000
9/22/2011	8:12:19 AM	PHl3 MFC set to  0.000000
9/22/2011	8:12:19 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:12:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:12:19 AM	Tube furnace set to 150
9/22/2011	8:12:49 AM	Helium valve closed
9/22/2011	8:12:49 AM	H2 valve closed
9/22/2011	8:12:49 AM	BCl3 valve closed
9/22/2011	8:12:49 AM	PH3 valve closed
9/22/2011	8:12:49 AM	SiCl4 pre valve closed
9/22/2011	8:12:49 AM	SiCl4 post valve closed
9/22/2011	8:12:49 AM	Bypass valve closed
9/22/2011	8:12:49 AM	Bubbler valve closed
9/22/2011	8:12:49 AM	Main Vac valve opened
9/22/2011	8:12:49 AM	Helium MFC set to  0.000000
9/22/2011	8:12:49 AM	H2 MFC set to  0.000000
9/22/2011	8:12:49 AM	BCl3 MFC set to  0.000000
9/22/2011	8:12:49 AM	PHl3 MFC set to  0.000000
9/22/2011	8:12:49 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:12:49 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:12:49 AM	Tube furnace set to 150
9/22/2011	8:13:19 AM	H2 valve closed
9/22/2011	8:13:19 AM	BCl3 valve closed
9/22/2011	8:13:19 AM	PH3 valve closed
9/22/2011	8:13:19 AM	SiCl4 pre valve closed
9/22/2011	8:13:19 AM	SiCl4 post valve closed
9/22/2011	8:13:19 AM	Bypass valve closed
9/22/2011	8:13:19 AM	Bubbler valve closed
9/22/2011	8:13:19 AM	Helium valve opened
9/22/2011	8:13:19 AM	Main Vac valve opened
9/22/2011	8:13:19 AM	Helium MFC set to  20.000000
9/22/2011	8:13:19 AM	H2 MFC set to  0.000000
9/22/2011	8:13:19 AM	BCl3 MFC set to  0.000000
9/22/2011	8:13:19 AM	PHl3 MFC set to  0.000000
9/22/2011	8:13:19 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:13:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:13:20 AM	Tube furnace set to 150
9/22/2011	8:13:50 AM	Helium valve closed
9/22/2011	8:13:50 AM	H2 valve closed
9/22/2011	8:13:50 AM	BCl3 valve closed
9/22/2011	8:13:50 AM	PH3 valve closed
9/22/2011	8:13:50 AM	SiCl4 pre valve closed
9/22/2011	8:13:50 AM	SiCl4 post valve closed
9/22/2011	8:13:50 AM	Bypass valve closed
9/22/2011	8:13:50 AM	Bubbler valve closed
9/22/2011	8:13:50 AM	Main Vac valve opened
9/22/2011	8:13:50 AM	Helium MFC set to  0.000000
9/22/2011	8:13:50 AM	H2 MFC set to  0.000000
9/22/2011	8:13:50 AM	BCl3 MFC set to  0.000000
9/22/2011	8:13:50 AM	PHl3 MFC set to  0.000000
9/22/2011	8:13:50 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:13:50 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:13:50 AM	Tube furnace set to 150
9/22/2011	8:14:20 AM	H2 valve closed
9/22/2011	8:14:20 AM	BCl3 valve closed
9/22/2011	8:14:20 AM	PH3 valve closed
9/22/2011	8:14:20 AM	SiCl4 pre valve closed
9/22/2011	8:14:20 AM	SiCl4 post valve closed
9/22/2011	8:14:20 AM	Bypass valve closed
9/22/2011	8:14:20 AM	Bubbler valve closed
9/22/2011	8:14:20 AM	Helium valve opened
9/22/2011	8:14:20 AM	Main Vac valve opened
9/22/2011	8:14:20 AM	Helium MFC set to  20.000000
9/22/2011	8:14:20 AM	H2 MFC set to  0.000000
9/22/2011	8:14:20 AM	BCl3 MFC set to  0.000000
9/22/2011	8:14:20 AM	PHl3 MFC set to  0.000000
9/22/2011	8:14:20 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:14:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:14:20 AM	Tube furnace set to 150
9/22/2011	8:14:50 AM	Helium valve closed
9/22/2011	8:14:50 AM	H2 valve closed
9/22/2011	8:14:50 AM	BCl3 valve closed
9/22/2011	8:14:50 AM	PH3 valve closed
9/22/2011	8:14:50 AM	SiCl4 pre valve closed
9/22/2011	8:14:50 AM	SiCl4 post valve closed
9/22/2011	8:14:50 AM	Bypass valve closed
9/22/2011	8:14:50 AM	Bubbler valve closed
9/22/2011	8:14:50 AM	Main Vac valve opened
9/22/2011	8:14:50 AM	Helium MFC set to  0.000000
9/22/2011	8:14:50 AM	H2 MFC set to  0.000000
9/22/2011	8:14:50 AM	BCl3 MFC set to  0.000000
9/22/2011	8:14:50 AM	PHl3 MFC set to  0.000000
9/22/2011	8:14:50 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:14:50 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:14:50 AM	Tube furnace set to 150
9/22/2011	8:15:20 AM	H2 valve closed
9/22/2011	8:15:20 AM	BCl3 valve closed
9/22/2011	8:15:20 AM	PH3 valve closed
9/22/2011	8:15:20 AM	SiCl4 pre valve closed
9/22/2011	8:15:20 AM	SiCl4 post valve closed
9/22/2011	8:15:20 AM	Bypass valve closed
9/22/2011	8:15:20 AM	Bubbler valve closed
9/22/2011	8:15:20 AM	Helium valve opened
9/22/2011	8:15:20 AM	Main Vac valve opened
9/22/2011	8:15:20 AM	Helium MFC set to  20.000000
9/22/2011	8:15:20 AM	H2 MFC set to  0.000000
9/22/2011	8:15:20 AM	BCl3 MFC set to  0.000000
9/22/2011	8:15:20 AM	PHl3 MFC set to  0.000000
9/22/2011	8:15:20 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:15:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:15:20 AM	Tube furnace set to 150
9/22/2011	8:15:50 AM	Helium valve closed
9/22/2011	8:15:50 AM	H2 valve closed
9/22/2011	8:15:50 AM	BCl3 valve closed
9/22/2011	8:15:50 AM	PH3 valve closed
9/22/2011	8:15:50 AM	SiCl4 pre valve closed
9/22/2011	8:15:50 AM	SiCl4 post valve closed
9/22/2011	8:15:50 AM	Bypass valve closed
9/22/2011	8:15:50 AM	Bubbler valve closed
9/22/2011	8:15:50 AM	Main Vac valve opened
9/22/2011	8:15:50 AM	Helium MFC set to  0.000000
9/22/2011	8:15:50 AM	H2 MFC set to  0.000000
9/22/2011	8:15:50 AM	BCl3 MFC set to  0.000000
9/22/2011	8:15:50 AM	PHl3 MFC set to  0.000000
9/22/2011	8:15:50 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:15:50 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:15:50 AM	Tube furnace set to 150
9/22/2011	8:16:21 AM	H2 valve closed
9/22/2011	8:16:21 AM	BCl3 valve closed
9/22/2011	8:16:21 AM	PH3 valve closed
9/22/2011	8:16:21 AM	SiCl4 pre valve closed
9/22/2011	8:16:21 AM	SiCl4 post valve closed
9/22/2011	8:16:21 AM	Bypass valve closed
9/22/2011	8:16:21 AM	Bubbler valve closed
9/22/2011	8:16:21 AM	Helium valve opened
9/22/2011	8:16:21 AM	Main Vac valve opened
9/22/2011	8:16:21 AM	Helium MFC set to  20.000000
9/22/2011	8:16:21 AM	H2 MFC set to  0.000000
9/22/2011	8:16:21 AM	BCl3 MFC set to  0.000000
9/22/2011	8:16:21 AM	PHl3 MFC set to  0.000000
9/22/2011	8:16:21 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:16:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:16:21 AM	Tube furnace set to 150
9/22/2011	8:16:51 AM	Helium valve closed
9/22/2011	8:16:51 AM	H2 valve closed
9/22/2011	8:16:51 AM	BCl3 valve closed
9/22/2011	8:16:51 AM	PH3 valve closed
9/22/2011	8:16:51 AM	SiCl4 pre valve closed
9/22/2011	8:16:51 AM	SiCl4 post valve closed
9/22/2011	8:16:51 AM	Bypass valve closed
9/22/2011	8:16:51 AM	Bubbler valve closed
9/22/2011	8:16:51 AM	Main Vac valve opened
9/22/2011	8:16:51 AM	Helium MFC set to  0.000000
9/22/2011	8:16:51 AM	H2 MFC set to  0.000000
9/22/2011	8:16:51 AM	BCl3 MFC set to  0.000000
9/22/2011	8:16:51 AM	PHl3 MFC set to  0.000000
9/22/2011	8:16:51 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:16:51 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:16:51 AM	Tube furnace set to 150
9/22/2011	8:17:21 AM	H2 valve closed
9/22/2011	8:17:21 AM	BCl3 valve closed
9/22/2011	8:17:21 AM	PH3 valve closed
9/22/2011	8:17:21 AM	SiCl4 pre valve closed
9/22/2011	8:17:21 AM	SiCl4 post valve closed
9/22/2011	8:17:21 AM	Bypass valve closed
9/22/2011	8:17:21 AM	Bubbler valve closed
9/22/2011	8:17:21 AM	Helium valve opened
9/22/2011	8:17:21 AM	Main Vac valve opened
9/22/2011	8:17:21 AM	Helium MFC set to  20.000000
9/22/2011	8:17:21 AM	H2 MFC set to  0.000000
9/22/2011	8:17:21 AM	BCl3 MFC set to  0.000000
9/22/2011	8:17:21 AM	PHl3 MFC set to  0.000000
9/22/2011	8:17:21 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:17:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:17:21 AM	Tube furnace set to 150
9/22/2011	8:17:51 AM	Helium valve closed
9/22/2011	8:17:51 AM	H2 valve closed
9/22/2011	8:17:51 AM	BCl3 valve closed
9/22/2011	8:17:51 AM	PH3 valve closed
9/22/2011	8:17:51 AM	SiCl4 pre valve closed
9/22/2011	8:17:51 AM	SiCl4 post valve closed
9/22/2011	8:17:51 AM	Bypass valve closed
9/22/2011	8:17:51 AM	Bubbler valve closed
9/22/2011	8:17:51 AM	Main Vac valve opened
9/22/2011	8:17:51 AM	Helium MFC set to  0.000000
9/22/2011	8:17:51 AM	H2 MFC set to  0.000000
9/22/2011	8:17:51 AM	BCl3 MFC set to  0.000000
9/22/2011	8:17:51 AM	PHl3 MFC set to  0.000000
9/22/2011	8:17:51 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:17:51 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:17:51 AM	Tube furnace set to 150
9/22/2011	8:18:21 AM	H2 valve closed
9/22/2011	8:18:21 AM	BCl3 valve closed
9/22/2011	8:18:21 AM	PH3 valve closed
9/22/2011	8:18:21 AM	SiCl4 pre valve closed
9/22/2011	8:18:21 AM	SiCl4 post valve closed
9/22/2011	8:18:21 AM	Bypass valve closed
9/22/2011	8:18:21 AM	Bubbler valve closed
9/22/2011	8:18:21 AM	Helium valve opened
9/22/2011	8:18:21 AM	Main Vac valve opened
9/22/2011	8:18:21 AM	Helium MFC set to  20.000000
9/22/2011	8:18:21 AM	H2 MFC set to  0.000000
9/22/2011	8:18:21 AM	BCl3 MFC set to  0.000000
9/22/2011	8:18:21 AM	PHl3 MFC set to  0.000000
9/22/2011	8:18:21 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:18:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:18:21 AM	Tube furnace set to 150
9/22/2011	8:18:51 AM	Helium valve closed
9/22/2011	8:18:51 AM	H2 valve closed
9/22/2011	8:18:52 AM	BCl3 valve closed
9/22/2011	8:18:52 AM	PH3 valve closed
9/22/2011	8:18:52 AM	SiCl4 pre valve closed
9/22/2011	8:18:52 AM	SiCl4 post valve closed
9/22/2011	8:18:52 AM	Bypass valve closed
9/22/2011	8:18:52 AM	Bubbler valve closed
9/22/2011	8:18:52 AM	Main Vac valve opened
9/22/2011	8:18:52 AM	Helium MFC set to  0.000000
9/22/2011	8:18:52 AM	H2 MFC set to  0.000000
9/22/2011	8:18:52 AM	BCl3 MFC set to  0.000000
9/22/2011	8:18:52 AM	PHl3 MFC set to  0.000000
9/22/2011	8:18:52 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:18:52 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:18:52 AM	Tube furnace set to 150
9/22/2011	8:19:22 AM	H2 valve closed
9/22/2011	8:19:22 AM	BCl3 valve closed
9/22/2011	8:19:22 AM	PH3 valve closed
9/22/2011	8:19:22 AM	SiCl4 pre valve closed
9/22/2011	8:19:22 AM	SiCl4 post valve closed
9/22/2011	8:19:22 AM	Bypass valve closed
9/22/2011	8:19:22 AM	Bubbler valve closed
9/22/2011	8:19:22 AM	Helium valve opened
9/22/2011	8:19:22 AM	Main Vac valve opened
9/22/2011	8:19:22 AM	Helium MFC set to  20.000000
9/22/2011	8:19:22 AM	H2 MFC set to  0.000000
9/22/2011	8:19:22 AM	BCl3 MFC set to  0.000000
9/22/2011	8:19:22 AM	PHl3 MFC set to  0.000000
9/22/2011	8:19:22 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:19:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:19:22 AM	Tube furnace set to 150
9/22/2011	8:19:52 AM	Helium valve closed
9/22/2011	8:19:52 AM	H2 valve closed
9/22/2011	8:19:52 AM	BCl3 valve closed
9/22/2011	8:19:52 AM	PH3 valve closed
9/22/2011	8:19:52 AM	SiCl4 pre valve closed
9/22/2011	8:19:52 AM	SiCl4 post valve closed
9/22/2011	8:19:52 AM	Bypass valve closed
9/22/2011	8:19:52 AM	Bubbler valve closed
9/22/2011	8:19:52 AM	Main Vac valve opened
9/22/2011	8:19:52 AM	Helium MFC set to  0.000000
9/22/2011	8:19:52 AM	H2 MFC set to  0.000000
9/22/2011	8:19:52 AM	BCl3 MFC set to  0.000000
9/22/2011	8:19:52 AM	PHl3 MFC set to  0.000000
9/22/2011	8:19:52 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:19:52 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:19:52 AM	Tube furnace set to 150
9/22/2011	8:20:22 AM	H2 valve closed
9/22/2011	8:20:22 AM	BCl3 valve closed
9/22/2011	8:20:22 AM	PH3 valve closed
9/22/2011	8:20:22 AM	SiCl4 pre valve closed
9/22/2011	8:20:22 AM	SiCl4 post valve closed
9/22/2011	8:20:22 AM	Bypass valve closed
9/22/2011	8:20:22 AM	Bubbler valve closed
9/22/2011	8:20:22 AM	Helium valve opened
9/22/2011	8:20:22 AM	Main Vac valve opened
9/22/2011	8:20:22 AM	Helium MFC set to  20.000000
9/22/2011	8:20:22 AM	H2 MFC set to  0.000000
9/22/2011	8:20:22 AM	BCl3 MFC set to  0.000000
9/22/2011	8:20:22 AM	PHl3 MFC set to  0.000000
9/22/2011	8:20:22 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:20:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:20:22 AM	Tube furnace set to 150
9/22/2011	8:20:52 AM	Helium valve closed
9/22/2011	8:20:52 AM	H2 valve closed
9/22/2011	8:20:52 AM	BCl3 valve closed
9/22/2011	8:20:52 AM	PH3 valve closed
9/22/2011	8:20:52 AM	SiCl4 pre valve closed
9/22/2011	8:20:52 AM	SiCl4 post valve closed
9/22/2011	8:20:52 AM	Bypass valve closed
9/22/2011	8:20:52 AM	Bubbler valve closed
9/22/2011	8:20:52 AM	Main Vac valve opened
9/22/2011	8:20:52 AM	Helium MFC set to  0.000000
9/22/2011	8:20:52 AM	H2 MFC set to  0.000000
9/22/2011	8:20:52 AM	BCl3 MFC set to  0.000000
9/22/2011	8:20:52 AM	PHl3 MFC set to  0.000000
9/22/2011	8:20:52 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:20:52 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:20:53 AM	Tube furnace set to 150
9/22/2011	8:20:54 AM	Run finished at 8:20 AM
9/22/2011	8:23:31 AM	Recipe started at 8:23 AM
9/22/2011	8:23:31 AM	Helium valve closed
9/22/2011	8:23:31 AM	H2 valve closed
9/22/2011	8:23:31 AM	BCl3 valve closed
9/22/2011	8:23:31 AM	PH3 valve closed
9/22/2011	8:23:31 AM	SiCl4 pre valve closed
9/22/2011	8:23:31 AM	SiCl4 post valve closed
9/22/2011	8:23:31 AM	Bypass valve closed
9/22/2011	8:23:31 AM	Bubbler valve closed
9/22/2011	8:23:31 AM	Main Vac valve opened
9/22/2011	8:23:31 AM	Helium MFC set to  0.000000
9/22/2011	8:23:31 AM	H2 MFC set to  0.000000
9/22/2011	8:23:31 AM	BCl3 MFC set to  0.000000
9/22/2011	8:23:31 AM	PHl3 MFC set to  0.000000
9/22/2011	8:23:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:23:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:23:31 AM	Tube furnace set to 150
9/22/2011	8:24:01 AM	H2 valve closed
9/22/2011	8:24:01 AM	BCl3 valve closed
9/22/2011	8:24:01 AM	PH3 valve closed
9/22/2011	8:24:01 AM	SiCl4 pre valve closed
9/22/2011	8:24:01 AM	SiCl4 post valve closed
9/22/2011	8:24:01 AM	Bypass valve closed
9/22/2011	8:24:01 AM	Bubbler valve closed
9/22/2011	8:24:01 AM	Helium valve opened
9/22/2011	8:24:01 AM	Main Vac valve opened
9/22/2011	8:24:01 AM	Helium MFC set to  20.000000
9/22/2011	8:24:01 AM	H2 MFC set to  0.000000
9/22/2011	8:24:01 AM	BCl3 MFC set to  0.000000
9/22/2011	8:24:01 AM	PHl3 MFC set to  0.000000
9/22/2011	8:24:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:24:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:24:01 AM	Tube furnace set to 150
9/22/2011	8:24:31 AM	Helium valve closed
9/22/2011	8:24:31 AM	H2 valve closed
9/22/2011	8:24:31 AM	BCl3 valve closed
9/22/2011	8:24:31 AM	PH3 valve closed
9/22/2011	8:24:31 AM	SiCl4 pre valve closed
9/22/2011	8:24:31 AM	SiCl4 post valve closed
9/22/2011	8:24:31 AM	Bypass valve closed
9/22/2011	8:24:31 AM	Bubbler valve closed
9/22/2011	8:24:31 AM	Main Vac valve opened
9/22/2011	8:24:31 AM	Helium MFC set to  0.000000
9/22/2011	8:24:31 AM	H2 MFC set to  0.000000
9/22/2011	8:24:31 AM	BCl3 MFC set to  0.000000
9/22/2011	8:24:31 AM	PHl3 MFC set to  0.000000
9/22/2011	8:24:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:24:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:24:31 AM	Tube furnace set to 150
9/22/2011	8:25:01 AM	H2 valve closed
9/22/2011	8:25:01 AM	BCl3 valve closed
9/22/2011	8:25:01 AM	PH3 valve closed
9/22/2011	8:25:01 AM	SiCl4 pre valve closed
9/22/2011	8:25:01 AM	SiCl4 post valve closed
9/22/2011	8:25:01 AM	Bypass valve closed
9/22/2011	8:25:01 AM	Bubbler valve closed
9/22/2011	8:25:01 AM	Helium valve opened
9/22/2011	8:25:01 AM	Main Vac valve opened
9/22/2011	8:25:01 AM	Helium MFC set to  20.000000
9/22/2011	8:25:01 AM	H2 MFC set to  0.000000
9/22/2011	8:25:01 AM	BCl3 MFC set to  0.000000
9/22/2011	8:25:01 AM	PHl3 MFC set to  0.000000
9/22/2011	8:25:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:25:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:25:01 AM	Tube furnace set to 150
9/22/2011	8:25:31 AM	Helium valve closed
9/22/2011	8:25:31 AM	H2 valve closed
9/22/2011	8:25:31 AM	BCl3 valve closed
9/22/2011	8:25:31 AM	PH3 valve closed
9/22/2011	8:25:31 AM	SiCl4 pre valve closed
9/22/2011	8:25:31 AM	SiCl4 post valve closed
9/22/2011	8:25:31 AM	Bypass valve closed
9/22/2011	8:25:31 AM	Bubbler valve closed
9/22/2011	8:25:31 AM	Main Vac valve opened
9/22/2011	8:25:31 AM	Helium MFC set to  0.000000
9/22/2011	8:25:31 AM	H2 MFC set to  0.000000
9/22/2011	8:25:31 AM	BCl3 MFC set to  0.000000
9/22/2011	8:25:31 AM	PHl3 MFC set to  0.000000
9/22/2011	8:25:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:25:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:25:32 AM	Tube furnace set to 150
9/22/2011	8:26:02 AM	H2 valve closed
9/22/2011	8:26:02 AM	BCl3 valve closed
9/22/2011	8:26:02 AM	PH3 valve closed
9/22/2011	8:26:02 AM	SiCl4 pre valve closed
9/22/2011	8:26:02 AM	SiCl4 post valve closed
9/22/2011	8:26:02 AM	Bypass valve closed
9/22/2011	8:26:02 AM	Bubbler valve closed
9/22/2011	8:26:02 AM	Helium valve opened
9/22/2011	8:26:02 AM	Main Vac valve opened
9/22/2011	8:26:02 AM	Helium MFC set to  20.000000
9/22/2011	8:26:02 AM	H2 MFC set to  0.000000
9/22/2011	8:26:02 AM	BCl3 MFC set to  0.000000
9/22/2011	8:26:02 AM	PHl3 MFC set to  0.000000
9/22/2011	8:26:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:26:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:26:02 AM	Tube furnace set to 150
9/22/2011	8:26:32 AM	Helium valve closed
9/22/2011	8:26:32 AM	H2 valve closed
9/22/2011	8:26:32 AM	BCl3 valve closed
9/22/2011	8:26:32 AM	PH3 valve closed
9/22/2011	8:26:32 AM	SiCl4 pre valve closed
9/22/2011	8:26:32 AM	SiCl4 post valve closed
9/22/2011	8:26:32 AM	Bypass valve closed
9/22/2011	8:26:32 AM	Bubbler valve closed
9/22/2011	8:26:32 AM	Main Vac valve opened
9/22/2011	8:26:32 AM	Helium MFC set to  0.000000
9/22/2011	8:26:32 AM	H2 MFC set to  0.000000
9/22/2011	8:26:32 AM	BCl3 MFC set to  0.000000
9/22/2011	8:26:32 AM	PHl3 MFC set to  0.000000
9/22/2011	8:26:32 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:26:32 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:26:32 AM	Tube furnace set to 150
9/22/2011	8:27:02 AM	H2 valve closed
9/22/2011	8:27:02 AM	BCl3 valve closed
9/22/2011	8:27:02 AM	PH3 valve closed
9/22/2011	8:27:02 AM	SiCl4 pre valve closed
9/22/2011	8:27:02 AM	SiCl4 post valve closed
9/22/2011	8:27:02 AM	Bypass valve closed
9/22/2011	8:27:02 AM	Bubbler valve closed
9/22/2011	8:27:02 AM	Helium valve opened
9/22/2011	8:27:02 AM	Main Vac valve opened
9/22/2011	8:27:02 AM	Helium MFC set to  20.000000
9/22/2011	8:27:02 AM	H2 MFC set to  0.000000
9/22/2011	8:27:02 AM	BCl3 MFC set to  0.000000
9/22/2011	8:27:02 AM	PHl3 MFC set to  0.000000
9/22/2011	8:27:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:27:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:27:02 AM	Tube furnace set to 150
9/22/2011	8:27:32 AM	Helium valve closed
9/22/2011	8:27:32 AM	H2 valve closed
9/22/2011	8:27:32 AM	BCl3 valve closed
9/22/2011	8:27:32 AM	PH3 valve closed
9/22/2011	8:27:32 AM	SiCl4 pre valve closed
9/22/2011	8:27:32 AM	SiCl4 post valve closed
9/22/2011	8:27:32 AM	Bypass valve closed
9/22/2011	8:27:32 AM	Bubbler valve closed
9/22/2011	8:27:32 AM	Main Vac valve opened
9/22/2011	8:27:32 AM	Helium MFC set to  0.000000
9/22/2011	8:27:32 AM	H2 MFC set to  0.000000
9/22/2011	8:27:32 AM	BCl3 MFC set to  0.000000
9/22/2011	8:27:32 AM	PHl3 MFC set to  0.000000
9/22/2011	8:27:32 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:27:32 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:27:32 AM	Tube furnace set to 150
9/22/2011	8:28:02 AM	H2 valve closed
9/22/2011	8:28:02 AM	BCl3 valve closed
9/22/2011	8:28:02 AM	PH3 valve closed
9/22/2011	8:28:02 AM	SiCl4 pre valve closed
9/22/2011	8:28:02 AM	SiCl4 post valve closed
9/22/2011	8:28:02 AM	Bypass valve closed
9/22/2011	8:28:02 AM	Bubbler valve closed
9/22/2011	8:28:02 AM	Helium valve opened
9/22/2011	8:28:02 AM	Main Vac valve opened
9/22/2011	8:28:02 AM	Helium MFC set to  20.000000
9/22/2011	8:28:02 AM	H2 MFC set to  0.000000
9/22/2011	8:28:02 AM	BCl3 MFC set to  0.000000
9/22/2011	8:28:02 AM	PHl3 MFC set to  0.000000
9/22/2011	8:28:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:28:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:28:03 AM	Tube furnace set to 150
9/22/2011	8:28:33 AM	Helium valve closed
9/22/2011	8:28:33 AM	H2 valve closed
9/22/2011	8:28:33 AM	BCl3 valve closed
9/22/2011	8:28:33 AM	PH3 valve closed
9/22/2011	8:28:33 AM	SiCl4 pre valve closed
9/22/2011	8:28:33 AM	SiCl4 post valve closed
9/22/2011	8:28:33 AM	Bypass valve closed
9/22/2011	8:28:33 AM	Bubbler valve closed
9/22/2011	8:28:33 AM	Main Vac valve opened
9/22/2011	8:28:33 AM	Helium MFC set to  0.000000
9/22/2011	8:28:33 AM	H2 MFC set to  0.000000
9/22/2011	8:28:33 AM	BCl3 MFC set to  0.000000
9/22/2011	8:28:33 AM	PHl3 MFC set to  0.000000
9/22/2011	8:28:33 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:28:33 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:28:33 AM	Tube furnace set to 150
9/22/2011	8:29:03 AM	H2 valve closed
9/22/2011	8:29:03 AM	BCl3 valve closed
9/22/2011	8:29:03 AM	PH3 valve closed
9/22/2011	8:29:03 AM	SiCl4 pre valve closed
9/22/2011	8:29:03 AM	SiCl4 post valve closed
9/22/2011	8:29:03 AM	Bypass valve closed
9/22/2011	8:29:03 AM	Bubbler valve closed
9/22/2011	8:29:03 AM	Helium valve opened
9/22/2011	8:29:03 AM	Main Vac valve opened
9/22/2011	8:29:03 AM	Helium MFC set to  20.000000
9/22/2011	8:29:03 AM	H2 MFC set to  0.000000
9/22/2011	8:29:03 AM	BCl3 MFC set to  0.000000
9/22/2011	8:29:03 AM	PHl3 MFC set to  0.000000
9/22/2011	8:29:03 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:29:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:29:03 AM	Tube furnace set to 150
9/22/2011	8:29:33 AM	Helium valve closed
9/22/2011	8:29:33 AM	H2 valve closed
9/22/2011	8:29:33 AM	BCl3 valve closed
9/22/2011	8:29:33 AM	PH3 valve closed
9/22/2011	8:29:33 AM	SiCl4 pre valve closed
9/22/2011	8:29:33 AM	SiCl4 post valve closed
9/22/2011	8:29:33 AM	Bypass valve closed
9/22/2011	8:29:33 AM	Bubbler valve closed
9/22/2011	8:29:33 AM	Main Vac valve opened
9/22/2011	8:29:33 AM	Helium MFC set to  0.000000
9/22/2011	8:29:33 AM	H2 MFC set to  0.000000
9/22/2011	8:29:33 AM	BCl3 MFC set to  0.000000
9/22/2011	8:29:33 AM	PHl3 MFC set to  0.000000
9/22/2011	8:29:33 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:29:33 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:29:33 AM	Tube furnace set to 150
9/22/2011	8:30:03 AM	H2 valve closed
9/22/2011	8:30:03 AM	BCl3 valve closed
9/22/2011	8:30:03 AM	PH3 valve closed
9/22/2011	8:30:03 AM	SiCl4 pre valve closed
9/22/2011	8:30:03 AM	SiCl4 post valve closed
9/22/2011	8:30:03 AM	Bypass valve closed
9/22/2011	8:30:03 AM	Bubbler valve closed
9/22/2011	8:30:03 AM	Helium valve opened
9/22/2011	8:30:03 AM	Main Vac valve opened
9/22/2011	8:30:03 AM	Helium MFC set to  20.000000
9/22/2011	8:30:03 AM	H2 MFC set to  0.000000
9/22/2011	8:30:03 AM	BCl3 MFC set to  0.000000
9/22/2011	8:30:03 AM	PHl3 MFC set to  0.000000
9/22/2011	8:30:03 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:30:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:30:03 AM	Tube furnace set to 150
9/22/2011	8:30:33 AM	Helium valve closed
9/22/2011	8:30:33 AM	H2 valve closed
9/22/2011	8:30:33 AM	BCl3 valve closed
9/22/2011	8:30:33 AM	PH3 valve closed
9/22/2011	8:30:33 AM	SiCl4 pre valve closed
9/22/2011	8:30:33 AM	SiCl4 post valve closed
9/22/2011	8:30:33 AM	Bypass valve closed
9/22/2011	8:30:33 AM	Bubbler valve closed
9/22/2011	8:30:33 AM	Main Vac valve opened
9/22/2011	8:30:33 AM	Helium MFC set to  0.000000
9/22/2011	8:30:33 AM	H2 MFC set to  0.000000
9/22/2011	8:30:33 AM	BCl3 MFC set to  0.000000
9/22/2011	8:30:33 AM	PHl3 MFC set to  0.000000
9/22/2011	8:30:33 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:30:33 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:30:34 AM	Tube furnace set to 150
9/22/2011	8:31:04 AM	H2 valve closed
9/22/2011	8:31:04 AM	BCl3 valve closed
9/22/2011	8:31:04 AM	PH3 valve closed
9/22/2011	8:31:04 AM	SiCl4 pre valve closed
9/22/2011	8:31:04 AM	SiCl4 post valve closed
9/22/2011	8:31:04 AM	Bypass valve closed
9/22/2011	8:31:04 AM	Bubbler valve closed
9/22/2011	8:31:04 AM	Helium valve opened
9/22/2011	8:31:04 AM	Main Vac valve opened
9/22/2011	8:31:04 AM	Helium MFC set to  20.000000
9/22/2011	8:31:04 AM	H2 MFC set to  0.000000
9/22/2011	8:31:04 AM	BCl3 MFC set to  0.000000
9/22/2011	8:31:04 AM	PHl3 MFC set to  0.000000
9/22/2011	8:31:04 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:31:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:31:04 AM	Tube furnace set to 150
9/22/2011	8:31:34 AM	Helium valve closed
9/22/2011	8:31:34 AM	H2 valve closed
9/22/2011	8:31:34 AM	BCl3 valve closed
9/22/2011	8:31:34 AM	PH3 valve closed
9/22/2011	8:31:34 AM	SiCl4 pre valve closed
9/22/2011	8:31:34 AM	SiCl4 post valve closed
9/22/2011	8:31:34 AM	Bypass valve closed
9/22/2011	8:31:34 AM	Bubbler valve closed
9/22/2011	8:31:34 AM	Main Vac valve opened
9/22/2011	8:31:34 AM	Helium MFC set to  0.000000
9/22/2011	8:31:34 AM	H2 MFC set to  0.000000
9/22/2011	8:31:34 AM	BCl3 MFC set to  0.000000
9/22/2011	8:31:34 AM	PHl3 MFC set to  0.000000
9/22/2011	8:31:34 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:31:34 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:31:34 AM	Tube furnace set to 150
9/22/2011	8:32:04 AM	H2 valve closed
9/22/2011	8:32:04 AM	BCl3 valve closed
9/22/2011	8:32:04 AM	PH3 valve closed
9/22/2011	8:32:04 AM	SiCl4 pre valve closed
9/22/2011	8:32:04 AM	SiCl4 post valve closed
9/22/2011	8:32:04 AM	Bypass valve closed
9/22/2011	8:32:04 AM	Bubbler valve closed
9/22/2011	8:32:04 AM	Helium valve opened
9/22/2011	8:32:04 AM	Main Vac valve opened
9/22/2011	8:32:04 AM	Helium MFC set to  20.000000
9/22/2011	8:32:04 AM	H2 MFC set to  0.000000
9/22/2011	8:32:04 AM	BCl3 MFC set to  0.000000
9/22/2011	8:32:04 AM	PHl3 MFC set to  0.000000
9/22/2011	8:32:04 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:32:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:32:04 AM	Tube furnace set to 150
9/22/2011	8:32:34 AM	Helium valve closed
9/22/2011	8:32:34 AM	H2 valve closed
9/22/2011	8:32:34 AM	BCl3 valve closed
9/22/2011	8:32:34 AM	PH3 valve closed
9/22/2011	8:32:34 AM	SiCl4 pre valve closed
9/22/2011	8:32:34 AM	SiCl4 post valve closed
9/22/2011	8:32:34 AM	Bypass valve closed
9/22/2011	8:32:34 AM	Bubbler valve closed
9/22/2011	8:32:34 AM	Main Vac valve opened
9/22/2011	8:32:34 AM	Helium MFC set to  0.000000
9/22/2011	8:32:34 AM	H2 MFC set to  0.000000
9/22/2011	8:32:34 AM	BCl3 MFC set to  0.000000
9/22/2011	8:32:34 AM	PHl3 MFC set to  0.000000
9/22/2011	8:32:34 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:32:34 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:32:34 AM	Tube furnace set to 150
9/22/2011	8:33:04 AM	H2 valve closed
9/22/2011	8:33:04 AM	BCl3 valve closed
9/22/2011	8:33:04 AM	PH3 valve closed
9/22/2011	8:33:04 AM	SiCl4 pre valve closed
9/22/2011	8:33:04 AM	SiCl4 post valve closed
9/22/2011	8:33:04 AM	Bypass valve closed
9/22/2011	8:33:04 AM	Bubbler valve closed
9/22/2011	8:33:04 AM	Helium valve opened
9/22/2011	8:33:04 AM	Main Vac valve opened
9/22/2011	8:33:04 AM	Helium MFC set to  20.000000
9/22/2011	8:33:04 AM	H2 MFC set to  0.000000
9/22/2011	8:33:04 AM	BCl3 MFC set to  0.000000
9/22/2011	8:33:04 AM	PHl3 MFC set to  0.000000
9/22/2011	8:33:04 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:33:04 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:33:05 AM	Tube furnace set to 150
9/22/2011	8:33:35 AM	Helium valve closed
9/22/2011	8:33:35 AM	H2 valve closed
9/22/2011	8:33:35 AM	BCl3 valve closed
9/22/2011	8:33:35 AM	PH3 valve closed
9/22/2011	8:33:35 AM	SiCl4 pre valve closed
9/22/2011	8:33:35 AM	SiCl4 post valve closed
9/22/2011	8:33:35 AM	Bypass valve closed
9/22/2011	8:33:35 AM	Bubbler valve closed
9/22/2011	8:33:35 AM	Main Vac valve opened
9/22/2011	8:33:35 AM	Helium MFC set to  0.000000
9/22/2011	8:33:35 AM	H2 MFC set to  0.000000
9/22/2011	8:33:35 AM	BCl3 MFC set to  0.000000
9/22/2011	8:33:35 AM	PHl3 MFC set to  0.000000
9/22/2011	8:33:35 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:33:35 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:33:35 AM	Tube furnace set to 150
9/22/2011	8:33:36 AM	Run finished at 8:33 AM
9/22/2011	8:40:42 AM	Tube furnace set to 35
9/22/2011	8:42:20 AM	Main Vac valve closed
9/22/2011	8:42:36 AM	Main Vac valve opened
9/22/2011	8:43:12 AM	Main Vac valve closed
9/22/2011	8:43:27 AM	Main Vac valve opened
9/22/2011	8:46:32 AM	Recipe started at 8:46 AM
9/22/2011	8:46:32 AM	Helium valve closed
9/22/2011	8:46:32 AM	H2 valve closed
9/22/2011	8:46:32 AM	BCl3 valve closed
9/22/2011	8:46:32 AM	PH3 valve closed
9/22/2011	8:46:32 AM	SiCl4 pre valve closed
9/22/2011	8:46:32 AM	SiCl4 post valve closed
9/22/2011	8:46:32 AM	Main Vac valve closed
9/22/2011	8:46:32 AM	Bypass valve closed
9/22/2011	8:46:32 AM	Bubbler valve closed
9/22/2011	8:46:32 AM	Helium MFC set to  0.000000
9/22/2011	8:46:32 AM	H2 MFC set to  0.000000
9/22/2011	8:46:32 AM	BCl3 MFC set to  0.000000
9/22/2011	8:46:32 AM	PHl3 MFC set to  0.000000
9/22/2011	8:46:32 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:46:32 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:46:33 AM	Tube furnace set to 0
9/22/2011	8:46:36 AM	Helium valve closed
9/22/2011	8:46:36 AM	BCl3 valve closed
9/22/2011	8:46:36 AM	PH3 valve closed
9/22/2011	8:46:36 AM	SiCl4 pre valve closed
9/22/2011	8:46:36 AM	SiCl4 post valve closed
9/22/2011	8:46:36 AM	Main Vac valve closed
9/22/2011	8:46:36 AM	Bypass valve closed
9/22/2011	8:46:36 AM	Bubbler valve closed
9/22/2011	8:46:36 AM	H2 valve opened
9/22/2011	8:46:36 AM	Helium MFC set to  0.000000
9/22/2011	8:46:36 AM	H2 MFC set to  500.000000
9/22/2011	8:46:36 AM	BCl3 MFC set to  0.000000
9/22/2011	8:46:36 AM	PHl3 MFC set to  0.000000
9/22/2011	8:46:36 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:46:36 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:46:36 AM	Tube furnace set to 0
9/22/2011	8:47:40 AM	Helium valve closed
9/22/2011	8:47:40 AM	BCl3 valve closed
9/22/2011	8:47:40 AM	PH3 valve closed
9/22/2011	8:47:40 AM	SiCl4 pre valve closed
9/22/2011	8:47:40 AM	SiCl4 post valve closed
9/22/2011	8:47:40 AM	Main Vac valve closed
9/22/2011	8:47:40 AM	Bypass valve closed
9/22/2011	8:47:40 AM	H2 valve opened
9/22/2011	8:47:40 AM	Bubbler valve opened
9/22/2011	8:47:40 AM	Helium MFC set to  0.000000
9/22/2011	8:47:40 AM	H2 MFC set to  500.000000
9/22/2011	8:47:40 AM	BCl3 MFC set to  0.000000
9/22/2011	8:47:40 AM	PHl3 MFC set to  0.000000
9/22/2011	8:47:40 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:47:40 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:47:40 AM	Tube furnace set to 0
9/22/2011	8:47:41 AM	Helium valve closed
9/22/2011	8:47:41 AM	BCl3 valve closed
9/22/2011	8:47:41 AM	PH3 valve closed
9/22/2011	8:47:41 AM	SiCl4 pre valve closed
9/22/2011	8:47:41 AM	SiCl4 post valve closed
9/22/2011	8:47:41 AM	Main Vac valve closed
9/22/2011	8:47:41 AM	Bypass valve closed
9/22/2011	8:47:41 AM	H2 valve opened
9/22/2011	8:47:41 AM	Bubbler valve opened
9/22/2011	8:47:41 AM	Helium MFC set to  0.000000
9/22/2011	8:47:41 AM	H2 MFC set to  500.000000
9/22/2011	8:47:42 AM	BCl3 MFC set to  0.000000
9/22/2011	8:47:42 AM	PHl3 MFC set to  0.000000
9/22/2011	8:47:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	8:47:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	8:47:42 AM	Tube furnace set to 1000
9/22/2011	9:07:42 AM	Helium valve closed
9/22/2011	9:07:42 AM	PH3 valve closed
9/22/2011	9:07:42 AM	Main Vac valve closed
9/22/2011	9:07:42 AM	Bypass valve closed
9/22/2011	9:07:42 AM	H2 valve opened
9/22/2011	9:07:42 AM	BCl3 valve opened
9/22/2011	9:07:42 AM	SiCl4 pre valve opened
9/22/2011	9:07:42 AM	SiCl4 post valve opened
9/22/2011	9:07:42 AM	Bubbler valve opened
9/22/2011	9:07:42 AM	Helium MFC set to  0.000000
9/22/2011	9:07:42 AM	H2 MFC set to  500.000000
9/22/2011	9:07:42 AM	BCl3 MFC set to  2.500000
9/22/2011	9:07:42 AM	PHl3 MFC set to  0.000000
9/22/2011	9:07:42 AM	SiCl4 MFC set to  50.000000
9/22/2011	9:07:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:07:42 AM	Tube furnace set to 1000
9/22/2011	9:17:42 AM	Helium valve closed
9/22/2011	9:17:42 AM	BCl3 valve closed
9/22/2011	9:17:42 AM	PH3 valve closed
9/22/2011	9:17:42 AM	SiCl4 pre valve closed
9/22/2011	9:17:42 AM	SiCl4 post valve closed
9/22/2011	9:17:42 AM	Main Vac valve closed
9/22/2011	9:17:42 AM	Bypass valve closed
9/22/2011	9:17:42 AM	H2 valve opened
9/22/2011	9:17:42 AM	Bubbler valve opened
9/22/2011	9:17:42 AM	Helium MFC set to  0.000000
9/22/2011	9:17:42 AM	H2 MFC set to  500.000000
9/22/2011	9:17:42 AM	BCl3 MFC set to  0.000000
9/22/2011	9:17:42 AM	PHl3 MFC set to  0.000000
9/22/2011	9:17:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:17:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:17:42 AM	Tube furnace set to 750
9/22/2011	9:22:42 AM	H2 valve closed
9/22/2011	9:22:42 AM	BCl3 valve closed
9/22/2011	9:22:42 AM	PH3 valve closed
9/22/2011	9:22:42 AM	SiCl4 pre valve closed
9/22/2011	9:22:42 AM	SiCl4 post valve closed
9/22/2011	9:22:42 AM	Main Vac valve closed
9/22/2011	9:22:42 AM	Bypass valve closed
9/22/2011	9:22:42 AM	Helium valve opened
9/22/2011	9:22:42 AM	Bubbler valve opened
9/22/2011	9:22:42 AM	Helium MFC set to  500.000000
9/22/2011	9:22:42 AM	H2 MFC set to  0.000000
9/22/2011	9:22:42 AM	BCl3 MFC set to  0.000000
9/22/2011	9:22:42 AM	PHl3 MFC set to  0.000000
9/22/2011	9:22:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:22:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:22:42 AM	Tube furnace set to 0
9/22/2011	9:42:42 AM	Helium valve closed
9/22/2011	9:42:42 AM	H2 valve closed
9/22/2011	9:42:42 AM	BCl3 valve closed
9/22/2011	9:42:42 AM	PH3 valve closed
9/22/2011	9:42:42 AM	SiCl4 pre valve closed
9/22/2011	9:42:42 AM	SiCl4 post valve closed
9/22/2011	9:42:42 AM	Main Vac valve closed
9/22/2011	9:42:42 AM	Bypass valve closed
9/22/2011	9:42:42 AM	Bubbler valve closed
9/22/2011	9:42:42 AM	Helium MFC set to  0.000000
9/22/2011	9:42:42 AM	H2 MFC set to  0.000000
9/22/2011	9:42:42 AM	BCl3 MFC set to  0.000000
9/22/2011	9:42:42 AM	PHl3 MFC set to  0.000000
9/22/2011	9:42:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:42:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:42:42 AM	Tube furnace set to 0
9/22/2011	9:42:43 AM	Run finished at 9:42 AM
9/22/2011	9:43:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	9:43:05 AM	Recipe started at 9:43 AM
9/22/2011	9:43:05 AM	Helium valve closed
9/22/2011	9:43:05 AM	H2 valve closed
9/22/2011	9:43:05 AM	BCl3 valve closed
9/22/2011	9:43:05 AM	PH3 valve closed
9/22/2011	9:43:05 AM	SiCl4 pre valve closed
9/22/2011	9:43:05 AM	SiCl4 post valve closed
9/22/2011	9:43:05 AM	Main Vac valve closed
9/22/2011	9:43:05 AM	Bypass valve closed
9/22/2011	9:43:05 AM	Bubbler valve closed
9/22/2011	9:43:05 AM	Helium MFC set to  0.000000
9/22/2011	9:43:05 AM	H2 MFC set to  0.000000
9/22/2011	9:43:05 AM	BCl3 MFC set to  0.000000
9/22/2011	9:43:05 AM	PHl3 MFC set to  0.000000
9/22/2011	9:43:05 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:43:05 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:43:05 AM	Tube furnace set to 0
9/22/2011	9:43:08 AM	H2 valve closed
9/22/2011	9:43:08 AM	BCl3 valve closed
9/22/2011	9:43:08 AM	PH3 valve closed
9/22/2011	9:43:08 AM	SiCl4 pre valve closed
9/22/2011	9:43:08 AM	SiCl4 post valve closed
9/22/2011	9:43:08 AM	Main Vac valve closed
9/22/2011	9:43:08 AM	Bypass valve closed
9/22/2011	9:43:08 AM	Bubbler valve closed
9/22/2011	9:43:08 AM	Helium valve opened
9/22/2011	9:43:08 AM	Helium MFC set to  500.000000
9/22/2011	9:43:08 AM	H2 MFC set to  0.000000
9/22/2011	9:43:08 AM	BCl3 MFC set to  0.000000
9/22/2011	9:43:08 AM	PHl3 MFC set to  0.000000
9/22/2011	9:43:08 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:43:08 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:43:09 AM	Tube furnace set to 0
9/22/2011	9:43:09 AM	Helium valve closed
9/22/2011	9:43:09 AM	H2 valve closed
9/22/2011	9:43:09 AM	BCl3 valve closed
9/22/2011	9:43:09 AM	PH3 valve closed
9/22/2011	9:43:09 AM	SiCl4 pre valve closed
9/22/2011	9:43:09 AM	SiCl4 post valve closed
9/22/2011	9:43:09 AM	Main Vac valve closed
9/22/2011	9:43:09 AM	Bypass valve closed
9/22/2011	9:43:09 AM	Bubbler valve closed
9/22/2011	9:43:09 AM	Helium MFC set to  0.000000
9/22/2011	9:43:09 AM	H2 MFC set to  0.000000
9/22/2011	9:43:09 AM	BCl3 MFC set to  0.000000
9/22/2011	9:43:09 AM	PHl3 MFC set to  0.000000
9/22/2011	9:43:09 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:43:09 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:43:09 AM	Tube furnace set to 0
9/22/2011	9:43:10 AM	Run finished at 9:43 AM
9/22/2011	9:43:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	9:51:16 AM	Recipe started at 9:51 AM
9/22/2011	9:51:16 AM	Helium valve closed
9/22/2011	9:51:16 AM	H2 valve closed
9/22/2011	9:51:16 AM	BCl3 valve closed
9/22/2011	9:51:16 AM	PH3 valve closed
9/22/2011	9:51:16 AM	SiCl4 pre valve closed
9/22/2011	9:51:16 AM	SiCl4 post valve closed
9/22/2011	9:51:16 AM	Bypass valve closed
9/22/2011	9:51:16 AM	Bubbler valve closed
9/22/2011	9:51:16 AM	Main Vac valve opened
9/22/2011	9:51:16 AM	Helium MFC set to  0.000000
9/22/2011	9:51:16 AM	H2 MFC set to  0.000000
9/22/2011	9:51:16 AM	BCl3 MFC set to  0.000000
9/22/2011	9:51:16 AM	PHl3 MFC set to  0.000000
9/22/2011	9:51:16 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:51:16 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:51:16 AM	Tube furnace set to 150
9/22/2011	9:51:16 AM	Run aborted at 9:51 AM
9/22/2011	9:51:16 AM	Helium valve closed
9/22/2011	9:51:16 AM	H2 valve closed
9/22/2011	9:51:16 AM	BCl3 valve closed
9/22/2011	9:51:16 AM	PH3 valve closed
9/22/2011	9:51:16 AM	SiCl4 pre valve closed
9/22/2011	9:51:16 AM	SiCl4 post valve closed
9/22/2011	9:51:16 AM	Bypass valve closed
9/22/2011	9:51:16 AM	Main Vac valve closed
9/22/2011	9:51:16 AM	Bubbler valve closed
9/22/2011	9:51:16 AM	Helium MFC set to  0.000000
9/22/2011	9:51:16 AM	H2 MFC set to  0.000000
9/22/2011	9:51:16 AM	BCl3 MFC set to  0.000000
9/22/2011	9:51:16 AM	PHl3 MFC set to  0.000000
9/22/2011	9:51:16 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:51:17 AM	Tube furnace set to 0
9/22/2011	9:51:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	9:51:22 AM	Recipe started at 9:51 AM
9/22/2011	9:51:22 AM	Helium valve closed
9/22/2011	9:51:22 AM	H2 valve closed
9/22/2011	9:51:22 AM	BCl3 valve closed
9/22/2011	9:51:22 AM	PH3 valve closed
9/22/2011	9:51:22 AM	SiCl4 pre valve closed
9/22/2011	9:51:22 AM	SiCl4 post valve closed
9/22/2011	9:51:22 AM	Main Vac valve closed
9/22/2011	9:51:22 AM	Bubbler valve closed
9/22/2011	9:51:22 AM	Bypass valve opened
9/22/2011	9:51:22 AM	Helium MFC set to  0.000000
9/22/2011	9:51:22 AM	H2 MFC set to  0.000000
9/22/2011	9:51:22 AM	BCl3 MFC set to  0.000000
9/22/2011	9:51:22 AM	PHl3 MFC set to  0.000000
9/22/2011	9:51:22 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:51:22 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:51:22 AM	Tube furnace set to 0
9/22/2011	9:52:02 AM	Run aborted at 9:52 AM
9/22/2011	9:52:02 AM	Helium valve closed
9/22/2011	9:52:02 AM	H2 valve closed
9/22/2011	9:52:02 AM	BCl3 valve closed
9/22/2011	9:52:02 AM	PH3 valve closed
9/22/2011	9:52:02 AM	SiCl4 pre valve closed
9/22/2011	9:52:02 AM	SiCl4 post valve closed
9/22/2011	9:52:02 AM	Bypass valve closed
9/22/2011	9:52:02 AM	Main Vac valve closed
9/22/2011	9:52:02 AM	Bubbler valve closed
9/22/2011	9:52:02 AM	Helium MFC set to  0.000000
9/22/2011	9:52:02 AM	H2 MFC set to  0.000000
9/22/2011	9:52:02 AM	BCl3 MFC set to  0.000000
9/22/2011	9:52:02 AM	PHl3 MFC set to  0.000000
9/22/2011	9:52:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:52:02 AM	Tube furnace set to 0
9/22/2011	9:52:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	9:52:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	9:52:06 AM	Recipe started at 9:52 AM
9/22/2011	9:52:06 AM	Helium valve closed
9/22/2011	9:52:06 AM	H2 valve closed
9/22/2011	9:52:06 AM	BCl3 valve closed
9/22/2011	9:52:06 AM	PH3 valve closed
9/22/2011	9:52:06 AM	SiCl4 pre valve closed
9/22/2011	9:52:06 AM	SiCl4 post valve closed
9/22/2011	9:52:06 AM	Main Vac valve closed
9/22/2011	9:52:06 AM	Bypass valve closed
9/22/2011	9:52:06 AM	Bubbler valve closed
9/22/2011	9:52:06 AM	Helium MFC set to  0.000000
9/22/2011	9:52:06 AM	H2 MFC set to  0.000000
9/22/2011	9:52:06 AM	BCl3 MFC set to  0.000000
9/22/2011	9:52:06 AM	PHl3 MFC set to  0.000000
9/22/2011	9:52:06 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:52:06 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:52:06 AM	Tube furnace set to 0
9/22/2011	9:52:09 AM	H2 valve closed
9/22/2011	9:52:09 AM	BCl3 valve closed
9/22/2011	9:52:09 AM	PH3 valve closed
9/22/2011	9:52:09 AM	SiCl4 pre valve closed
9/22/2011	9:52:09 AM	SiCl4 post valve closed
9/22/2011	9:52:09 AM	Main Vac valve closed
9/22/2011	9:52:09 AM	Bypass valve closed
9/22/2011	9:52:09 AM	Bubbler valve closed
9/22/2011	9:52:09 AM	Helium valve opened
9/22/2011	9:52:09 AM	Helium MFC set to  500.000000
9/22/2011	9:52:09 AM	H2 MFC set to  0.000000
9/22/2011	9:52:09 AM	BCl3 MFC set to  0.000000
9/22/2011	9:52:09 AM	PHl3 MFC set to  0.000000
9/22/2011	9:52:09 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:52:09 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:52:09 AM	Tube furnace set to 0
9/22/2011	9:53:12 AM	Helium valve closed
9/22/2011	9:53:12 AM	H2 valve closed
9/22/2011	9:53:12 AM	BCl3 valve closed
9/22/2011	9:53:12 AM	PH3 valve closed
9/22/2011	9:53:12 AM	SiCl4 pre valve closed
9/22/2011	9:53:12 AM	SiCl4 post valve closed
9/22/2011	9:53:12 AM	Main Vac valve closed
9/22/2011	9:53:12 AM	Bypass valve closed
9/22/2011	9:53:12 AM	Bubbler valve closed
9/22/2011	9:53:12 AM	Helium MFC set to  0.000000
9/22/2011	9:53:12 AM	H2 MFC set to  0.000000
9/22/2011	9:53:12 AM	BCl3 MFC set to  0.000000
9/22/2011	9:53:12 AM	PHl3 MFC set to  0.000000
9/22/2011	9:53:12 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:53:12 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:53:12 AM	Tube furnace set to 0
9/22/2011	9:53:13 AM	Run finished at 9:53 AM
9/22/2011	9:53:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	9:56:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	9:56:14 AM	Recipe started at 9:56 AM
9/22/2011	9:56:14 AM	Helium valve closed
9/22/2011	9:56:14 AM	H2 valve closed
9/22/2011	9:56:14 AM	BCl3 valve closed
9/22/2011	9:56:14 AM	PH3 valve closed
9/22/2011	9:56:14 AM	SiCl4 pre valve closed
9/22/2011	9:56:14 AM	SiCl4 post valve closed
9/22/2011	9:56:14 AM	Main Vac valve closed
9/22/2011	9:56:14 AM	Bubbler valve closed
9/22/2011	9:56:14 AM	Bypass valve opened
9/22/2011	9:56:14 AM	Helium MFC set to  0.000000
9/22/2011	9:56:14 AM	H2 MFC set to  0.000000
9/22/2011	9:56:14 AM	BCl3 MFC set to  0.000000
9/22/2011	9:56:14 AM	PHl3 MFC set to  0.000000
9/22/2011	9:56:14 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:56:14 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:56:14 AM	Tube furnace set to 0
9/22/2011	9:57:23 AM	Helium valve closed
9/22/2011	9:57:23 AM	H2 valve closed
9/22/2011	9:57:23 AM	BCl3 valve closed
9/22/2011	9:57:23 AM	PH3 valve closed
9/22/2011	9:57:23 AM	SiCl4 pre valve closed
9/22/2011	9:57:23 AM	SiCl4 post valve closed
9/22/2011	9:57:23 AM	Main Vac valve closed
9/22/2011	9:57:23 AM	Bubbler valve closed
9/22/2011	9:57:23 AM	Bypass valve opened
9/22/2011	9:57:23 AM	Helium MFC set to  0.000000
9/22/2011	9:57:23 AM	H2 MFC set to  0.000000
9/22/2011	9:57:23 AM	BCl3 MFC set to  0.000000
9/22/2011	9:57:23 AM	PHl3 MFC set to  0.000000
9/22/2011	9:57:23 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:57:23 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:57:23 AM	Tube furnace set to 0
9/22/2011	9:58:23 AM	Helium valve closed
9/22/2011	9:58:23 AM	H2 valve closed
9/22/2011	9:58:23 AM	BCl3 valve closed
9/22/2011	9:58:23 AM	PH3 valve closed
9/22/2011	9:58:23 AM	SiCl4 pre valve closed
9/22/2011	9:58:23 AM	SiCl4 post valve closed
9/22/2011	9:58:23 AM	Bypass valve closed
9/22/2011	9:58:23 AM	Bubbler valve closed
9/22/2011	9:58:23 AM	Main Vac valve opened
9/22/2011	9:58:23 AM	Helium MFC set to  0.000000
9/22/2011	9:58:23 AM	H2 MFC set to  0.000000
9/22/2011	9:58:23 AM	BCl3 MFC set to  0.000000
9/22/2011	9:58:23 AM	PHl3 MFC set to  0.000000
9/22/2011	9:58:23 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:58:23 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:58:23 AM	Tube furnace set to 0
9/22/2011	9:58:24 AM	Run finished at 9:58 AM
9/22/2011	9:58:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	9:58:57 AM	Recipe started at 9:58 AM
9/22/2011	9:58:57 AM	Helium valve closed
9/22/2011	9:58:57 AM	H2 valve closed
9/22/2011	9:58:57 AM	BCl3 valve closed
9/22/2011	9:58:57 AM	PH3 valve closed
9/22/2011	9:58:57 AM	SiCl4 pre valve closed
9/22/2011	9:58:57 AM	SiCl4 post valve closed
9/22/2011	9:58:57 AM	Bypass valve closed
9/22/2011	9:58:57 AM	Bubbler valve closed
9/22/2011	9:58:57 AM	Main Vac valve opened
9/22/2011	9:58:57 AM	Helium MFC set to  0.000000
9/22/2011	9:58:57 AM	H2 MFC set to  0.000000
9/22/2011	9:58:57 AM	BCl3 MFC set to  0.000000
9/22/2011	9:58:57 AM	PHl3 MFC set to  0.000000
9/22/2011	9:58:57 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:58:57 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:58:57 AM	Tube furnace set to 150
9/22/2011	9:59:27 AM	H2 valve closed
9/22/2011	9:59:27 AM	BCl3 valve closed
9/22/2011	9:59:27 AM	PH3 valve closed
9/22/2011	9:59:27 AM	SiCl4 pre valve closed
9/22/2011	9:59:27 AM	SiCl4 post valve closed
9/22/2011	9:59:27 AM	Bypass valve closed
9/22/2011	9:59:27 AM	Bubbler valve closed
9/22/2011	9:59:27 AM	Helium valve opened
9/22/2011	9:59:27 AM	Main Vac valve opened
9/22/2011	9:59:27 AM	Helium MFC set to  20.000000
9/22/2011	9:59:27 AM	H2 MFC set to  0.000000
9/22/2011	9:59:27 AM	BCl3 MFC set to  0.000000
9/22/2011	9:59:27 AM	PHl3 MFC set to  0.000000
9/22/2011	9:59:27 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:59:27 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:59:27 AM	Tube furnace set to 150
9/22/2011	9:59:57 AM	Helium valve closed
9/22/2011	9:59:57 AM	H2 valve closed
9/22/2011	9:59:57 AM	BCl3 valve closed
9/22/2011	9:59:57 AM	PH3 valve closed
9/22/2011	9:59:57 AM	SiCl4 pre valve closed
9/22/2011	9:59:57 AM	SiCl4 post valve closed
9/22/2011	9:59:57 AM	Bypass valve closed
9/22/2011	9:59:57 AM	Bubbler valve closed
9/22/2011	9:59:57 AM	Main Vac valve opened
9/22/2011	9:59:57 AM	Helium MFC set to  0.000000
9/22/2011	9:59:57 AM	H2 MFC set to  0.000000
9/22/2011	9:59:57 AM	BCl3 MFC set to  0.000000
9/22/2011	9:59:57 AM	PHl3 MFC set to  0.000000
9/22/2011	9:59:57 AM	SiCl4 MFC set to  0.000000
9/22/2011	9:59:57 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	9:59:58 AM	Tube furnace set to 150
9/22/2011	10:00:28 AM	H2 valve closed
9/22/2011	10:00:28 AM	BCl3 valve closed
9/22/2011	10:00:28 AM	PH3 valve closed
9/22/2011	10:00:28 AM	SiCl4 pre valve closed
9/22/2011	10:00:28 AM	SiCl4 post valve closed
9/22/2011	10:00:28 AM	Bypass valve closed
9/22/2011	10:00:28 AM	Bubbler valve closed
9/22/2011	10:00:28 AM	Helium valve opened
9/22/2011	10:00:28 AM	Main Vac valve opened
9/22/2011	10:00:28 AM	Helium MFC set to  20.000000
9/22/2011	10:00:28 AM	H2 MFC set to  0.000000
9/22/2011	10:00:28 AM	BCl3 MFC set to  0.000000
9/22/2011	10:00:28 AM	PHl3 MFC set to  0.000000
9/22/2011	10:00:28 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:00:28 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:00:28 AM	Tube furnace set to 150
9/22/2011	10:00:58 AM	Helium valve closed
9/22/2011	10:00:58 AM	H2 valve closed
9/22/2011	10:00:58 AM	BCl3 valve closed
9/22/2011	10:00:58 AM	PH3 valve closed
9/22/2011	10:00:58 AM	SiCl4 pre valve closed
9/22/2011	10:00:58 AM	SiCl4 post valve closed
9/22/2011	10:00:58 AM	Bypass valve closed
9/22/2011	10:00:58 AM	Bubbler valve closed
9/22/2011	10:00:58 AM	Main Vac valve opened
9/22/2011	10:00:58 AM	Helium MFC set to  0.000000
9/22/2011	10:00:58 AM	H2 MFC set to  0.000000
9/22/2011	10:00:58 AM	BCl3 MFC set to  0.000000
9/22/2011	10:00:58 AM	PHl3 MFC set to  0.000000
9/22/2011	10:00:58 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:00:58 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:00:58 AM	Tube furnace set to 150
9/22/2011	10:01:28 AM	H2 valve closed
9/22/2011	10:01:28 AM	BCl3 valve closed
9/22/2011	10:01:28 AM	PH3 valve closed
9/22/2011	10:01:28 AM	SiCl4 pre valve closed
9/22/2011	10:01:28 AM	SiCl4 post valve closed
9/22/2011	10:01:28 AM	Bypass valve closed
9/22/2011	10:01:28 AM	Bubbler valve closed
9/22/2011	10:01:28 AM	Helium valve opened
9/22/2011	10:01:28 AM	Main Vac valve opened
9/22/2011	10:01:28 AM	Helium MFC set to  20.000000
9/22/2011	10:01:28 AM	H2 MFC set to  0.000000
9/22/2011	10:01:28 AM	BCl3 MFC set to  0.000000
9/22/2011	10:01:28 AM	PHl3 MFC set to  0.000000
9/22/2011	10:01:28 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:01:28 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:01:28 AM	Tube furnace set to 150
9/22/2011	10:01:58 AM	Helium valve closed
9/22/2011	10:01:58 AM	H2 valve closed
9/22/2011	10:01:58 AM	BCl3 valve closed
9/22/2011	10:01:58 AM	PH3 valve closed
9/22/2011	10:01:58 AM	SiCl4 pre valve closed
9/22/2011	10:01:58 AM	SiCl4 post valve closed
9/22/2011	10:01:58 AM	Bypass valve closed
9/22/2011	10:01:58 AM	Bubbler valve closed
9/22/2011	10:01:58 AM	Main Vac valve opened
9/22/2011	10:01:58 AM	Helium MFC set to  0.000000
9/22/2011	10:01:58 AM	H2 MFC set to  0.000000
9/22/2011	10:01:58 AM	BCl3 MFC set to  0.000000
9/22/2011	10:01:58 AM	PHl3 MFC set to  0.000000
9/22/2011	10:01:58 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:01:58 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:01:58 AM	Tube furnace set to 150
9/22/2011	10:02:28 AM	H2 valve closed
9/22/2011	10:02:28 AM	BCl3 valve closed
9/22/2011	10:02:28 AM	PH3 valve closed
9/22/2011	10:02:28 AM	SiCl4 pre valve closed
9/22/2011	10:02:28 AM	SiCl4 post valve closed
9/22/2011	10:02:28 AM	Bypass valve closed
9/22/2011	10:02:28 AM	Bubbler valve closed
9/22/2011	10:02:28 AM	Helium valve opened
9/22/2011	10:02:28 AM	Main Vac valve opened
9/22/2011	10:02:28 AM	Helium MFC set to  20.000000
9/22/2011	10:02:28 AM	H2 MFC set to  0.000000
9/22/2011	10:02:28 AM	BCl3 MFC set to  0.000000
9/22/2011	10:02:28 AM	PHl3 MFC set to  0.000000
9/22/2011	10:02:28 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:02:28 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:02:29 AM	Tube furnace set to 150
9/22/2011	10:02:59 AM	Helium valve closed
9/22/2011	10:02:59 AM	H2 valve closed
9/22/2011	10:02:59 AM	BCl3 valve closed
9/22/2011	10:02:59 AM	PH3 valve closed
9/22/2011	10:02:59 AM	SiCl4 pre valve closed
9/22/2011	10:02:59 AM	SiCl4 post valve closed
9/22/2011	10:02:59 AM	Bypass valve closed
9/22/2011	10:02:59 AM	Bubbler valve closed
9/22/2011	10:02:59 AM	Main Vac valve opened
9/22/2011	10:02:59 AM	Helium MFC set to  0.000000
9/22/2011	10:02:59 AM	H2 MFC set to  0.000000
9/22/2011	10:02:59 AM	BCl3 MFC set to  0.000000
9/22/2011	10:02:59 AM	PHl3 MFC set to  0.000000
9/22/2011	10:02:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:02:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:02:59 AM	Tube furnace set to 150
9/22/2011	10:03:29 AM	H2 valve closed
9/22/2011	10:03:29 AM	BCl3 valve closed
9/22/2011	10:03:29 AM	PH3 valve closed
9/22/2011	10:03:29 AM	SiCl4 pre valve closed
9/22/2011	10:03:29 AM	SiCl4 post valve closed
9/22/2011	10:03:29 AM	Bypass valve closed
9/22/2011	10:03:29 AM	Bubbler valve closed
9/22/2011	10:03:29 AM	Helium valve opened
9/22/2011	10:03:29 AM	Main Vac valve opened
9/22/2011	10:03:29 AM	Helium MFC set to  20.000000
9/22/2011	10:03:29 AM	H2 MFC set to  0.000000
9/22/2011	10:03:29 AM	BCl3 MFC set to  0.000000
9/22/2011	10:03:29 AM	PHl3 MFC set to  0.000000
9/22/2011	10:03:29 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:03:29 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:03:29 AM	Tube furnace set to 150
9/22/2011	10:03:59 AM	Helium valve closed
9/22/2011	10:03:59 AM	H2 valve closed
9/22/2011	10:03:59 AM	BCl3 valve closed
9/22/2011	10:03:59 AM	PH3 valve closed
9/22/2011	10:03:59 AM	SiCl4 pre valve closed
9/22/2011	10:03:59 AM	SiCl4 post valve closed
9/22/2011	10:03:59 AM	Bypass valve closed
9/22/2011	10:03:59 AM	Bubbler valve closed
9/22/2011	10:03:59 AM	Main Vac valve opened
9/22/2011	10:03:59 AM	Helium MFC set to  0.000000
9/22/2011	10:03:59 AM	H2 MFC set to  0.000000
9/22/2011	10:03:59 AM	BCl3 MFC set to  0.000000
9/22/2011	10:03:59 AM	PHl3 MFC set to  0.000000
9/22/2011	10:03:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:03:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:03:59 AM	Tube furnace set to 150
9/22/2011	10:04:29 AM	H2 valve closed
9/22/2011	10:04:29 AM	BCl3 valve closed
9/22/2011	10:04:29 AM	PH3 valve closed
9/22/2011	10:04:29 AM	SiCl4 pre valve closed
9/22/2011	10:04:29 AM	SiCl4 post valve closed
9/22/2011	10:04:29 AM	Bypass valve closed
9/22/2011	10:04:29 AM	Bubbler valve closed
9/22/2011	10:04:29 AM	Helium valve opened
9/22/2011	10:04:29 AM	Main Vac valve opened
9/22/2011	10:04:29 AM	Helium MFC set to  20.000000
9/22/2011	10:04:29 AM	H2 MFC set to  0.000000
9/22/2011	10:04:29 AM	BCl3 MFC set to  0.000000
9/22/2011	10:04:29 AM	PHl3 MFC set to  0.000000
9/22/2011	10:04:29 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:04:29 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:04:29 AM	Tube furnace set to 150
9/22/2011	10:04:59 AM	Helium valve closed
9/22/2011	10:04:59 AM	H2 valve closed
9/22/2011	10:04:59 AM	BCl3 valve closed
9/22/2011	10:04:59 AM	PH3 valve closed
9/22/2011	10:04:59 AM	SiCl4 pre valve closed
9/22/2011	10:04:59 AM	SiCl4 post valve closed
9/22/2011	10:04:59 AM	Bypass valve closed
9/22/2011	10:04:59 AM	Bubbler valve closed
9/22/2011	10:04:59 AM	Main Vac valve opened
9/22/2011	10:04:59 AM	Helium MFC set to  0.000000
9/22/2011	10:04:59 AM	H2 MFC set to  0.000000
9/22/2011	10:04:59 AM	BCl3 MFC set to  0.000000
9/22/2011	10:04:59 AM	PHl3 MFC set to  0.000000
9/22/2011	10:04:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:04:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:05:00 AM	Tube furnace set to 150
9/22/2011	10:05:30 AM	H2 valve closed
9/22/2011	10:05:30 AM	BCl3 valve closed
9/22/2011	10:05:30 AM	PH3 valve closed
9/22/2011	10:05:30 AM	SiCl4 pre valve closed
9/22/2011	10:05:30 AM	SiCl4 post valve closed
9/22/2011	10:05:30 AM	Bypass valve closed
9/22/2011	10:05:30 AM	Bubbler valve closed
9/22/2011	10:05:30 AM	Helium valve opened
9/22/2011	10:05:30 AM	Main Vac valve opened
9/22/2011	10:05:30 AM	Helium MFC set to  20.000000
9/22/2011	10:05:30 AM	H2 MFC set to  0.000000
9/22/2011	10:05:30 AM	BCl3 MFC set to  0.000000
9/22/2011	10:05:30 AM	PHl3 MFC set to  0.000000
9/22/2011	10:05:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:05:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:05:30 AM	Tube furnace set to 150
9/22/2011	10:06:00 AM	Helium valve closed
9/22/2011	10:06:00 AM	H2 valve closed
9/22/2011	10:06:00 AM	BCl3 valve closed
9/22/2011	10:06:00 AM	PH3 valve closed
9/22/2011	10:06:00 AM	SiCl4 pre valve closed
9/22/2011	10:06:00 AM	SiCl4 post valve closed
9/22/2011	10:06:00 AM	Bypass valve closed
9/22/2011	10:06:00 AM	Bubbler valve closed
9/22/2011	10:06:00 AM	Main Vac valve opened
9/22/2011	10:06:00 AM	Helium MFC set to  0.000000
9/22/2011	10:06:00 AM	H2 MFC set to  0.000000
9/22/2011	10:06:00 AM	BCl3 MFC set to  0.000000
9/22/2011	10:06:00 AM	PHl3 MFC set to  0.000000
9/22/2011	10:06:00 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:06:00 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:06:00 AM	Tube furnace set to 150
9/22/2011	10:06:30 AM	H2 valve closed
9/22/2011	10:06:30 AM	BCl3 valve closed
9/22/2011	10:06:30 AM	PH3 valve closed
9/22/2011	10:06:30 AM	SiCl4 pre valve closed
9/22/2011	10:06:30 AM	SiCl4 post valve closed
9/22/2011	10:06:30 AM	Bypass valve closed
9/22/2011	10:06:30 AM	Bubbler valve closed
9/22/2011	10:06:30 AM	Helium valve opened
9/22/2011	10:06:30 AM	Main Vac valve opened
9/22/2011	10:06:30 AM	Helium MFC set to  20.000000
9/22/2011	10:06:30 AM	H2 MFC set to  0.000000
9/22/2011	10:06:30 AM	BCl3 MFC set to  0.000000
9/22/2011	10:06:30 AM	PHl3 MFC set to  0.000000
9/22/2011	10:06:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:06:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:06:30 AM	Tube furnace set to 150
9/22/2011	10:07:00 AM	Helium valve closed
9/22/2011	10:07:00 AM	H2 valve closed
9/22/2011	10:07:00 AM	BCl3 valve closed
9/22/2011	10:07:00 AM	PH3 valve closed
9/22/2011	10:07:00 AM	SiCl4 pre valve closed
9/22/2011	10:07:00 AM	SiCl4 post valve closed
9/22/2011	10:07:00 AM	Bypass valve closed
9/22/2011	10:07:00 AM	Bubbler valve closed
9/22/2011	10:07:00 AM	Main Vac valve opened
9/22/2011	10:07:00 AM	Helium MFC set to  0.000000
9/22/2011	10:07:00 AM	H2 MFC set to  0.000000
9/22/2011	10:07:00 AM	BCl3 MFC set to  0.000000
9/22/2011	10:07:00 AM	PHl3 MFC set to  0.000000
9/22/2011	10:07:00 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:07:00 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:07:00 AM	Tube furnace set to 150
9/22/2011	10:07:30 AM	H2 valve closed
9/22/2011	10:07:30 AM	BCl3 valve closed
9/22/2011	10:07:30 AM	PH3 valve closed
9/22/2011	10:07:30 AM	SiCl4 pre valve closed
9/22/2011	10:07:30 AM	SiCl4 post valve closed
9/22/2011	10:07:30 AM	Bypass valve closed
9/22/2011	10:07:30 AM	Bubbler valve closed
9/22/2011	10:07:30 AM	Helium valve opened
9/22/2011	10:07:30 AM	Main Vac valve opened
9/22/2011	10:07:30 AM	Helium MFC set to  20.000000
9/22/2011	10:07:30 AM	H2 MFC set to  0.000000
9/22/2011	10:07:30 AM	BCl3 MFC set to  0.000000
9/22/2011	10:07:30 AM	PHl3 MFC set to  0.000000
9/22/2011	10:07:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:07:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:07:31 AM	Tube furnace set to 150
9/22/2011	10:08:01 AM	Helium valve closed
9/22/2011	10:08:01 AM	H2 valve closed
9/22/2011	10:08:01 AM	BCl3 valve closed
9/22/2011	10:08:01 AM	PH3 valve closed
9/22/2011	10:08:01 AM	SiCl4 pre valve closed
9/22/2011	10:08:01 AM	SiCl4 post valve closed
9/22/2011	10:08:01 AM	Bypass valve closed
9/22/2011	10:08:01 AM	Bubbler valve closed
9/22/2011	10:08:01 AM	Main Vac valve opened
9/22/2011	10:08:01 AM	Helium MFC set to  0.000000
9/22/2011	10:08:01 AM	H2 MFC set to  0.000000
9/22/2011	10:08:01 AM	BCl3 MFC set to  0.000000
9/22/2011	10:08:01 AM	PHl3 MFC set to  0.000000
9/22/2011	10:08:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:08:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:08:01 AM	Tube furnace set to 150
9/22/2011	10:08:31 AM	H2 valve closed
9/22/2011	10:08:31 AM	BCl3 valve closed
9/22/2011	10:08:31 AM	PH3 valve closed
9/22/2011	10:08:31 AM	SiCl4 pre valve closed
9/22/2011	10:08:31 AM	SiCl4 post valve closed
9/22/2011	10:08:31 AM	Bypass valve closed
9/22/2011	10:08:31 AM	Bubbler valve closed
9/22/2011	10:08:31 AM	Helium valve opened
9/22/2011	10:08:31 AM	Main Vac valve opened
9/22/2011	10:08:31 AM	Helium MFC set to  20.000000
9/22/2011	10:08:31 AM	H2 MFC set to  0.000000
9/22/2011	10:08:31 AM	BCl3 MFC set to  0.000000
9/22/2011	10:08:31 AM	PHl3 MFC set to  0.000000
9/22/2011	10:08:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:08:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:08:31 AM	Tube furnace set to 150
9/22/2011	10:09:01 AM	Helium valve closed
9/22/2011	10:09:01 AM	H2 valve closed
9/22/2011	10:09:01 AM	BCl3 valve closed
9/22/2011	10:09:01 AM	PH3 valve closed
9/22/2011	10:09:01 AM	SiCl4 pre valve closed
9/22/2011	10:09:01 AM	SiCl4 post valve closed
9/22/2011	10:09:01 AM	Bypass valve closed
9/22/2011	10:09:01 AM	Bubbler valve closed
9/22/2011	10:09:01 AM	Main Vac valve opened
9/22/2011	10:09:01 AM	Helium MFC set to  0.000000
9/22/2011	10:09:01 AM	H2 MFC set to  0.000000
9/22/2011	10:09:01 AM	BCl3 MFC set to  0.000000
9/22/2011	10:09:01 AM	PHl3 MFC set to  0.000000
9/22/2011	10:09:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:09:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:09:01 AM	Tube furnace set to 150
9/22/2011	10:09:02 AM	Run finished at 10:09 AM
9/22/2011	10:10:09 AM	Recipe started at 10:10 AM
9/22/2011	10:10:09 AM	Helium valve closed
9/22/2011	10:10:09 AM	H2 valve closed
9/22/2011	10:10:09 AM	BCl3 valve closed
9/22/2011	10:10:09 AM	PH3 valve closed
9/22/2011	10:10:09 AM	SiCl4 pre valve closed
9/22/2011	10:10:09 AM	SiCl4 post valve closed
9/22/2011	10:10:09 AM	Bypass valve closed
9/22/2011	10:10:09 AM	Bubbler valve closed
9/22/2011	10:10:09 AM	Main Vac valve opened
9/22/2011	10:10:09 AM	Helium MFC set to  0.000000
9/22/2011	10:10:09 AM	H2 MFC set to  0.000000
9/22/2011	10:10:09 AM	BCl3 MFC set to  0.000000
9/22/2011	10:10:09 AM	PHl3 MFC set to  0.000000
9/22/2011	10:10:09 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:10:09 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:10:10 AM	Tube furnace set to 150
9/22/2011	10:10:40 AM	H2 valve closed
9/22/2011	10:10:40 AM	BCl3 valve closed
9/22/2011	10:10:40 AM	PH3 valve closed
9/22/2011	10:10:40 AM	SiCl4 pre valve closed
9/22/2011	10:10:40 AM	SiCl4 post valve closed
9/22/2011	10:10:40 AM	Bypass valve closed
9/22/2011	10:10:40 AM	Bubbler valve closed
9/22/2011	10:10:40 AM	Helium valve opened
9/22/2011	10:10:40 AM	Main Vac valve opened
9/22/2011	10:10:40 AM	Helium MFC set to  20.000000
9/22/2011	10:10:40 AM	H2 MFC set to  0.000000
9/22/2011	10:10:40 AM	BCl3 MFC set to  0.000000
9/22/2011	10:10:40 AM	PHl3 MFC set to  0.000000
9/22/2011	10:10:40 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:10:40 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:10:40 AM	Tube furnace set to 150
9/22/2011	10:11:10 AM	Helium valve closed
9/22/2011	10:11:10 AM	H2 valve closed
9/22/2011	10:11:10 AM	BCl3 valve closed
9/22/2011	10:11:10 AM	PH3 valve closed
9/22/2011	10:11:10 AM	SiCl4 pre valve closed
9/22/2011	10:11:10 AM	SiCl4 post valve closed
9/22/2011	10:11:10 AM	Bypass valve closed
9/22/2011	10:11:10 AM	Bubbler valve closed
9/22/2011	10:11:10 AM	Main Vac valve opened
9/22/2011	10:11:10 AM	Helium MFC set to  0.000000
9/22/2011	10:11:10 AM	H2 MFC set to  0.000000
9/22/2011	10:11:10 AM	BCl3 MFC set to  0.000000
9/22/2011	10:11:10 AM	PHl3 MFC set to  0.000000
9/22/2011	10:11:10 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:11:10 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:11:10 AM	Tube furnace set to 150
9/22/2011	10:11:40 AM	H2 valve closed
9/22/2011	10:11:40 AM	BCl3 valve closed
9/22/2011	10:11:40 AM	PH3 valve closed
9/22/2011	10:11:40 AM	SiCl4 pre valve closed
9/22/2011	10:11:40 AM	SiCl4 post valve closed
9/22/2011	10:11:40 AM	Bypass valve closed
9/22/2011	10:11:40 AM	Bubbler valve closed
9/22/2011	10:11:40 AM	Helium valve opened
9/22/2011	10:11:40 AM	Main Vac valve opened
9/22/2011	10:11:40 AM	Helium MFC set to  20.000000
9/22/2011	10:11:40 AM	H2 MFC set to  0.000000
9/22/2011	10:11:40 AM	BCl3 MFC set to  0.000000
9/22/2011	10:11:40 AM	PHl3 MFC set to  0.000000
9/22/2011	10:11:40 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:11:40 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:11:40 AM	Tube furnace set to 150
9/22/2011	10:12:10 AM	Helium valve closed
9/22/2011	10:12:10 AM	H2 valve closed
9/22/2011	10:12:10 AM	BCl3 valve closed
9/22/2011	10:12:10 AM	PH3 valve closed
9/22/2011	10:12:10 AM	SiCl4 pre valve closed
9/22/2011	10:12:10 AM	SiCl4 post valve closed
9/22/2011	10:12:10 AM	Bypass valve closed
9/22/2011	10:12:10 AM	Bubbler valve closed
9/22/2011	10:12:10 AM	Main Vac valve opened
9/22/2011	10:12:10 AM	Helium MFC set to  0.000000
9/22/2011	10:12:10 AM	H2 MFC set to  0.000000
9/22/2011	10:12:10 AM	BCl3 MFC set to  0.000000
9/22/2011	10:12:10 AM	PHl3 MFC set to  0.000000
9/22/2011	10:12:10 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:12:10 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:12:10 AM	Tube furnace set to 150
9/22/2011	10:12:40 AM	H2 valve closed
9/22/2011	10:12:40 AM	BCl3 valve closed
9/22/2011	10:12:40 AM	PH3 valve closed
9/22/2011	10:12:40 AM	SiCl4 pre valve closed
9/22/2011	10:12:40 AM	SiCl4 post valve closed
9/22/2011	10:12:40 AM	Bypass valve closed
9/22/2011	10:12:40 AM	Bubbler valve closed
9/22/2011	10:12:40 AM	Helium valve opened
9/22/2011	10:12:40 AM	Main Vac valve opened
9/22/2011	10:12:40 AM	Helium MFC set to  20.000000
9/22/2011	10:12:40 AM	H2 MFC set to  0.000000
9/22/2011	10:12:40 AM	BCl3 MFC set to  0.000000
9/22/2011	10:12:40 AM	PHl3 MFC set to  0.000000
9/22/2011	10:12:40 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:12:40 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:12:41 AM	Tube furnace set to 150
9/22/2011	10:13:11 AM	Helium valve closed
9/22/2011	10:13:11 AM	H2 valve closed
9/22/2011	10:13:11 AM	BCl3 valve closed
9/22/2011	10:13:11 AM	PH3 valve closed
9/22/2011	10:13:11 AM	SiCl4 pre valve closed
9/22/2011	10:13:11 AM	SiCl4 post valve closed
9/22/2011	10:13:11 AM	Bypass valve closed
9/22/2011	10:13:11 AM	Bubbler valve closed
9/22/2011	10:13:11 AM	Main Vac valve opened
9/22/2011	10:13:11 AM	Helium MFC set to  0.000000
9/22/2011	10:13:11 AM	H2 MFC set to  0.000000
9/22/2011	10:13:11 AM	BCl3 MFC set to  0.000000
9/22/2011	10:13:11 AM	PHl3 MFC set to  0.000000
9/22/2011	10:13:11 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:13:11 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:13:11 AM	Tube furnace set to 150
9/22/2011	10:13:41 AM	H2 valve closed
9/22/2011	10:13:41 AM	BCl3 valve closed
9/22/2011	10:13:41 AM	PH3 valve closed
9/22/2011	10:13:41 AM	SiCl4 pre valve closed
9/22/2011	10:13:41 AM	SiCl4 post valve closed
9/22/2011	10:13:41 AM	Bypass valve closed
9/22/2011	10:13:41 AM	Bubbler valve closed
9/22/2011	10:13:41 AM	Helium valve opened
9/22/2011	10:13:41 AM	Main Vac valve opened
9/22/2011	10:13:41 AM	Helium MFC set to  20.000000
9/22/2011	10:13:41 AM	H2 MFC set to  0.000000
9/22/2011	10:13:41 AM	BCl3 MFC set to  0.000000
9/22/2011	10:13:41 AM	PHl3 MFC set to  0.000000
9/22/2011	10:13:41 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:13:41 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:13:41 AM	Tube furnace set to 150
9/22/2011	10:14:11 AM	Helium valve closed
9/22/2011	10:14:11 AM	H2 valve closed
9/22/2011	10:14:11 AM	BCl3 valve closed
9/22/2011	10:14:11 AM	PH3 valve closed
9/22/2011	10:14:11 AM	SiCl4 pre valve closed
9/22/2011	10:14:11 AM	SiCl4 post valve closed
9/22/2011	10:14:11 AM	Bypass valve closed
9/22/2011	10:14:11 AM	Bubbler valve closed
9/22/2011	10:14:11 AM	Main Vac valve opened
9/22/2011	10:14:11 AM	Helium MFC set to  0.000000
9/22/2011	10:14:11 AM	H2 MFC set to  0.000000
9/22/2011	10:14:11 AM	BCl3 MFC set to  0.000000
9/22/2011	10:14:11 AM	PHl3 MFC set to  0.000000
9/22/2011	10:14:11 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:14:11 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:14:11 AM	Tube furnace set to 150
9/22/2011	10:14:41 AM	H2 valve closed
9/22/2011	10:14:41 AM	BCl3 valve closed
9/22/2011	10:14:41 AM	PH3 valve closed
9/22/2011	10:14:41 AM	SiCl4 pre valve closed
9/22/2011	10:14:41 AM	SiCl4 post valve closed
9/22/2011	10:14:41 AM	Bypass valve closed
9/22/2011	10:14:41 AM	Bubbler valve closed
9/22/2011	10:14:41 AM	Helium valve opened
9/22/2011	10:14:41 AM	Main Vac valve opened
9/22/2011	10:14:41 AM	Helium MFC set to  20.000000
9/22/2011	10:14:41 AM	H2 MFC set to  0.000000
9/22/2011	10:14:41 AM	BCl3 MFC set to  0.000000
9/22/2011	10:14:41 AM	PHl3 MFC set to  0.000000
9/22/2011	10:14:41 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:14:41 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:14:41 AM	Tube furnace set to 150
9/22/2011	10:15:11 AM	Helium valve closed
9/22/2011	10:15:11 AM	H2 valve closed
9/22/2011	10:15:11 AM	BCl3 valve closed
9/22/2011	10:15:11 AM	PH3 valve closed
9/22/2011	10:15:11 AM	SiCl4 pre valve closed
9/22/2011	10:15:11 AM	SiCl4 post valve closed
9/22/2011	10:15:12 AM	Bypass valve closed
9/22/2011	10:15:12 AM	Bubbler valve closed
9/22/2011	10:15:12 AM	Main Vac valve opened
9/22/2011	10:15:12 AM	Helium MFC set to  0.000000
9/22/2011	10:15:12 AM	H2 MFC set to  0.000000
9/22/2011	10:15:12 AM	BCl3 MFC set to  0.000000
9/22/2011	10:15:12 AM	PHl3 MFC set to  0.000000
9/22/2011	10:15:12 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:15:12 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:15:12 AM	Tube furnace set to 150
9/22/2011	10:15:42 AM	H2 valve closed
9/22/2011	10:15:42 AM	BCl3 valve closed
9/22/2011	10:15:42 AM	PH3 valve closed
9/22/2011	10:15:42 AM	SiCl4 pre valve closed
9/22/2011	10:15:42 AM	SiCl4 post valve closed
9/22/2011	10:15:42 AM	Bypass valve closed
9/22/2011	10:15:42 AM	Bubbler valve closed
9/22/2011	10:15:42 AM	Helium valve opened
9/22/2011	10:15:42 AM	Main Vac valve opened
9/22/2011	10:15:42 AM	Helium MFC set to  20.000000
9/22/2011	10:15:42 AM	H2 MFC set to  0.000000
9/22/2011	10:15:42 AM	BCl3 MFC set to  0.000000
9/22/2011	10:15:42 AM	PHl3 MFC set to  0.000000
9/22/2011	10:15:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:15:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:15:42 AM	Tube furnace set to 150
9/22/2011	10:16:12 AM	Helium valve closed
9/22/2011	10:16:12 AM	H2 valve closed
9/22/2011	10:16:12 AM	BCl3 valve closed
9/22/2011	10:16:12 AM	PH3 valve closed
9/22/2011	10:16:12 AM	SiCl4 pre valve closed
9/22/2011	10:16:12 AM	SiCl4 post valve closed
9/22/2011	10:16:12 AM	Bypass valve closed
9/22/2011	10:16:12 AM	Bubbler valve closed
9/22/2011	10:16:12 AM	Main Vac valve opened
9/22/2011	10:16:12 AM	Helium MFC set to  0.000000
9/22/2011	10:16:12 AM	H2 MFC set to  0.000000
9/22/2011	10:16:12 AM	BCl3 MFC set to  0.000000
9/22/2011	10:16:12 AM	PHl3 MFC set to  0.000000
9/22/2011	10:16:12 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:16:12 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:16:12 AM	Tube furnace set to 150
9/22/2011	10:16:42 AM	H2 valve closed
9/22/2011	10:16:42 AM	BCl3 valve closed
9/22/2011	10:16:42 AM	PH3 valve closed
9/22/2011	10:16:42 AM	SiCl4 pre valve closed
9/22/2011	10:16:42 AM	SiCl4 post valve closed
9/22/2011	10:16:42 AM	Bypass valve closed
9/22/2011	10:16:42 AM	Bubbler valve closed
9/22/2011	10:16:42 AM	Helium valve opened
9/22/2011	10:16:42 AM	Main Vac valve opened
9/22/2011	10:16:42 AM	Helium MFC set to  20.000000
9/22/2011	10:16:42 AM	H2 MFC set to  0.000000
9/22/2011	10:16:42 AM	BCl3 MFC set to  0.000000
9/22/2011	10:16:42 AM	PHl3 MFC set to  0.000000
9/22/2011	10:16:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:16:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:16:42 AM	Tube furnace set to 150
9/22/2011	10:17:12 AM	Helium valve closed
9/22/2011	10:17:12 AM	H2 valve closed
9/22/2011	10:17:12 AM	BCl3 valve closed
9/22/2011	10:17:12 AM	PH3 valve closed
9/22/2011	10:17:12 AM	SiCl4 pre valve closed
9/22/2011	10:17:12 AM	SiCl4 post valve closed
9/22/2011	10:17:12 AM	Bypass valve closed
9/22/2011	10:17:12 AM	Bubbler valve closed
9/22/2011	10:17:12 AM	Main Vac valve opened
9/22/2011	10:17:12 AM	Helium MFC set to  0.000000
9/22/2011	10:17:12 AM	H2 MFC set to  0.000000
9/22/2011	10:17:12 AM	BCl3 MFC set to  0.000000
9/22/2011	10:17:12 AM	PHl3 MFC set to  0.000000
9/22/2011	10:17:12 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:17:12 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:17:12 AM	Tube furnace set to 150
9/22/2011	10:17:43 AM	H2 valve closed
9/22/2011	10:17:43 AM	BCl3 valve closed
9/22/2011	10:17:43 AM	PH3 valve closed
9/22/2011	10:17:43 AM	SiCl4 pre valve closed
9/22/2011	10:17:43 AM	SiCl4 post valve closed
9/22/2011	10:17:43 AM	Bypass valve closed
9/22/2011	10:17:43 AM	Bubbler valve closed
9/22/2011	10:17:43 AM	Helium valve opened
9/22/2011	10:17:43 AM	Main Vac valve opened
9/22/2011	10:17:43 AM	Helium MFC set to  20.000000
9/22/2011	10:17:43 AM	H2 MFC set to  0.000000
9/22/2011	10:17:43 AM	BCl3 MFC set to  0.000000
9/22/2011	10:17:43 AM	PHl3 MFC set to  0.000000
9/22/2011	10:17:43 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:17:43 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:17:43 AM	Tube furnace set to 150
9/22/2011	10:18:13 AM	Helium valve closed
9/22/2011	10:18:13 AM	H2 valve closed
9/22/2011	10:18:13 AM	BCl3 valve closed
9/22/2011	10:18:13 AM	PH3 valve closed
9/22/2011	10:18:13 AM	SiCl4 pre valve closed
9/22/2011	10:18:13 AM	SiCl4 post valve closed
9/22/2011	10:18:13 AM	Bypass valve closed
9/22/2011	10:18:13 AM	Bubbler valve closed
9/22/2011	10:18:13 AM	Main Vac valve opened
9/22/2011	10:18:13 AM	Helium MFC set to  0.000000
9/22/2011	10:18:13 AM	H2 MFC set to  0.000000
9/22/2011	10:18:13 AM	BCl3 MFC set to  0.000000
9/22/2011	10:18:13 AM	PHl3 MFC set to  0.000000
9/22/2011	10:18:13 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:18:13 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:18:13 AM	Tube furnace set to 150
9/22/2011	10:18:43 AM	H2 valve closed
9/22/2011	10:18:43 AM	BCl3 valve closed
9/22/2011	10:18:43 AM	PH3 valve closed
9/22/2011	10:18:43 AM	SiCl4 pre valve closed
9/22/2011	10:18:43 AM	SiCl4 post valve closed
9/22/2011	10:18:43 AM	Bypass valve closed
9/22/2011	10:18:43 AM	Bubbler valve closed
9/22/2011	10:18:43 AM	Helium valve opened
9/22/2011	10:18:43 AM	Main Vac valve opened
9/22/2011	10:18:43 AM	Helium MFC set to  20.000000
9/22/2011	10:18:43 AM	H2 MFC set to  0.000000
9/22/2011	10:18:43 AM	BCl3 MFC set to  0.000000
9/22/2011	10:18:43 AM	PHl3 MFC set to  0.000000
9/22/2011	10:18:43 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:18:43 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:18:43 AM	Tube furnace set to 150
9/22/2011	10:19:13 AM	Helium valve closed
9/22/2011	10:19:13 AM	H2 valve closed
9/22/2011	10:19:13 AM	BCl3 valve closed
9/22/2011	10:19:13 AM	PH3 valve closed
9/22/2011	10:19:13 AM	SiCl4 pre valve closed
9/22/2011	10:19:13 AM	SiCl4 post valve closed
9/22/2011	10:19:13 AM	Bypass valve closed
9/22/2011	10:19:13 AM	Bubbler valve closed
9/22/2011	10:19:13 AM	Main Vac valve opened
9/22/2011	10:19:13 AM	Helium MFC set to  0.000000
9/22/2011	10:19:13 AM	H2 MFC set to  0.000000
9/22/2011	10:19:13 AM	BCl3 MFC set to  0.000000
9/22/2011	10:19:13 AM	PHl3 MFC set to  0.000000
9/22/2011	10:19:13 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:19:13 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:19:13 AM	Tube furnace set to 150
9/22/2011	10:19:43 AM	H2 valve closed
9/22/2011	10:19:43 AM	BCl3 valve closed
9/22/2011	10:19:43 AM	PH3 valve closed
9/22/2011	10:19:43 AM	SiCl4 pre valve closed
9/22/2011	10:19:43 AM	SiCl4 post valve closed
9/22/2011	10:19:43 AM	Bypass valve closed
9/22/2011	10:19:43 AM	Bubbler valve closed
9/22/2011	10:19:43 AM	Helium valve opened
9/22/2011	10:19:43 AM	Main Vac valve opened
9/22/2011	10:19:43 AM	Helium MFC set to  20.000000
9/22/2011	10:19:43 AM	H2 MFC set to  0.000000
9/22/2011	10:19:43 AM	BCl3 MFC set to  0.000000
9/22/2011	10:19:43 AM	PHl3 MFC set to  0.000000
9/22/2011	10:19:43 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:19:43 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:19:44 AM	Tube furnace set to 150
9/22/2011	10:20:14 AM	Helium valve closed
9/22/2011	10:20:14 AM	H2 valve closed
9/22/2011	10:20:14 AM	BCl3 valve closed
9/22/2011	10:20:14 AM	PH3 valve closed
9/22/2011	10:20:14 AM	SiCl4 pre valve closed
9/22/2011	10:20:14 AM	SiCl4 post valve closed
9/22/2011	10:20:14 AM	Bypass valve closed
9/22/2011	10:20:14 AM	Bubbler valve closed
9/22/2011	10:20:14 AM	Main Vac valve opened
9/22/2011	10:20:14 AM	Helium MFC set to  0.000000
9/22/2011	10:20:14 AM	H2 MFC set to  0.000000
9/22/2011	10:20:14 AM	BCl3 MFC set to  0.000000
9/22/2011	10:20:14 AM	PHl3 MFC set to  0.000000
9/22/2011	10:20:14 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:20:14 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:20:14 AM	Tube furnace set to 150
9/22/2011	10:20:15 AM	Run finished at 10:20 AM
9/22/2011	10:21:35 AM	Tube furnace set to 0
9/22/2011	10:21:58 AM	Main Vac valve closed
9/22/2011	10:22:18 AM	Main Vac valve opened
9/22/2011	10:24:52 AM	Recipe started at 10:24 AM
9/22/2011	10:24:52 AM	Helium valve closed
9/22/2011	10:24:52 AM	H2 valve closed
9/22/2011	10:24:52 AM	BCl3 valve closed
9/22/2011	10:24:52 AM	PH3 valve closed
9/22/2011	10:24:52 AM	SiCl4 pre valve closed
9/22/2011	10:24:52 AM	SiCl4 post valve closed
9/22/2011	10:24:52 AM	Main Vac valve closed
9/22/2011	10:24:52 AM	Bypass valve closed
9/22/2011	10:24:52 AM	Bubbler valve closed
9/22/2011	10:24:52 AM	Helium MFC set to  0.000000
9/22/2011	10:24:52 AM	H2 MFC set to  0.000000
9/22/2011	10:24:52 AM	BCl3 MFC set to  0.000000
9/22/2011	10:24:52 AM	PHl3 MFC set to  0.000000
9/22/2011	10:24:52 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:24:52 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:24:52 AM	Tube furnace set to 0
9/22/2011	10:24:55 AM	Helium valve closed
9/22/2011	10:24:55 AM	BCl3 valve closed
9/22/2011	10:24:55 AM	PH3 valve closed
9/22/2011	10:24:55 AM	SiCl4 pre valve closed
9/22/2011	10:24:55 AM	SiCl4 post valve closed
9/22/2011	10:24:55 AM	Main Vac valve closed
9/22/2011	10:24:55 AM	Bypass valve closed
9/22/2011	10:24:55 AM	Bubbler valve closed
9/22/2011	10:24:55 AM	H2 valve opened
9/22/2011	10:24:55 AM	Helium MFC set to  0.000000
9/22/2011	10:24:55 AM	H2 MFC set to  500.000000
9/22/2011	10:24:55 AM	BCl3 MFC set to  0.000000
9/22/2011	10:24:55 AM	PHl3 MFC set to  0.000000
9/22/2011	10:24:55 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:24:55 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:24:56 AM	Tube furnace set to 0
9/22/2011	10:26:01 AM	Helium valve closed
9/22/2011	10:26:01 AM	BCl3 valve closed
9/22/2011	10:26:01 AM	PH3 valve closed
9/22/2011	10:26:01 AM	SiCl4 pre valve closed
9/22/2011	10:26:01 AM	SiCl4 post valve closed
9/22/2011	10:26:01 AM	Main Vac valve closed
9/22/2011	10:26:01 AM	Bypass valve closed
9/22/2011	10:26:01 AM	H2 valve opened
9/22/2011	10:26:01 AM	Bubbler valve opened
9/22/2011	10:26:01 AM	Helium MFC set to  0.000000
9/22/2011	10:26:01 AM	H2 MFC set to  500.000000
9/22/2011	10:26:01 AM	BCl3 MFC set to  0.000000
9/22/2011	10:26:01 AM	PHl3 MFC set to  0.000000
9/22/2011	10:26:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:26:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:26:01 AM	Tube furnace set to 0
9/22/2011	10:26:02 AM	Helium valve closed
9/22/2011	10:26:02 AM	BCl3 valve closed
9/22/2011	10:26:02 AM	PH3 valve closed
9/22/2011	10:26:02 AM	SiCl4 pre valve closed
9/22/2011	10:26:02 AM	SiCl4 post valve closed
9/22/2011	10:26:02 AM	Main Vac valve closed
9/22/2011	10:26:02 AM	Bypass valve closed
9/22/2011	10:26:02 AM	H2 valve opened
9/22/2011	10:26:02 AM	Bubbler valve opened
9/22/2011	10:26:02 AM	Helium MFC set to  0.000000
9/22/2011	10:26:02 AM	H2 MFC set to  500.000000
9/22/2011	10:26:02 AM	BCl3 MFC set to  0.000000
9/22/2011	10:26:02 AM	PHl3 MFC set to  0.000000
9/22/2011	10:26:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:26:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:26:02 AM	Tube furnace set to 1000
9/22/2011	10:46:02 AM	Helium valve closed
9/22/2011	10:46:02 AM	PH3 valve closed
9/22/2011	10:46:02 AM	Main Vac valve closed
9/22/2011	10:46:02 AM	Bypass valve closed
9/22/2011	10:46:02 AM	H2 valve opened
9/22/2011	10:46:02 AM	BCl3 valve opened
9/22/2011	10:46:02 AM	SiCl4 pre valve opened
9/22/2011	10:46:02 AM	SiCl4 post valve opened
9/22/2011	10:46:02 AM	Bubbler valve opened
9/22/2011	10:46:02 AM	Helium MFC set to  0.000000
9/22/2011	10:46:02 AM	H2 MFC set to  500.000000
9/22/2011	10:46:02 AM	BCl3 MFC set to  2.500000
9/22/2011	10:46:02 AM	PHl3 MFC set to  0.000000
9/22/2011	10:46:02 AM	SiCl4 MFC set to  50.000000
9/22/2011	10:46:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:46:03 AM	Tube furnace set to 1000
9/22/2011	10:56:03 AM	Helium valve closed
9/22/2011	10:56:03 AM	BCl3 valve closed
9/22/2011	10:56:03 AM	PH3 valve closed
9/22/2011	10:56:03 AM	SiCl4 pre valve closed
9/22/2011	10:56:03 AM	SiCl4 post valve closed
9/22/2011	10:56:03 AM	Main Vac valve closed
9/22/2011	10:56:03 AM	Bypass valve closed
9/22/2011	10:56:03 AM	H2 valve opened
9/22/2011	10:56:03 AM	Bubbler valve opened
9/22/2011	10:56:03 AM	Helium MFC set to  0.000000
9/22/2011	10:56:03 AM	H2 MFC set to  500.000000
9/22/2011	10:56:03 AM	BCl3 MFC set to  0.000000
9/22/2011	10:56:03 AM	PHl3 MFC set to  0.000000
9/22/2011	10:56:03 AM	SiCl4 MFC set to  0.000000
9/22/2011	10:56:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	10:56:03 AM	Tube furnace set to 750
9/22/2011	11:01:03 AM	H2 valve closed
9/22/2011	11:01:03 AM	BCl3 valve closed
9/22/2011	11:01:03 AM	PH3 valve closed
9/22/2011	11:01:03 AM	SiCl4 pre valve closed
9/22/2011	11:01:03 AM	SiCl4 post valve closed
9/22/2011	11:01:03 AM	Main Vac valve closed
9/22/2011	11:01:03 AM	Bypass valve closed
9/22/2011	11:01:03 AM	Helium valve opened
9/22/2011	11:01:03 AM	Bubbler valve opened
9/22/2011	11:01:03 AM	Helium MFC set to  500.000000
9/22/2011	11:01:03 AM	H2 MFC set to  0.000000
9/22/2011	11:01:03 AM	BCl3 MFC set to  0.000000
9/22/2011	11:01:03 AM	PHl3 MFC set to  0.000000
9/22/2011	11:01:03 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:01:03 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:01:03 AM	Tube furnace set to 0
9/22/2011	11:17:19 AM	Helium valve closed
9/22/2011	11:17:19 AM	H2 valve closed
9/22/2011	11:17:19 AM	BCl3 valve closed
9/22/2011	11:17:19 AM	PH3 valve closed
9/22/2011	11:17:19 AM	SiCl4 pre valve closed
9/22/2011	11:17:19 AM	SiCl4 post valve closed
9/22/2011	11:17:19 AM	Main Vac valve closed
9/22/2011	11:17:19 AM	Bypass valve closed
9/22/2011	11:17:19 AM	Bubbler valve closed
9/22/2011	11:17:19 AM	Helium MFC set to  0.000000
9/22/2011	11:17:19 AM	H2 MFC set to  0.000000
9/22/2011	11:17:19 AM	BCl3 MFC set to  0.000000
9/22/2011	11:17:19 AM	PHl3 MFC set to  0.000000
9/22/2011	11:17:19 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:17:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:17:19 AM	Tube furnace set to 0
9/22/2011	11:17:20 AM	Run finished at 11:17 AM
9/22/2011	11:22:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	11:22:31 AM	Recipe started at 11:22 AM
9/22/2011	11:22:31 AM	Helium valve closed
9/22/2011	11:22:31 AM	H2 valve closed
9/22/2011	11:22:31 AM	BCl3 valve closed
9/22/2011	11:22:31 AM	PH3 valve closed
9/22/2011	11:22:31 AM	SiCl4 pre valve closed
9/22/2011	11:22:31 AM	SiCl4 post valve closed
9/22/2011	11:22:31 AM	Main Vac valve closed
9/22/2011	11:22:31 AM	Bubbler valve closed
9/22/2011	11:22:31 AM	Bypass valve opened
9/22/2011	11:22:31 AM	Helium MFC set to  0.000000
9/22/2011	11:22:31 AM	H2 MFC set to  0.000000
9/22/2011	11:22:31 AM	BCl3 MFC set to  0.000000
9/22/2011	11:22:31 AM	PHl3 MFC set to  0.000000
9/22/2011	11:22:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:22:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:22:31 AM	Tube furnace set to 0
9/22/2011	11:23:37 AM	Helium valve closed
9/22/2011	11:23:37 AM	H2 valve closed
9/22/2011	11:23:37 AM	BCl3 valve closed
9/22/2011	11:23:37 AM	PH3 valve closed
9/22/2011	11:23:37 AM	SiCl4 pre valve closed
9/22/2011	11:23:37 AM	SiCl4 post valve closed
9/22/2011	11:23:37 AM	Main Vac valve closed
9/22/2011	11:23:37 AM	Bubbler valve closed
9/22/2011	11:23:37 AM	Bypass valve opened
9/22/2011	11:23:37 AM	Helium MFC set to  0.000000
9/22/2011	11:23:37 AM	H2 MFC set to  0.000000
9/22/2011	11:23:37 AM	BCl3 MFC set to  0.000000
9/22/2011	11:23:37 AM	PHl3 MFC set to  0.000000
9/22/2011	11:23:37 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:23:37 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:23:37 AM	Tube furnace set to 0
9/22/2011	11:24:15 AM	Helium valve closed
9/22/2011	11:24:15 AM	H2 valve closed
9/22/2011	11:24:15 AM	BCl3 valve closed
9/22/2011	11:24:15 AM	PH3 valve closed
9/22/2011	11:24:15 AM	SiCl4 pre valve closed
9/22/2011	11:24:15 AM	SiCl4 post valve closed
9/22/2011	11:24:15 AM	Bypass valve closed
9/22/2011	11:24:15 AM	Bubbler valve closed
9/22/2011	11:24:15 AM	Main Vac valve opened
9/22/2011	11:24:15 AM	Helium MFC set to  0.000000
9/22/2011	11:24:15 AM	H2 MFC set to  0.000000
9/22/2011	11:24:15 AM	BCl3 MFC set to  0.000000
9/22/2011	11:24:15 AM	PHl3 MFC set to  0.000000
9/22/2011	11:24:15 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:24:15 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:24:16 AM	Tube furnace set to 0
9/22/2011	11:24:17 AM	Run finished at 11:24 AM
9/22/2011	11:24:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	11:26:17 AM	Recipe started at 11:26 AM
9/22/2011	11:26:17 AM	Helium valve closed
9/22/2011	11:26:17 AM	H2 valve closed
9/22/2011	11:26:17 AM	BCl3 valve closed
9/22/2011	11:26:17 AM	PH3 valve closed
9/22/2011	11:26:17 AM	SiCl4 pre valve closed
9/22/2011	11:26:17 AM	SiCl4 post valve closed
9/22/2011	11:26:17 AM	Bypass valve closed
9/22/2011	11:26:17 AM	Bubbler valve closed
9/22/2011	11:26:17 AM	Main Vac valve opened
9/22/2011	11:26:17 AM	Helium MFC set to  0.000000
9/22/2011	11:26:17 AM	H2 MFC set to  0.000000
9/22/2011	11:26:17 AM	BCl3 MFC set to  0.000000
9/22/2011	11:26:17 AM	PHl3 MFC set to  0.000000
9/22/2011	11:26:17 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:26:17 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:26:17 AM	Tube furnace set to 150
9/22/2011	11:26:47 AM	H2 valve closed
9/22/2011	11:26:47 AM	BCl3 valve closed
9/22/2011	11:26:47 AM	PH3 valve closed
9/22/2011	11:26:47 AM	SiCl4 pre valve closed
9/22/2011	11:26:47 AM	SiCl4 post valve closed
9/22/2011	11:26:47 AM	Bypass valve closed
9/22/2011	11:26:47 AM	Bubbler valve closed
9/22/2011	11:26:47 AM	Helium valve opened
9/22/2011	11:26:47 AM	Main Vac valve opened
9/22/2011	11:26:47 AM	Helium MFC set to  20.000000
9/22/2011	11:26:47 AM	H2 MFC set to  0.000000
9/22/2011	11:26:47 AM	BCl3 MFC set to  0.000000
9/22/2011	11:26:47 AM	PHl3 MFC set to  0.000000
9/22/2011	11:26:47 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:26:47 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:26:47 AM	Tube furnace set to 150
9/22/2011	11:27:17 AM	Helium valve closed
9/22/2011	11:27:17 AM	H2 valve closed
9/22/2011	11:27:17 AM	BCl3 valve closed
9/22/2011	11:27:17 AM	PH3 valve closed
9/22/2011	11:27:17 AM	SiCl4 pre valve closed
9/22/2011	11:27:17 AM	SiCl4 post valve closed
9/22/2011	11:27:17 AM	Bypass valve closed
9/22/2011	11:27:17 AM	Bubbler valve closed
9/22/2011	11:27:17 AM	Main Vac valve opened
9/22/2011	11:27:17 AM	Helium MFC set to  0.000000
9/22/2011	11:27:17 AM	H2 MFC set to  0.000000
9/22/2011	11:27:17 AM	BCl3 MFC set to  0.000000
9/22/2011	11:27:17 AM	PHl3 MFC set to  0.000000
9/22/2011	11:27:17 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:27:17 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:27:17 AM	Tube furnace set to 150
9/22/2011	11:27:47 AM	H2 valve closed
9/22/2011	11:27:47 AM	BCl3 valve closed
9/22/2011	11:27:47 AM	PH3 valve closed
9/22/2011	11:27:47 AM	SiCl4 pre valve closed
9/22/2011	11:27:47 AM	SiCl4 post valve closed
9/22/2011	11:27:47 AM	Bypass valve closed
9/22/2011	11:27:47 AM	Bubbler valve closed
9/22/2011	11:27:47 AM	Helium valve opened
9/22/2011	11:27:47 AM	Main Vac valve opened
9/22/2011	11:27:47 AM	Helium MFC set to  20.000000
9/22/2011	11:27:47 AM	H2 MFC set to  0.000000
9/22/2011	11:27:47 AM	BCl3 MFC set to  0.000000
9/22/2011	11:27:47 AM	PHl3 MFC set to  0.000000
9/22/2011	11:27:47 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:27:47 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:27:48 AM	Tube furnace set to 150
9/22/2011	11:28:18 AM	Helium valve closed
9/22/2011	11:28:18 AM	H2 valve closed
9/22/2011	11:28:18 AM	BCl3 valve closed
9/22/2011	11:28:18 AM	PH3 valve closed
9/22/2011	11:28:18 AM	SiCl4 pre valve closed
9/22/2011	11:28:18 AM	SiCl4 post valve closed
9/22/2011	11:28:18 AM	Bypass valve closed
9/22/2011	11:28:18 AM	Bubbler valve closed
9/22/2011	11:28:18 AM	Main Vac valve opened
9/22/2011	11:28:18 AM	Helium MFC set to  0.000000
9/22/2011	11:28:18 AM	H2 MFC set to  0.000000
9/22/2011	11:28:18 AM	BCl3 MFC set to  0.000000
9/22/2011	11:28:18 AM	PHl3 MFC set to  0.000000
9/22/2011	11:28:18 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:28:18 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:28:18 AM	Tube furnace set to 150
9/22/2011	11:28:48 AM	H2 valve closed
9/22/2011	11:28:48 AM	BCl3 valve closed
9/22/2011	11:28:48 AM	PH3 valve closed
9/22/2011	11:28:48 AM	SiCl4 pre valve closed
9/22/2011	11:28:48 AM	SiCl4 post valve closed
9/22/2011	11:28:48 AM	Bypass valve closed
9/22/2011	11:28:48 AM	Bubbler valve closed
9/22/2011	11:28:48 AM	Helium valve opened
9/22/2011	11:28:48 AM	Main Vac valve opened
9/22/2011	11:28:48 AM	Helium MFC set to  20.000000
9/22/2011	11:28:48 AM	H2 MFC set to  0.000000
9/22/2011	11:28:48 AM	BCl3 MFC set to  0.000000
9/22/2011	11:28:48 AM	PHl3 MFC set to  0.000000
9/22/2011	11:28:48 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:28:48 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:28:48 AM	Tube furnace set to 150
9/22/2011	11:29:18 AM	Helium valve closed
9/22/2011	11:29:18 AM	H2 valve closed
9/22/2011	11:29:18 AM	BCl3 valve closed
9/22/2011	11:29:18 AM	PH3 valve closed
9/22/2011	11:29:18 AM	SiCl4 pre valve closed
9/22/2011	11:29:18 AM	SiCl4 post valve closed
9/22/2011	11:29:18 AM	Bypass valve closed
9/22/2011	11:29:18 AM	Bubbler valve closed
9/22/2011	11:29:18 AM	Main Vac valve opened
9/22/2011	11:29:18 AM	Helium MFC set to  0.000000
9/22/2011	11:29:18 AM	H2 MFC set to  0.000000
9/22/2011	11:29:18 AM	BCl3 MFC set to  0.000000
9/22/2011	11:29:18 AM	PHl3 MFC set to  0.000000
9/22/2011	11:29:18 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:29:18 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:29:18 AM	Tube furnace set to 150
9/22/2011	11:29:48 AM	H2 valve closed
9/22/2011	11:29:48 AM	BCl3 valve closed
9/22/2011	11:29:48 AM	PH3 valve closed
9/22/2011	11:29:48 AM	SiCl4 pre valve closed
9/22/2011	11:29:48 AM	SiCl4 post valve closed
9/22/2011	11:29:48 AM	Bypass valve closed
9/22/2011	11:29:48 AM	Bubbler valve closed
9/22/2011	11:29:48 AM	Helium valve opened
9/22/2011	11:29:48 AM	Main Vac valve opened
9/22/2011	11:29:48 AM	Helium MFC set to  20.000000
9/22/2011	11:29:48 AM	H2 MFC set to  0.000000
9/22/2011	11:29:48 AM	BCl3 MFC set to  0.000000
9/22/2011	11:29:48 AM	PHl3 MFC set to  0.000000
9/22/2011	11:29:48 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:29:48 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:29:48 AM	Tube furnace set to 150
9/22/2011	11:30:18 AM	Helium valve closed
9/22/2011	11:30:18 AM	H2 valve closed
9/22/2011	11:30:18 AM	BCl3 valve closed
9/22/2011	11:30:18 AM	PH3 valve closed
9/22/2011	11:30:18 AM	SiCl4 pre valve closed
9/22/2011	11:30:18 AM	SiCl4 post valve closed
9/22/2011	11:30:18 AM	Bypass valve closed
9/22/2011	11:30:18 AM	Bubbler valve closed
9/22/2011	11:30:18 AM	Main Vac valve opened
9/22/2011	11:30:18 AM	Helium MFC set to  0.000000
9/22/2011	11:30:18 AM	H2 MFC set to  0.000000
9/22/2011	11:30:18 AM	BCl3 MFC set to  0.000000
9/22/2011	11:30:18 AM	PHl3 MFC set to  0.000000
9/22/2011	11:30:18 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:30:18 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:30:19 AM	Tube furnace set to 150
9/22/2011	11:30:49 AM	H2 valve closed
9/22/2011	11:30:49 AM	BCl3 valve closed
9/22/2011	11:30:49 AM	PH3 valve closed
9/22/2011	11:30:49 AM	SiCl4 pre valve closed
9/22/2011	11:30:49 AM	SiCl4 post valve closed
9/22/2011	11:30:49 AM	Bypass valve closed
9/22/2011	11:30:49 AM	Bubbler valve closed
9/22/2011	11:30:49 AM	Helium valve opened
9/22/2011	11:30:49 AM	Main Vac valve opened
9/22/2011	11:30:49 AM	Helium MFC set to  20.000000
9/22/2011	11:30:49 AM	H2 MFC set to  0.000000
9/22/2011	11:30:49 AM	BCl3 MFC set to  0.000000
9/22/2011	11:30:49 AM	PHl3 MFC set to  0.000000
9/22/2011	11:30:49 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:30:49 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:30:49 AM	Tube furnace set to 150
9/22/2011	11:31:19 AM	Helium valve closed
9/22/2011	11:31:19 AM	H2 valve closed
9/22/2011	11:31:19 AM	BCl3 valve closed
9/22/2011	11:31:19 AM	PH3 valve closed
9/22/2011	11:31:19 AM	SiCl4 pre valve closed
9/22/2011	11:31:19 AM	SiCl4 post valve closed
9/22/2011	11:31:19 AM	Bypass valve closed
9/22/2011	11:31:19 AM	Bubbler valve closed
9/22/2011	11:31:19 AM	Main Vac valve opened
9/22/2011	11:31:19 AM	Helium MFC set to  0.000000
9/22/2011	11:31:19 AM	H2 MFC set to  0.000000
9/22/2011	11:31:19 AM	BCl3 MFC set to  0.000000
9/22/2011	11:31:19 AM	PHl3 MFC set to  0.000000
9/22/2011	11:31:19 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:31:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:31:19 AM	Tube furnace set to 150
9/22/2011	11:31:49 AM	H2 valve closed
9/22/2011	11:31:49 AM	BCl3 valve closed
9/22/2011	11:31:49 AM	PH3 valve closed
9/22/2011	11:31:49 AM	SiCl4 pre valve closed
9/22/2011	11:31:49 AM	SiCl4 post valve closed
9/22/2011	11:31:49 AM	Bypass valve closed
9/22/2011	11:31:49 AM	Bubbler valve closed
9/22/2011	11:31:49 AM	Helium valve opened
9/22/2011	11:31:49 AM	Main Vac valve opened
9/22/2011	11:31:49 AM	Helium MFC set to  20.000000
9/22/2011	11:31:49 AM	H2 MFC set to  0.000000
9/22/2011	11:31:49 AM	BCl3 MFC set to  0.000000
9/22/2011	11:31:49 AM	PHl3 MFC set to  0.000000
9/22/2011	11:31:49 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:31:49 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:31:49 AM	Tube furnace set to 150
9/22/2011	11:32:19 AM	Helium valve closed
9/22/2011	11:32:19 AM	H2 valve closed
9/22/2011	11:32:19 AM	BCl3 valve closed
9/22/2011	11:32:19 AM	PH3 valve closed
9/22/2011	11:32:19 AM	SiCl4 pre valve closed
9/22/2011	11:32:19 AM	SiCl4 post valve closed
9/22/2011	11:32:19 AM	Bypass valve closed
9/22/2011	11:32:19 AM	Bubbler valve closed
9/22/2011	11:32:19 AM	Main Vac valve opened
9/22/2011	11:32:19 AM	Helium MFC set to  0.000000
9/22/2011	11:32:19 AM	H2 MFC set to  0.000000
9/22/2011	11:32:19 AM	BCl3 MFC set to  0.000000
9/22/2011	11:32:19 AM	PHl3 MFC set to  0.000000
9/22/2011	11:32:19 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:32:19 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:32:19 AM	Tube furnace set to 150
9/22/2011	11:32:49 AM	H2 valve closed
9/22/2011	11:32:49 AM	BCl3 valve closed
9/22/2011	11:32:49 AM	PH3 valve closed
9/22/2011	11:32:49 AM	SiCl4 pre valve closed
9/22/2011	11:32:49 AM	SiCl4 post valve closed
9/22/2011	11:32:49 AM	Bypass valve closed
9/22/2011	11:32:49 AM	Bubbler valve closed
9/22/2011	11:32:49 AM	Helium valve opened
9/22/2011	11:32:49 AM	Main Vac valve opened
9/22/2011	11:32:49 AM	Helium MFC set to  20.000000
9/22/2011	11:32:49 AM	H2 MFC set to  0.000000
9/22/2011	11:32:49 AM	BCl3 MFC set to  0.000000
9/22/2011	11:32:49 AM	PHl3 MFC set to  0.000000
9/22/2011	11:32:49 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:32:49 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:32:50 AM	Tube furnace set to 150
9/22/2011	11:33:20 AM	Helium valve closed
9/22/2011	11:33:20 AM	H2 valve closed
9/22/2011	11:33:20 AM	BCl3 valve closed
9/22/2011	11:33:20 AM	PH3 valve closed
9/22/2011	11:33:20 AM	SiCl4 pre valve closed
9/22/2011	11:33:20 AM	SiCl4 post valve closed
9/22/2011	11:33:20 AM	Bypass valve closed
9/22/2011	11:33:20 AM	Bubbler valve closed
9/22/2011	11:33:20 AM	Main Vac valve opened
9/22/2011	11:33:20 AM	Helium MFC set to  0.000000
9/22/2011	11:33:20 AM	H2 MFC set to  0.000000
9/22/2011	11:33:20 AM	BCl3 MFC set to  0.000000
9/22/2011	11:33:20 AM	PHl3 MFC set to  0.000000
9/22/2011	11:33:20 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:33:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:33:20 AM	Tube furnace set to 150
9/22/2011	11:33:50 AM	H2 valve closed
9/22/2011	11:33:50 AM	BCl3 valve closed
9/22/2011	11:33:50 AM	PH3 valve closed
9/22/2011	11:33:50 AM	SiCl4 pre valve closed
9/22/2011	11:33:50 AM	SiCl4 post valve closed
9/22/2011	11:33:50 AM	Bypass valve closed
9/22/2011	11:33:50 AM	Bubbler valve closed
9/22/2011	11:33:50 AM	Helium valve opened
9/22/2011	11:33:50 AM	Main Vac valve opened
9/22/2011	11:33:50 AM	Helium MFC set to  20.000000
9/22/2011	11:33:50 AM	H2 MFC set to  0.000000
9/22/2011	11:33:50 AM	BCl3 MFC set to  0.000000
9/22/2011	11:33:50 AM	PHl3 MFC set to  0.000000
9/22/2011	11:33:50 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:33:50 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:33:50 AM	Tube furnace set to 150
9/22/2011	11:34:20 AM	Helium valve closed
9/22/2011	11:34:20 AM	H2 valve closed
9/22/2011	11:34:20 AM	BCl3 valve closed
9/22/2011	11:34:20 AM	PH3 valve closed
9/22/2011	11:34:20 AM	SiCl4 pre valve closed
9/22/2011	11:34:20 AM	SiCl4 post valve closed
9/22/2011	11:34:20 AM	Bypass valve closed
9/22/2011	11:34:20 AM	Bubbler valve closed
9/22/2011	11:34:20 AM	Main Vac valve opened
9/22/2011	11:34:20 AM	Helium MFC set to  0.000000
9/22/2011	11:34:20 AM	H2 MFC set to  0.000000
9/22/2011	11:34:20 AM	BCl3 MFC set to  0.000000
9/22/2011	11:34:20 AM	PHl3 MFC set to  0.000000
9/22/2011	11:34:20 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:34:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:34:20 AM	Tube furnace set to 150
9/22/2011	11:34:50 AM	H2 valve closed
9/22/2011	11:34:50 AM	BCl3 valve closed
9/22/2011	11:34:50 AM	PH3 valve closed
9/22/2011	11:34:50 AM	SiCl4 pre valve closed
9/22/2011	11:34:50 AM	SiCl4 post valve closed
9/22/2011	11:34:50 AM	Bypass valve closed
9/22/2011	11:34:50 AM	Bubbler valve closed
9/22/2011	11:34:50 AM	Helium valve opened
9/22/2011	11:34:50 AM	Main Vac valve opened
9/22/2011	11:34:50 AM	Helium MFC set to  20.000000
9/22/2011	11:34:50 AM	H2 MFC set to  0.000000
9/22/2011	11:34:50 AM	BCl3 MFC set to  0.000000
9/22/2011	11:34:50 AM	PHl3 MFC set to  0.000000
9/22/2011	11:34:50 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:34:50 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:34:50 AM	Tube furnace set to 150
9/22/2011	11:35:20 AM	Helium valve closed
9/22/2011	11:35:20 AM	H2 valve closed
9/22/2011	11:35:20 AM	BCl3 valve closed
9/22/2011	11:35:20 AM	PH3 valve closed
9/22/2011	11:35:20 AM	SiCl4 pre valve closed
9/22/2011	11:35:20 AM	SiCl4 post valve closed
9/22/2011	11:35:20 AM	Bypass valve closed
9/22/2011	11:35:20 AM	Bubbler valve closed
9/22/2011	11:35:20 AM	Main Vac valve opened
9/22/2011	11:35:20 AM	Helium MFC set to  0.000000
9/22/2011	11:35:20 AM	H2 MFC set to  0.000000
9/22/2011	11:35:20 AM	BCl3 MFC set to  0.000000
9/22/2011	11:35:20 AM	PHl3 MFC set to  0.000000
9/22/2011	11:35:20 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:35:20 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:35:21 AM	Tube furnace set to 150
9/22/2011	11:35:51 AM	H2 valve closed
9/22/2011	11:35:51 AM	BCl3 valve closed
9/22/2011	11:35:51 AM	PH3 valve closed
9/22/2011	11:35:51 AM	SiCl4 pre valve closed
9/22/2011	11:35:51 AM	SiCl4 post valve closed
9/22/2011	11:35:51 AM	Bypass valve closed
9/22/2011	11:35:51 AM	Bubbler valve closed
9/22/2011	11:35:51 AM	Helium valve opened
9/22/2011	11:35:51 AM	Main Vac valve opened
9/22/2011	11:35:51 AM	Helium MFC set to  20.000000
9/22/2011	11:35:51 AM	H2 MFC set to  0.000000
9/22/2011	11:35:51 AM	BCl3 MFC set to  0.000000
9/22/2011	11:35:51 AM	PHl3 MFC set to  0.000000
9/22/2011	11:35:51 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:35:51 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:35:51 AM	Tube furnace set to 150
9/22/2011	11:36:21 AM	Helium valve closed
9/22/2011	11:36:21 AM	H2 valve closed
9/22/2011	11:36:21 AM	BCl3 valve closed
9/22/2011	11:36:21 AM	PH3 valve closed
9/22/2011	11:36:21 AM	SiCl4 pre valve closed
9/22/2011	11:36:21 AM	SiCl4 post valve closed
9/22/2011	11:36:21 AM	Bypass valve closed
9/22/2011	11:36:21 AM	Bubbler valve closed
9/22/2011	11:36:21 AM	Main Vac valve opened
9/22/2011	11:36:21 AM	Helium MFC set to  0.000000
9/22/2011	11:36:21 AM	H2 MFC set to  0.000000
9/22/2011	11:36:21 AM	BCl3 MFC set to  0.000000
9/22/2011	11:36:21 AM	PHl3 MFC set to  0.000000
9/22/2011	11:36:21 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:36:21 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:36:21 AM	Tube furnace set to 150
9/22/2011	11:36:22 AM	Run finished at 11:36 AM
9/22/2011	11:37:29 AM	Recipe started at 11:37 AM
9/22/2011	11:37:29 AM	Helium valve closed
9/22/2011	11:37:29 AM	H2 valve closed
9/22/2011	11:37:29 AM	BCl3 valve closed
9/22/2011	11:37:29 AM	PH3 valve closed
9/22/2011	11:37:29 AM	SiCl4 pre valve closed
9/22/2011	11:37:29 AM	SiCl4 post valve closed
9/22/2011	11:37:29 AM	Bypass valve closed
9/22/2011	11:37:29 AM	Bubbler valve closed
9/22/2011	11:37:29 AM	Main Vac valve opened
9/22/2011	11:37:29 AM	Helium MFC set to  0.000000
9/22/2011	11:37:29 AM	H2 MFC set to  0.000000
9/22/2011	11:37:29 AM	BCl3 MFC set to  0.000000
9/22/2011	11:37:29 AM	PHl3 MFC set to  0.000000
9/22/2011	11:37:29 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:37:29 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:37:29 AM	Tube furnace set to 150
9/22/2011	11:37:59 AM	H2 valve closed
9/22/2011	11:37:59 AM	BCl3 valve closed
9/22/2011	11:37:59 AM	PH3 valve closed
9/22/2011	11:37:59 AM	SiCl4 pre valve closed
9/22/2011	11:37:59 AM	SiCl4 post valve closed
9/22/2011	11:37:59 AM	Bypass valve closed
9/22/2011	11:37:59 AM	Bubbler valve closed
9/22/2011	11:37:59 AM	Helium valve opened
9/22/2011	11:37:59 AM	Main Vac valve opened
9/22/2011	11:37:59 AM	Helium MFC set to  20.000000
9/22/2011	11:37:59 AM	H2 MFC set to  0.000000
9/22/2011	11:37:59 AM	BCl3 MFC set to  0.000000
9/22/2011	11:37:59 AM	PHl3 MFC set to  0.000000
9/22/2011	11:37:59 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:37:59 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:38:00 AM	Tube furnace set to 150
9/22/2011	11:38:30 AM	Helium valve closed
9/22/2011	11:38:30 AM	H2 valve closed
9/22/2011	11:38:30 AM	BCl3 valve closed
9/22/2011	11:38:30 AM	PH3 valve closed
9/22/2011	11:38:30 AM	SiCl4 pre valve closed
9/22/2011	11:38:30 AM	SiCl4 post valve closed
9/22/2011	11:38:30 AM	Bypass valve closed
9/22/2011	11:38:30 AM	Bubbler valve closed
9/22/2011	11:38:30 AM	Main Vac valve opened
9/22/2011	11:38:30 AM	Helium MFC set to  0.000000
9/22/2011	11:38:30 AM	H2 MFC set to  0.000000
9/22/2011	11:38:30 AM	BCl3 MFC set to  0.000000
9/22/2011	11:38:30 AM	PHl3 MFC set to  0.000000
9/22/2011	11:38:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:38:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:38:30 AM	Tube furnace set to 150
9/22/2011	11:39:00 AM	H2 valve closed
9/22/2011	11:39:00 AM	BCl3 valve closed
9/22/2011	11:39:00 AM	PH3 valve closed
9/22/2011	11:39:00 AM	SiCl4 pre valve closed
9/22/2011	11:39:00 AM	SiCl4 post valve closed
9/22/2011	11:39:00 AM	Bypass valve closed
9/22/2011	11:39:00 AM	Bubbler valve closed
9/22/2011	11:39:00 AM	Helium valve opened
9/22/2011	11:39:00 AM	Main Vac valve opened
9/22/2011	11:39:00 AM	Helium MFC set to  20.000000
9/22/2011	11:39:00 AM	H2 MFC set to  0.000000
9/22/2011	11:39:00 AM	BCl3 MFC set to  0.000000
9/22/2011	11:39:00 AM	PHl3 MFC set to  0.000000
9/22/2011	11:39:00 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:39:00 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:39:00 AM	Tube furnace set to 150
9/22/2011	11:39:30 AM	Helium valve closed
9/22/2011	11:39:30 AM	H2 valve closed
9/22/2011	11:39:30 AM	BCl3 valve closed
9/22/2011	11:39:30 AM	PH3 valve closed
9/22/2011	11:39:30 AM	SiCl4 pre valve closed
9/22/2011	11:39:30 AM	SiCl4 post valve closed
9/22/2011	11:39:30 AM	Bypass valve closed
9/22/2011	11:39:30 AM	Bubbler valve closed
9/22/2011	11:39:30 AM	Main Vac valve opened
9/22/2011	11:39:30 AM	Helium MFC set to  0.000000
9/22/2011	11:39:30 AM	H2 MFC set to  0.000000
9/22/2011	11:39:30 AM	BCl3 MFC set to  0.000000
9/22/2011	11:39:30 AM	PHl3 MFC set to  0.000000
9/22/2011	11:39:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:39:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:39:30 AM	Tube furnace set to 150
9/22/2011	11:40:00 AM	H2 valve closed
9/22/2011	11:40:00 AM	BCl3 valve closed
9/22/2011	11:40:00 AM	PH3 valve closed
9/22/2011	11:40:00 AM	SiCl4 pre valve closed
9/22/2011	11:40:00 AM	SiCl4 post valve closed
9/22/2011	11:40:00 AM	Bypass valve closed
9/22/2011	11:40:00 AM	Bubbler valve closed
9/22/2011	11:40:00 AM	Helium valve opened
9/22/2011	11:40:00 AM	Main Vac valve opened
9/22/2011	11:40:00 AM	Helium MFC set to  20.000000
9/22/2011	11:40:00 AM	H2 MFC set to  0.000000
9/22/2011	11:40:00 AM	BCl3 MFC set to  0.000000
9/22/2011	11:40:00 AM	PHl3 MFC set to  0.000000
9/22/2011	11:40:00 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:40:00 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:40:00 AM	Tube furnace set to 150
9/22/2011	11:40:30 AM	Helium valve closed
9/22/2011	11:40:30 AM	H2 valve closed
9/22/2011	11:40:30 AM	BCl3 valve closed
9/22/2011	11:40:30 AM	PH3 valve closed
9/22/2011	11:40:30 AM	SiCl4 pre valve closed
9/22/2011	11:40:30 AM	SiCl4 post valve closed
9/22/2011	11:40:30 AM	Bypass valve closed
9/22/2011	11:40:30 AM	Bubbler valve closed
9/22/2011	11:40:30 AM	Main Vac valve opened
9/22/2011	11:40:30 AM	Helium MFC set to  0.000000
9/22/2011	11:40:30 AM	H2 MFC set to  0.000000
9/22/2011	11:40:30 AM	BCl3 MFC set to  0.000000
9/22/2011	11:40:30 AM	PHl3 MFC set to  0.000000
9/22/2011	11:40:30 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:40:30 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:40:31 AM	Tube furnace set to 150
9/22/2011	11:41:01 AM	H2 valve closed
9/22/2011	11:41:01 AM	BCl3 valve closed
9/22/2011	11:41:01 AM	PH3 valve closed
9/22/2011	11:41:01 AM	SiCl4 pre valve closed
9/22/2011	11:41:01 AM	SiCl4 post valve closed
9/22/2011	11:41:01 AM	Bypass valve closed
9/22/2011	11:41:01 AM	Bubbler valve closed
9/22/2011	11:41:01 AM	Helium valve opened
9/22/2011	11:41:01 AM	Main Vac valve opened
9/22/2011	11:41:01 AM	Helium MFC set to  20.000000
9/22/2011	11:41:01 AM	H2 MFC set to  0.000000
9/22/2011	11:41:01 AM	BCl3 MFC set to  0.000000
9/22/2011	11:41:01 AM	PHl3 MFC set to  0.000000
9/22/2011	11:41:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:41:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:41:01 AM	Tube furnace set to 150
9/22/2011	11:41:31 AM	Helium valve closed
9/22/2011	11:41:31 AM	H2 valve closed
9/22/2011	11:41:31 AM	BCl3 valve closed
9/22/2011	11:41:31 AM	PH3 valve closed
9/22/2011	11:41:31 AM	SiCl4 pre valve closed
9/22/2011	11:41:31 AM	SiCl4 post valve closed
9/22/2011	11:41:31 AM	Bypass valve closed
9/22/2011	11:41:31 AM	Bubbler valve closed
9/22/2011	11:41:31 AM	Main Vac valve opened
9/22/2011	11:41:31 AM	Helium MFC set to  0.000000
9/22/2011	11:41:31 AM	H2 MFC set to  0.000000
9/22/2011	11:41:31 AM	BCl3 MFC set to  0.000000
9/22/2011	11:41:31 AM	PHl3 MFC set to  0.000000
9/22/2011	11:41:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:41:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:41:31 AM	Tube furnace set to 150
9/22/2011	11:42:01 AM	H2 valve closed
9/22/2011	11:42:01 AM	BCl3 valve closed
9/22/2011	11:42:01 AM	PH3 valve closed
9/22/2011	11:42:01 AM	SiCl4 pre valve closed
9/22/2011	11:42:01 AM	SiCl4 post valve closed
9/22/2011	11:42:01 AM	Bypass valve closed
9/22/2011	11:42:01 AM	Bubbler valve closed
9/22/2011	11:42:01 AM	Helium valve opened
9/22/2011	11:42:01 AM	Main Vac valve opened
9/22/2011	11:42:01 AM	Helium MFC set to  20.000000
9/22/2011	11:42:01 AM	H2 MFC set to  0.000000
9/22/2011	11:42:01 AM	BCl3 MFC set to  0.000000
9/22/2011	11:42:01 AM	PHl3 MFC set to  0.000000
9/22/2011	11:42:01 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:42:01 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:42:01 AM	Tube furnace set to 150
9/22/2011	11:42:31 AM	Helium valve closed
9/22/2011	11:42:31 AM	H2 valve closed
9/22/2011	11:42:31 AM	BCl3 valve closed
9/22/2011	11:42:31 AM	PH3 valve closed
9/22/2011	11:42:31 AM	SiCl4 pre valve closed
9/22/2011	11:42:31 AM	SiCl4 post valve closed
9/22/2011	11:42:31 AM	Bypass valve closed
9/22/2011	11:42:31 AM	Bubbler valve closed
9/22/2011	11:42:31 AM	Main Vac valve opened
9/22/2011	11:42:31 AM	Helium MFC set to  0.000000
9/22/2011	11:42:31 AM	H2 MFC set to  0.000000
9/22/2011	11:42:31 AM	BCl3 MFC set to  0.000000
9/22/2011	11:42:31 AM	PHl3 MFC set to  0.000000
9/22/2011	11:42:31 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:42:31 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:42:31 AM	Tube furnace set to 150
9/22/2011	11:43:01 AM	H2 valve closed
9/22/2011	11:43:01 AM	BCl3 valve closed
9/22/2011	11:43:01 AM	PH3 valve closed
9/22/2011	11:43:01 AM	SiCl4 pre valve closed
9/22/2011	11:43:01 AM	SiCl4 post valve closed
9/22/2011	11:43:01 AM	Bypass valve closed
9/22/2011	11:43:01 AM	Bubbler valve closed
9/22/2011	11:43:01 AM	Helium valve opened
9/22/2011	11:43:01 AM	Main Vac valve opened
9/22/2011	11:43:01 AM	Helium MFC set to  20.000000
9/22/2011	11:43:01 AM	H2 MFC set to  0.000000
9/22/2011	11:43:01 AM	BCl3 MFC set to  0.000000
9/22/2011	11:43:01 AM	PHl3 MFC set to  0.000000
9/22/2011	11:43:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:43:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:43:02 AM	Tube furnace set to 150
9/22/2011	11:43:32 AM	Helium valve closed
9/22/2011	11:43:32 AM	H2 valve closed
9/22/2011	11:43:32 AM	BCl3 valve closed
9/22/2011	11:43:32 AM	PH3 valve closed
9/22/2011	11:43:32 AM	SiCl4 pre valve closed
9/22/2011	11:43:32 AM	SiCl4 post valve closed
9/22/2011	11:43:32 AM	Bypass valve closed
9/22/2011	11:43:32 AM	Bubbler valve closed
9/22/2011	11:43:32 AM	Main Vac valve opened
9/22/2011	11:43:32 AM	Helium MFC set to  0.000000
9/22/2011	11:43:32 AM	H2 MFC set to  0.000000
9/22/2011	11:43:32 AM	BCl3 MFC set to  0.000000
9/22/2011	11:43:32 AM	PHl3 MFC set to  0.000000
9/22/2011	11:43:32 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:43:32 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:43:32 AM	Tube furnace set to 150
9/22/2011	11:44:02 AM	H2 valve closed
9/22/2011	11:44:02 AM	BCl3 valve closed
9/22/2011	11:44:02 AM	PH3 valve closed
9/22/2011	11:44:02 AM	SiCl4 pre valve closed
9/22/2011	11:44:02 AM	SiCl4 post valve closed
9/22/2011	11:44:02 AM	Bypass valve closed
9/22/2011	11:44:02 AM	Bubbler valve closed
9/22/2011	11:44:02 AM	Helium valve opened
9/22/2011	11:44:02 AM	Main Vac valve opened
9/22/2011	11:44:02 AM	Helium MFC set to  20.000000
9/22/2011	11:44:02 AM	H2 MFC set to  0.000000
9/22/2011	11:44:02 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:02 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:02 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:02 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:02 AM	Tube furnace set to 150
9/22/2011	11:44:32 AM	Helium valve closed
9/22/2011	11:44:32 AM	H2 valve closed
9/22/2011	11:44:32 AM	BCl3 valve closed
9/22/2011	11:44:32 AM	PH3 valve closed
9/22/2011	11:44:32 AM	SiCl4 pre valve closed
9/22/2011	11:44:32 AM	SiCl4 post valve closed
9/22/2011	11:44:32 AM	Bypass valve closed
9/22/2011	11:44:32 AM	Bubbler valve closed
9/22/2011	11:44:32 AM	Main Vac valve opened
9/22/2011	11:44:32 AM	Helium MFC set to  0.000000
9/22/2011	11:44:32 AM	H2 MFC set to  0.000000
9/22/2011	11:44:32 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:32 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:32 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:32 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:32 AM	Tube furnace set to 150
9/22/2011	11:44:39 AM	H2 valve closed
9/22/2011	11:44:39 AM	BCl3 valve closed
9/22/2011	11:44:39 AM	PH3 valve closed
9/22/2011	11:44:39 AM	SiCl4 pre valve closed
9/22/2011	11:44:39 AM	SiCl4 post valve closed
9/22/2011	11:44:39 AM	Bypass valve closed
9/22/2011	11:44:39 AM	Bubbler valve closed
9/22/2011	11:44:39 AM	Helium valve opened
9/22/2011	11:44:39 AM	Main Vac valve opened
9/22/2011	11:44:39 AM	Helium MFC set to  20.000000
9/22/2011	11:44:39 AM	H2 MFC set to  0.000000
9/22/2011	11:44:39 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:39 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:39 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:39 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:40 AM	Tube furnace set to 150
9/22/2011	11:44:41 AM	Helium valve closed
9/22/2011	11:44:41 AM	H2 valve closed
9/22/2011	11:44:41 AM	BCl3 valve closed
9/22/2011	11:44:41 AM	PH3 valve closed
9/22/2011	11:44:41 AM	SiCl4 pre valve closed
9/22/2011	11:44:41 AM	SiCl4 post valve closed
9/22/2011	11:44:41 AM	Bypass valve closed
9/22/2011	11:44:41 AM	Bubbler valve closed
9/22/2011	11:44:41 AM	Main Vac valve opened
9/22/2011	11:44:41 AM	Helium MFC set to  0.000000
9/22/2011	11:44:41 AM	H2 MFC set to  0.000000
9/22/2011	11:44:41 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:41 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:41 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:41 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:41 AM	Tube furnace set to 150
9/22/2011	11:44:42 AM	H2 valve closed
9/22/2011	11:44:42 AM	BCl3 valve closed
9/22/2011	11:44:42 AM	PH3 valve closed
9/22/2011	11:44:42 AM	SiCl4 pre valve closed
9/22/2011	11:44:42 AM	SiCl4 post valve closed
9/22/2011	11:44:42 AM	Bypass valve closed
9/22/2011	11:44:42 AM	Bubbler valve closed
9/22/2011	11:44:42 AM	Helium valve opened
9/22/2011	11:44:42 AM	Main Vac valve opened
9/22/2011	11:44:42 AM	Helium MFC set to  20.000000
9/22/2011	11:44:42 AM	H2 MFC set to  0.000000
9/22/2011	11:44:42 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:42 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:42 AM	Tube furnace set to 150
9/22/2011	11:44:42 AM	Helium valve closed
9/22/2011	11:44:42 AM	H2 valve closed
9/22/2011	11:44:42 AM	BCl3 valve closed
9/22/2011	11:44:42 AM	PH3 valve closed
9/22/2011	11:44:42 AM	SiCl4 pre valve closed
9/22/2011	11:44:42 AM	SiCl4 post valve closed
9/22/2011	11:44:42 AM	Bypass valve closed
9/22/2011	11:44:42 AM	Bubbler valve closed
9/22/2011	11:44:42 AM	Main Vac valve opened
9/22/2011	11:44:42 AM	Helium MFC set to  0.000000
9/22/2011	11:44:42 AM	H2 MFC set to  0.000000
9/22/2011	11:44:42 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:42 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:43 AM	Tube furnace set to 150
9/22/2011	11:44:43 AM	H2 valve closed
9/22/2011	11:44:43 AM	BCl3 valve closed
9/22/2011	11:44:43 AM	PH3 valve closed
9/22/2011	11:44:43 AM	SiCl4 pre valve closed
9/22/2011	11:44:43 AM	SiCl4 post valve closed
9/22/2011	11:44:43 AM	Bypass valve closed
9/22/2011	11:44:43 AM	Bubbler valve closed
9/22/2011	11:44:43 AM	Helium valve opened
9/22/2011	11:44:43 AM	Main Vac valve opened
9/22/2011	11:44:43 AM	Helium MFC set to  20.000000
9/22/2011	11:44:43 AM	H2 MFC set to  0.000000
9/22/2011	11:44:43 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:43 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:43 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:43 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:44 AM	Tube furnace set to 150
9/22/2011	11:44:45 AM	Helium valve closed
9/22/2011	11:44:45 AM	H2 valve closed
9/22/2011	11:44:45 AM	BCl3 valve closed
9/22/2011	11:44:45 AM	PH3 valve closed
9/22/2011	11:44:45 AM	SiCl4 pre valve closed
9/22/2011	11:44:45 AM	SiCl4 post valve closed
9/22/2011	11:44:45 AM	Bypass valve closed
9/22/2011	11:44:45 AM	Bubbler valve closed
9/22/2011	11:44:45 AM	Main Vac valve opened
9/22/2011	11:44:45 AM	Helium MFC set to  0.000000
9/22/2011	11:44:45 AM	H2 MFC set to  0.000000
9/22/2011	11:44:45 AM	BCl3 MFC set to  0.000000
9/22/2011	11:44:45 AM	PHl3 MFC set to  0.000000
9/22/2011	11:44:45 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:44:45 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:44:45 AM	Tube furnace set to 150
9/22/2011	11:44:46 AM	Run finished at 11:44 AM
9/22/2011	11:45:54 AM	Main Vac valve closed
9/22/2011	11:46:15 AM	Main Vac valve opened
9/22/2011	11:47:35 AM	Recipe started at 11:47 AM
9/22/2011	11:47:35 AM	Helium valve closed
9/22/2011	11:47:35 AM	H2 valve closed
9/22/2011	11:47:35 AM	BCl3 valve closed
9/22/2011	11:47:35 AM	PH3 valve closed
9/22/2011	11:47:35 AM	SiCl4 pre valve closed
9/22/2011	11:47:35 AM	SiCl4 post valve closed
9/22/2011	11:47:35 AM	Main Vac valve closed
9/22/2011	11:47:35 AM	Bypass valve closed
9/22/2011	11:47:35 AM	Bubbler valve closed
9/22/2011	11:47:35 AM	Helium MFC set to  0.000000
9/22/2011	11:47:35 AM	H2 MFC set to  0.000000
9/22/2011	11:47:35 AM	BCl3 MFC set to  0.000000
9/22/2011	11:47:35 AM	PHl3 MFC set to  0.000000
9/22/2011	11:47:35 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:47:35 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:47:35 AM	Tube furnace set to 0
9/22/2011	11:47:38 AM	Helium valve closed
9/22/2011	11:47:38 AM	BCl3 valve closed
9/22/2011	11:47:38 AM	PH3 valve closed
9/22/2011	11:47:38 AM	SiCl4 pre valve closed
9/22/2011	11:47:38 AM	SiCl4 post valve closed
9/22/2011	11:47:38 AM	Main Vac valve closed
9/22/2011	11:47:38 AM	Bypass valve closed
9/22/2011	11:47:38 AM	Bubbler valve closed
9/22/2011	11:47:38 AM	H2 valve opened
9/22/2011	11:47:38 AM	Helium MFC set to  0.000000
9/22/2011	11:47:38 AM	H2 MFC set to  500.000000
9/22/2011	11:47:38 AM	BCl3 MFC set to  0.000000
9/22/2011	11:47:38 AM	PHl3 MFC set to  0.000000
9/22/2011	11:47:38 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:47:38 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:47:38 AM	Tube furnace set to 0
9/22/2011	11:48:41 AM	Helium valve closed
9/22/2011	11:48:41 AM	BCl3 valve closed
9/22/2011	11:48:41 AM	PH3 valve closed
9/22/2011	11:48:41 AM	SiCl4 pre valve closed
9/22/2011	11:48:41 AM	SiCl4 post valve closed
9/22/2011	11:48:41 AM	Main Vac valve closed
9/22/2011	11:48:41 AM	Bypass valve closed
9/22/2011	11:48:41 AM	H2 valve opened
9/22/2011	11:48:41 AM	Bubbler valve opened
9/22/2011	11:48:41 AM	Helium MFC set to  0.000000
9/22/2011	11:48:41 AM	H2 MFC set to  500.000000
9/22/2011	11:48:41 AM	BCl3 MFC set to  0.000000
9/22/2011	11:48:41 AM	PHl3 MFC set to  0.000000
9/22/2011	11:48:41 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:48:41 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:48:41 AM	Tube furnace set to 0
9/22/2011	11:48:42 AM	Helium valve closed
9/22/2011	11:48:42 AM	BCl3 valve closed
9/22/2011	11:48:42 AM	PH3 valve closed
9/22/2011	11:48:42 AM	SiCl4 pre valve closed
9/22/2011	11:48:42 AM	SiCl4 post valve closed
9/22/2011	11:48:42 AM	Main Vac valve closed
9/22/2011	11:48:42 AM	Bypass valve closed
9/22/2011	11:48:42 AM	H2 valve opened
9/22/2011	11:48:42 AM	Bubbler valve opened
9/22/2011	11:48:42 AM	Helium MFC set to  0.000000
9/22/2011	11:48:42 AM	H2 MFC set to  500.000000
9/22/2011	11:48:42 AM	BCl3 MFC set to  0.000000
9/22/2011	11:48:42 AM	PHl3 MFC set to  0.000000
9/22/2011	11:48:42 AM	SiCl4 MFC set to  0.000000
9/22/2011	11:48:42 AM	Bypass solenoid MFC set to  0.000000
9/22/2011	11:48:42 AM	Tube furnace set to 1000
9/22/2011	12:08:42 PM	Helium valve closed
9/22/2011	12:08:42 PM	PH3 valve closed
9/22/2011	12:08:42 PM	Main Vac valve closed
9/22/2011	12:08:42 PM	Bypass valve closed
9/22/2011	12:08:42 PM	H2 valve opened
9/22/2011	12:08:42 PM	BCl3 valve opened
9/22/2011	12:08:42 PM	SiCl4 pre valve opened
9/22/2011	12:08:42 PM	SiCl4 post valve opened
9/22/2011	12:08:42 PM	Bubbler valve opened
9/22/2011	12:08:42 PM	Helium MFC set to  0.000000
9/22/2011	12:08:42 PM	H2 MFC set to  500.000000
9/22/2011	12:08:42 PM	BCl3 MFC set to  2.500000
9/22/2011	12:08:42 PM	PHl3 MFC set to  0.000000
9/22/2011	12:08:42 PM	SiCl4 MFC set to  50.000000
9/22/2011	12:08:42 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	12:08:42 PM	Tube furnace set to 1000
9/22/2011	12:18:42 PM	Helium valve closed
9/22/2011	12:18:42 PM	BCl3 valve closed
9/22/2011	12:18:42 PM	PH3 valve closed
9/22/2011	12:18:42 PM	SiCl4 pre valve closed
9/22/2011	12:18:42 PM	SiCl4 post valve closed
9/22/2011	12:18:42 PM	Main Vac valve closed
9/22/2011	12:18:42 PM	Bypass valve closed
9/22/2011	12:18:42 PM	H2 valve opened
9/22/2011	12:18:42 PM	Bubbler valve opened
9/22/2011	12:18:42 PM	Helium MFC set to  0.000000
9/22/2011	12:18:42 PM	H2 MFC set to  500.000000
9/22/2011	12:18:42 PM	BCl3 MFC set to  0.000000
9/22/2011	12:18:42 PM	PHl3 MFC set to  0.000000
9/22/2011	12:18:42 PM	SiCl4 MFC set to  0.000000
9/22/2011	12:18:42 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	12:18:42 PM	Tube furnace set to 750
9/22/2011	12:23:42 PM	H2 valve closed
9/22/2011	12:23:42 PM	BCl3 valve closed
9/22/2011	12:23:42 PM	PH3 valve closed
9/22/2011	12:23:42 PM	SiCl4 pre valve closed
9/22/2011	12:23:42 PM	SiCl4 post valve closed
9/22/2011	12:23:42 PM	Main Vac valve closed
9/22/2011	12:23:42 PM	Bypass valve closed
9/22/2011	12:23:42 PM	Helium valve opened
9/22/2011	12:23:42 PM	Bubbler valve opened
9/22/2011	12:23:42 PM	Helium MFC set to  500.000000
9/22/2011	12:23:42 PM	H2 MFC set to  0.000000
9/22/2011	12:23:42 PM	BCl3 MFC set to  0.000000
9/22/2011	12:23:42 PM	PHl3 MFC set to  0.000000
9/22/2011	12:23:42 PM	SiCl4 MFC set to  0.000000
9/22/2011	12:23:42 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	12:23:43 PM	Tube furnace set to 0
9/22/2011	12:43:43 PM	Helium valve closed
9/22/2011	12:43:43 PM	H2 valve closed
9/22/2011	12:43:43 PM	BCl3 valve closed
9/22/2011	12:43:43 PM	PH3 valve closed
9/22/2011	12:43:43 PM	SiCl4 pre valve closed
9/22/2011	12:43:43 PM	SiCl4 post valve closed
9/22/2011	12:43:43 PM	Main Vac valve closed
9/22/2011	12:43:43 PM	Bypass valve closed
9/22/2011	12:43:43 PM	Bubbler valve closed
9/22/2011	12:43:43 PM	Helium MFC set to  0.000000
9/22/2011	12:43:43 PM	H2 MFC set to  0.000000
9/22/2011	12:43:43 PM	BCl3 MFC set to  0.000000
9/22/2011	12:43:43 PM	PHl3 MFC set to  0.000000
9/22/2011	12:43:43 PM	SiCl4 MFC set to  0.000000
9/22/2011	12:43:43 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	12:43:43 PM	Tube furnace set to 0
9/22/2011	12:43:44 PM	Run finished at 12:43 PM
9/22/2011	2:13:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	2:13:26 PM	Recipe started at 2:13 PM
9/22/2011	2:13:26 PM	Helium valve closed
9/22/2011	2:13:26 PM	H2 valve closed
9/22/2011	2:13:26 PM	BCl3 valve closed
9/22/2011	2:13:26 PM	PH3 valve closed
9/22/2011	2:13:26 PM	SiCl4 pre valve closed
9/22/2011	2:13:26 PM	SiCl4 post valve closed
9/22/2011	2:13:26 PM	Main Vac valve closed
9/22/2011	2:13:26 PM	Bypass valve closed
9/22/2011	2:13:26 PM	Bubbler valve closed
9/22/2011	2:13:26 PM	Helium MFC set to  0.000000
9/22/2011	2:13:26 PM	H2 MFC set to  0.000000
9/22/2011	2:13:26 PM	BCl3 MFC set to  0.000000
9/22/2011	2:13:26 PM	PHl3 MFC set to  0.000000
9/22/2011	2:13:26 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:13:26 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:13:26 PM	Tube furnace set to 0
9/22/2011	2:13:29 PM	H2 valve closed
9/22/2011	2:13:29 PM	BCl3 valve closed
9/22/2011	2:13:29 PM	PH3 valve closed
9/22/2011	2:13:29 PM	SiCl4 pre valve closed
9/22/2011	2:13:29 PM	SiCl4 post valve closed
9/22/2011	2:13:29 PM	Main Vac valve closed
9/22/2011	2:13:29 PM	Bypass valve closed
9/22/2011	2:13:29 PM	Bubbler valve closed
9/22/2011	2:13:29 PM	Helium valve opened
9/22/2011	2:13:29 PM	Helium MFC set to  500.000000
9/22/2011	2:13:29 PM	H2 MFC set to  0.000000
9/22/2011	2:13:29 PM	BCl3 MFC set to  0.000000
9/22/2011	2:13:29 PM	PHl3 MFC set to  0.000000
9/22/2011	2:13:29 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:13:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:13:29 PM	Tube furnace set to 0
9/22/2011	2:13:33 PM	Helium valve closed
9/22/2011	2:13:33 PM	H2 valve closed
9/22/2011	2:13:33 PM	BCl3 valve closed
9/22/2011	2:13:33 PM	PH3 valve closed
9/22/2011	2:13:33 PM	SiCl4 pre valve closed
9/22/2011	2:13:33 PM	SiCl4 post valve closed
9/22/2011	2:13:33 PM	Main Vac valve closed
9/22/2011	2:13:33 PM	Bypass valve closed
9/22/2011	2:13:33 PM	Bubbler valve closed
9/22/2011	2:13:33 PM	Helium MFC set to  0.000000
9/22/2011	2:13:33 PM	H2 MFC set to  0.000000
9/22/2011	2:13:33 PM	BCl3 MFC set to  0.000000
9/22/2011	2:13:33 PM	PHl3 MFC set to  0.000000
9/22/2011	2:13:33 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:13:33 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:13:34 PM	Tube furnace set to 0
9/22/2011	2:13:35 PM	Run finished at 2:13 PM
9/22/2011	2:13:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/22/2011	2:19:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	2:19:04 PM	Recipe started at 2:19 PM
9/22/2011	2:19:04 PM	Helium valve closed
9/22/2011	2:19:04 PM	H2 valve closed
9/22/2011	2:19:04 PM	BCl3 valve closed
9/22/2011	2:19:04 PM	PH3 valve closed
9/22/2011	2:19:04 PM	SiCl4 pre valve closed
9/22/2011	2:19:04 PM	SiCl4 post valve closed
9/22/2011	2:19:04 PM	Main Vac valve closed
9/22/2011	2:19:04 PM	Bubbler valve closed
9/22/2011	2:19:04 PM	Bypass valve opened
9/22/2011	2:19:04 PM	Helium MFC set to  0.000000
9/22/2011	2:19:04 PM	H2 MFC set to  0.000000
9/22/2011	2:19:04 PM	BCl3 MFC set to  0.000000
9/22/2011	2:19:04 PM	PHl3 MFC set to  0.000000
9/22/2011	2:19:04 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:19:04 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:19:04 PM	Tube furnace set to 0
9/22/2011	2:20:12 PM	Helium valve closed
9/22/2011	2:20:12 PM	H2 valve closed
9/22/2011	2:20:12 PM	BCl3 valve closed
9/22/2011	2:20:12 PM	PH3 valve closed
9/22/2011	2:20:12 PM	SiCl4 pre valve closed
9/22/2011	2:20:12 PM	SiCl4 post valve closed
9/22/2011	2:20:12 PM	Main Vac valve closed
9/22/2011	2:20:12 PM	Bubbler valve closed
9/22/2011	2:20:12 PM	Bypass valve opened
9/22/2011	2:20:12 PM	Helium MFC set to  0.000000
9/22/2011	2:20:12 PM	H2 MFC set to  0.000000
9/22/2011	2:20:12 PM	BCl3 MFC set to  0.000000
9/22/2011	2:20:12 PM	PHl3 MFC set to  0.000000
9/22/2011	2:20:12 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:20:12 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:20:12 PM	Tube furnace set to 0
9/22/2011	2:21:12 PM	Helium valve closed
9/22/2011	2:21:12 PM	H2 valve closed
9/22/2011	2:21:12 PM	BCl3 valve closed
9/22/2011	2:21:12 PM	PH3 valve closed
9/22/2011	2:21:12 PM	SiCl4 pre valve closed
9/22/2011	2:21:12 PM	SiCl4 post valve closed
9/22/2011	2:21:12 PM	Bypass valve closed
9/22/2011	2:21:12 PM	Bubbler valve closed
9/22/2011	2:21:12 PM	Main Vac valve opened
9/22/2011	2:21:12 PM	Helium MFC set to  0.000000
9/22/2011	2:21:12 PM	H2 MFC set to  0.000000
9/22/2011	2:21:12 PM	BCl3 MFC set to  0.000000
9/22/2011	2:21:12 PM	PHl3 MFC set to  0.000000
9/22/2011	2:21:12 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:21:12 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:21:12 PM	Tube furnace set to 0
9/22/2011	2:21:13 PM	Run finished at 2:21 PM
9/22/2011	2:21:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	2:22:19 PM	Recipe started at 2:22 PM
9/22/2011	2:22:19 PM	Helium valve closed
9/22/2011	2:22:19 PM	H2 valve closed
9/22/2011	2:22:19 PM	BCl3 valve closed
9/22/2011	2:22:19 PM	PH3 valve closed
9/22/2011	2:22:19 PM	SiCl4 pre valve closed
9/22/2011	2:22:19 PM	SiCl4 post valve closed
9/22/2011	2:22:19 PM	Bypass valve closed
9/22/2011	2:22:19 PM	Bubbler valve closed
9/22/2011	2:22:19 PM	Main Vac valve opened
9/22/2011	2:22:19 PM	Helium MFC set to  0.000000
9/22/2011	2:22:19 PM	H2 MFC set to  0.000000
9/22/2011	2:22:19 PM	BCl3 MFC set to  0.000000
9/22/2011	2:22:19 PM	PHl3 MFC set to  0.000000
9/22/2011	2:22:19 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:22:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:22:19 PM	Tube furnace set to 150
9/22/2011	2:22:49 PM	H2 valve closed
9/22/2011	2:22:49 PM	BCl3 valve closed
9/22/2011	2:22:49 PM	PH3 valve closed
9/22/2011	2:22:49 PM	SiCl4 pre valve closed
9/22/2011	2:22:49 PM	SiCl4 post valve closed
9/22/2011	2:22:49 PM	Bypass valve closed
9/22/2011	2:22:49 PM	Bubbler valve closed
9/22/2011	2:22:49 PM	Helium valve opened
9/22/2011	2:22:49 PM	Main Vac valve opened
9/22/2011	2:22:49 PM	Helium MFC set to  20.000000
9/22/2011	2:22:49 PM	H2 MFC set to  0.000000
9/22/2011	2:22:49 PM	BCl3 MFC set to  0.000000
9/22/2011	2:22:49 PM	PHl3 MFC set to  0.000000
9/22/2011	2:22:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:22:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:22:49 PM	Tube furnace set to 150
9/22/2011	2:23:19 PM	Helium valve closed
9/22/2011	2:23:19 PM	H2 valve closed
9/22/2011	2:23:19 PM	BCl3 valve closed
9/22/2011	2:23:19 PM	PH3 valve closed
9/22/2011	2:23:19 PM	SiCl4 pre valve closed
9/22/2011	2:23:19 PM	SiCl4 post valve closed
9/22/2011	2:23:19 PM	Bypass valve closed
9/22/2011	2:23:19 PM	Bubbler valve closed
9/22/2011	2:23:19 PM	Main Vac valve opened
9/22/2011	2:23:19 PM	Helium MFC set to  0.000000
9/22/2011	2:23:19 PM	H2 MFC set to  0.000000
9/22/2011	2:23:19 PM	BCl3 MFC set to  0.000000
9/22/2011	2:23:19 PM	PHl3 MFC set to  0.000000
9/22/2011	2:23:19 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:23:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:23:19 PM	Tube furnace set to 150
9/22/2011	2:23:49 PM	H2 valve closed
9/22/2011	2:23:49 PM	BCl3 valve closed
9/22/2011	2:23:49 PM	PH3 valve closed
9/22/2011	2:23:49 PM	SiCl4 pre valve closed
9/22/2011	2:23:49 PM	SiCl4 post valve closed
9/22/2011	2:23:49 PM	Bypass valve closed
9/22/2011	2:23:49 PM	Bubbler valve closed
9/22/2011	2:23:49 PM	Helium valve opened
9/22/2011	2:23:49 PM	Main Vac valve opened
9/22/2011	2:23:49 PM	Helium MFC set to  20.000000
9/22/2011	2:23:49 PM	H2 MFC set to  0.000000
9/22/2011	2:23:49 PM	BCl3 MFC set to  0.000000
9/22/2011	2:23:49 PM	PHl3 MFC set to  0.000000
9/22/2011	2:23:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:23:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:23:49 PM	Tube furnace set to 150
9/22/2011	2:24:19 PM	Helium valve closed
9/22/2011	2:24:19 PM	H2 valve closed
9/22/2011	2:24:19 PM	BCl3 valve closed
9/22/2011	2:24:19 PM	PH3 valve closed
9/22/2011	2:24:19 PM	SiCl4 pre valve closed
9/22/2011	2:24:19 PM	SiCl4 post valve closed
9/22/2011	2:24:19 PM	Bypass valve closed
9/22/2011	2:24:19 PM	Bubbler valve closed
9/22/2011	2:24:19 PM	Main Vac valve opened
9/22/2011	2:24:19 PM	Helium MFC set to  0.000000
9/22/2011	2:24:19 PM	H2 MFC set to  0.000000
9/22/2011	2:24:19 PM	BCl3 MFC set to  0.000000
9/22/2011	2:24:19 PM	PHl3 MFC set to  0.000000
9/22/2011	2:24:19 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:24:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:24:20 PM	Tube furnace set to 150
9/22/2011	2:24:50 PM	H2 valve closed
9/22/2011	2:24:50 PM	BCl3 valve closed
9/22/2011	2:24:50 PM	PH3 valve closed
9/22/2011	2:24:50 PM	SiCl4 pre valve closed
9/22/2011	2:24:50 PM	SiCl4 post valve closed
9/22/2011	2:24:50 PM	Bypass valve closed
9/22/2011	2:24:50 PM	Bubbler valve closed
9/22/2011	2:24:50 PM	Helium valve opened
9/22/2011	2:24:50 PM	Main Vac valve opened
9/22/2011	2:24:50 PM	Helium MFC set to  20.000000
9/22/2011	2:24:50 PM	H2 MFC set to  0.000000
9/22/2011	2:24:50 PM	BCl3 MFC set to  0.000000
9/22/2011	2:24:50 PM	PHl3 MFC set to  0.000000
9/22/2011	2:24:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:24:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:24:50 PM	Tube furnace set to 150
9/22/2011	2:25:20 PM	Helium valve closed
9/22/2011	2:25:20 PM	H2 valve closed
9/22/2011	2:25:20 PM	BCl3 valve closed
9/22/2011	2:25:20 PM	PH3 valve closed
9/22/2011	2:25:20 PM	SiCl4 pre valve closed
9/22/2011	2:25:20 PM	SiCl4 post valve closed
9/22/2011	2:25:20 PM	Bypass valve closed
9/22/2011	2:25:20 PM	Bubbler valve closed
9/22/2011	2:25:20 PM	Main Vac valve opened
9/22/2011	2:25:20 PM	Helium MFC set to  0.000000
9/22/2011	2:25:20 PM	H2 MFC set to  0.000000
9/22/2011	2:25:20 PM	BCl3 MFC set to  0.000000
9/22/2011	2:25:20 PM	PHl3 MFC set to  0.000000
9/22/2011	2:25:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:25:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:25:20 PM	Tube furnace set to 150
9/22/2011	2:25:50 PM	H2 valve closed
9/22/2011	2:25:50 PM	BCl3 valve closed
9/22/2011	2:25:50 PM	PH3 valve closed
9/22/2011	2:25:50 PM	SiCl4 pre valve closed
9/22/2011	2:25:50 PM	SiCl4 post valve closed
9/22/2011	2:25:50 PM	Bypass valve closed
9/22/2011	2:25:50 PM	Bubbler valve closed
9/22/2011	2:25:50 PM	Helium valve opened
9/22/2011	2:25:50 PM	Main Vac valve opened
9/22/2011	2:25:50 PM	Helium MFC set to  20.000000
9/22/2011	2:25:50 PM	H2 MFC set to  0.000000
9/22/2011	2:25:50 PM	BCl3 MFC set to  0.000000
9/22/2011	2:25:50 PM	PHl3 MFC set to  0.000000
9/22/2011	2:25:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:25:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:25:50 PM	Tube furnace set to 150
9/22/2011	2:26:20 PM	Helium valve closed
9/22/2011	2:26:20 PM	H2 valve closed
9/22/2011	2:26:20 PM	BCl3 valve closed
9/22/2011	2:26:20 PM	PH3 valve closed
9/22/2011	2:26:20 PM	SiCl4 pre valve closed
9/22/2011	2:26:20 PM	SiCl4 post valve closed
9/22/2011	2:26:20 PM	Bypass valve closed
9/22/2011	2:26:20 PM	Bubbler valve closed
9/22/2011	2:26:20 PM	Main Vac valve opened
9/22/2011	2:26:20 PM	Helium MFC set to  0.000000
9/22/2011	2:26:20 PM	H2 MFC set to  0.000000
9/22/2011	2:26:20 PM	BCl3 MFC set to  0.000000
9/22/2011	2:26:20 PM	PHl3 MFC set to  0.000000
9/22/2011	2:26:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:26:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:26:20 PM	Tube furnace set to 150
9/22/2011	2:26:50 PM	H2 valve closed
9/22/2011	2:26:50 PM	BCl3 valve closed
9/22/2011	2:26:50 PM	PH3 valve closed
9/22/2011	2:26:50 PM	SiCl4 pre valve closed
9/22/2011	2:26:50 PM	SiCl4 post valve closed
9/22/2011	2:26:50 PM	Bypass valve closed
9/22/2011	2:26:50 PM	Bubbler valve closed
9/22/2011	2:26:50 PM	Helium valve opened
9/22/2011	2:26:50 PM	Main Vac valve opened
9/22/2011	2:26:50 PM	Helium MFC set to  20.000000
9/22/2011	2:26:50 PM	H2 MFC set to  0.000000
9/22/2011	2:26:50 PM	BCl3 MFC set to  0.000000
9/22/2011	2:26:50 PM	PHl3 MFC set to  0.000000
9/22/2011	2:26:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:26:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:26:51 PM	Tube furnace set to 150
9/22/2011	2:27:21 PM	Helium valve closed
9/22/2011	2:27:21 PM	H2 valve closed
9/22/2011	2:27:21 PM	BCl3 valve closed
9/22/2011	2:27:21 PM	PH3 valve closed
9/22/2011	2:27:21 PM	SiCl4 pre valve closed
9/22/2011	2:27:21 PM	SiCl4 post valve closed
9/22/2011	2:27:21 PM	Bypass valve closed
9/22/2011	2:27:21 PM	Bubbler valve closed
9/22/2011	2:27:21 PM	Main Vac valve opened
9/22/2011	2:27:21 PM	Helium MFC set to  0.000000
9/22/2011	2:27:21 PM	H2 MFC set to  0.000000
9/22/2011	2:27:21 PM	BCl3 MFC set to  0.000000
9/22/2011	2:27:21 PM	PHl3 MFC set to  0.000000
9/22/2011	2:27:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:27:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:27:21 PM	Tube furnace set to 150
9/22/2011	2:27:51 PM	H2 valve closed
9/22/2011	2:27:51 PM	BCl3 valve closed
9/22/2011	2:27:51 PM	PH3 valve closed
9/22/2011	2:27:51 PM	SiCl4 pre valve closed
9/22/2011	2:27:51 PM	SiCl4 post valve closed
9/22/2011	2:27:51 PM	Bypass valve closed
9/22/2011	2:27:51 PM	Bubbler valve closed
9/22/2011	2:27:51 PM	Helium valve opened
9/22/2011	2:27:51 PM	Main Vac valve opened
9/22/2011	2:27:51 PM	Helium MFC set to  20.000000
9/22/2011	2:27:51 PM	H2 MFC set to  0.000000
9/22/2011	2:27:51 PM	BCl3 MFC set to  0.000000
9/22/2011	2:27:51 PM	PHl3 MFC set to  0.000000
9/22/2011	2:27:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:27:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:27:51 PM	Tube furnace set to 150
9/22/2011	2:28:21 PM	Helium valve closed
9/22/2011	2:28:21 PM	H2 valve closed
9/22/2011	2:28:21 PM	BCl3 valve closed
9/22/2011	2:28:21 PM	PH3 valve closed
9/22/2011	2:28:21 PM	SiCl4 pre valve closed
9/22/2011	2:28:21 PM	SiCl4 post valve closed
9/22/2011	2:28:21 PM	Bypass valve closed
9/22/2011	2:28:21 PM	Bubbler valve closed
9/22/2011	2:28:21 PM	Main Vac valve opened
9/22/2011	2:28:21 PM	Helium MFC set to  0.000000
9/22/2011	2:28:21 PM	H2 MFC set to  0.000000
9/22/2011	2:28:21 PM	BCl3 MFC set to  0.000000
9/22/2011	2:28:21 PM	PHl3 MFC set to  0.000000
9/22/2011	2:28:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:28:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:28:21 PM	Tube furnace set to 150
9/22/2011	2:28:51 PM	H2 valve closed
9/22/2011	2:28:51 PM	BCl3 valve closed
9/22/2011	2:28:51 PM	PH3 valve closed
9/22/2011	2:28:51 PM	SiCl4 pre valve closed
9/22/2011	2:28:51 PM	SiCl4 post valve closed
9/22/2011	2:28:51 PM	Bypass valve closed
9/22/2011	2:28:51 PM	Bubbler valve closed
9/22/2011	2:28:51 PM	Helium valve opened
9/22/2011	2:28:51 PM	Main Vac valve opened
9/22/2011	2:28:51 PM	Helium MFC set to  20.000000
9/22/2011	2:28:51 PM	H2 MFC set to  0.000000
9/22/2011	2:28:51 PM	BCl3 MFC set to  0.000000
9/22/2011	2:28:51 PM	PHl3 MFC set to  0.000000
9/22/2011	2:28:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:28:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:28:51 PM	Tube furnace set to 150
9/22/2011	2:29:21 PM	Helium valve closed
9/22/2011	2:29:21 PM	H2 valve closed
9/22/2011	2:29:21 PM	BCl3 valve closed
9/22/2011	2:29:21 PM	PH3 valve closed
9/22/2011	2:29:21 PM	SiCl4 pre valve closed
9/22/2011	2:29:21 PM	SiCl4 post valve closed
9/22/2011	2:29:21 PM	Bypass valve closed
9/22/2011	2:29:21 PM	Bubbler valve closed
9/22/2011	2:29:21 PM	Main Vac valve opened
9/22/2011	2:29:21 PM	Helium MFC set to  0.000000
9/22/2011	2:29:21 PM	H2 MFC set to  0.000000
9/22/2011	2:29:21 PM	BCl3 MFC set to  0.000000
9/22/2011	2:29:21 PM	PHl3 MFC set to  0.000000
9/22/2011	2:29:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:29:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:29:22 PM	Tube furnace set to 150
9/22/2011	2:29:52 PM	H2 valve closed
9/22/2011	2:29:52 PM	BCl3 valve closed
9/22/2011	2:29:52 PM	PH3 valve closed
9/22/2011	2:29:52 PM	SiCl4 pre valve closed
9/22/2011	2:29:52 PM	SiCl4 post valve closed
9/22/2011	2:29:52 PM	Bypass valve closed
9/22/2011	2:29:52 PM	Bubbler valve closed
9/22/2011	2:29:52 PM	Helium valve opened
9/22/2011	2:29:52 PM	Main Vac valve opened
9/22/2011	2:29:52 PM	Helium MFC set to  20.000000
9/22/2011	2:29:52 PM	H2 MFC set to  0.000000
9/22/2011	2:29:52 PM	BCl3 MFC set to  0.000000
9/22/2011	2:29:52 PM	PHl3 MFC set to  0.000000
9/22/2011	2:29:52 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:29:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:29:52 PM	Tube furnace set to 150
9/22/2011	2:30:22 PM	Helium valve closed
9/22/2011	2:30:22 PM	H2 valve closed
9/22/2011	2:30:22 PM	BCl3 valve closed
9/22/2011	2:30:22 PM	PH3 valve closed
9/22/2011	2:30:22 PM	SiCl4 pre valve closed
9/22/2011	2:30:22 PM	SiCl4 post valve closed
9/22/2011	2:30:22 PM	Bypass valve closed
9/22/2011	2:30:22 PM	Bubbler valve closed
9/22/2011	2:30:22 PM	Main Vac valve opened
9/22/2011	2:30:22 PM	Helium MFC set to  0.000000
9/22/2011	2:30:22 PM	H2 MFC set to  0.000000
9/22/2011	2:30:22 PM	BCl3 MFC set to  0.000000
9/22/2011	2:30:22 PM	PHl3 MFC set to  0.000000
9/22/2011	2:30:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:30:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:30:22 PM	Tube furnace set to 150
9/22/2011	2:30:52 PM	H2 valve closed
9/22/2011	2:30:52 PM	BCl3 valve closed
9/22/2011	2:30:52 PM	PH3 valve closed
9/22/2011	2:30:52 PM	SiCl4 pre valve closed
9/22/2011	2:30:52 PM	SiCl4 post valve closed
9/22/2011	2:30:52 PM	Bypass valve closed
9/22/2011	2:30:52 PM	Bubbler valve closed
9/22/2011	2:30:52 PM	Helium valve opened
9/22/2011	2:30:52 PM	Main Vac valve opened
9/22/2011	2:30:52 PM	Helium MFC set to  20.000000
9/22/2011	2:30:52 PM	H2 MFC set to  0.000000
9/22/2011	2:30:52 PM	BCl3 MFC set to  0.000000
9/22/2011	2:30:52 PM	PHl3 MFC set to  0.000000
9/22/2011	2:30:52 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:30:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:30:52 PM	Tube furnace set to 150
9/22/2011	2:31:22 PM	Helium valve closed
9/22/2011	2:31:22 PM	H2 valve closed
9/22/2011	2:31:22 PM	BCl3 valve closed
9/22/2011	2:31:22 PM	PH3 valve closed
9/22/2011	2:31:22 PM	SiCl4 pre valve closed
9/22/2011	2:31:22 PM	SiCl4 post valve closed
9/22/2011	2:31:22 PM	Bypass valve closed
9/22/2011	2:31:22 PM	Bubbler valve closed
9/22/2011	2:31:22 PM	Main Vac valve opened
9/22/2011	2:31:22 PM	Helium MFC set to  0.000000
9/22/2011	2:31:22 PM	H2 MFC set to  0.000000
9/22/2011	2:31:22 PM	BCl3 MFC set to  0.000000
9/22/2011	2:31:22 PM	PHl3 MFC set to  0.000000
9/22/2011	2:31:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:31:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:31:22 PM	Tube furnace set to 150
9/22/2011	2:31:52 PM	H2 valve closed
9/22/2011	2:31:52 PM	BCl3 valve closed
9/22/2011	2:31:52 PM	PH3 valve closed
9/22/2011	2:31:52 PM	SiCl4 pre valve closed
9/22/2011	2:31:53 PM	SiCl4 post valve closed
9/22/2011	2:31:53 PM	Bypass valve closed
9/22/2011	2:31:53 PM	Bubbler valve closed
9/22/2011	2:31:53 PM	Helium valve opened
9/22/2011	2:31:53 PM	Main Vac valve opened
9/22/2011	2:31:53 PM	Helium MFC set to  20.000000
9/22/2011	2:31:53 PM	H2 MFC set to  0.000000
9/22/2011	2:31:53 PM	BCl3 MFC set to  0.000000
9/22/2011	2:31:53 PM	PHl3 MFC set to  0.000000
9/22/2011	2:31:53 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:31:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:31:53 PM	Tube furnace set to 150
9/22/2011	2:32:23 PM	Helium valve closed
9/22/2011	2:32:23 PM	H2 valve closed
9/22/2011	2:32:23 PM	BCl3 valve closed
9/22/2011	2:32:23 PM	PH3 valve closed
9/22/2011	2:32:23 PM	SiCl4 pre valve closed
9/22/2011	2:32:23 PM	SiCl4 post valve closed
9/22/2011	2:32:23 PM	Bypass valve closed
9/22/2011	2:32:23 PM	Bubbler valve closed
9/22/2011	2:32:23 PM	Main Vac valve opened
9/22/2011	2:32:23 PM	Helium MFC set to  0.000000
9/22/2011	2:32:23 PM	H2 MFC set to  0.000000
9/22/2011	2:32:23 PM	BCl3 MFC set to  0.000000
9/22/2011	2:32:23 PM	PHl3 MFC set to  0.000000
9/22/2011	2:32:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:32:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:32:23 PM	Tube furnace set to 150
9/22/2011	2:32:24 PM	Run finished at 2:32 PM
9/22/2011	2:35:16 PM	Recipe started at 2:35 PM
9/22/2011	2:35:16 PM	Helium valve closed
9/22/2011	2:35:16 PM	H2 valve closed
9/22/2011	2:35:16 PM	BCl3 valve closed
9/22/2011	2:35:16 PM	PH3 valve closed
9/22/2011	2:35:16 PM	SiCl4 pre valve closed
9/22/2011	2:35:16 PM	SiCl4 post valve closed
9/22/2011	2:35:16 PM	Bypass valve closed
9/22/2011	2:35:16 PM	Bubbler valve closed
9/22/2011	2:35:16 PM	Main Vac valve opened
9/22/2011	2:35:16 PM	Helium MFC set to  0.000000
9/22/2011	2:35:16 PM	H2 MFC set to  0.000000
9/22/2011	2:35:16 PM	BCl3 MFC set to  0.000000
9/22/2011	2:35:16 PM	PHl3 MFC set to  0.000000
9/22/2011	2:35:16 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:35:16 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:35:16 PM	Tube furnace set to 150
9/22/2011	2:35:46 PM	H2 valve closed
9/22/2011	2:35:46 PM	BCl3 valve closed
9/22/2011	2:35:46 PM	PH3 valve closed
9/22/2011	2:35:46 PM	SiCl4 pre valve closed
9/22/2011	2:35:46 PM	SiCl4 post valve closed
9/22/2011	2:35:46 PM	Bypass valve closed
9/22/2011	2:35:46 PM	Bubbler valve closed
9/22/2011	2:35:46 PM	Helium valve opened
9/22/2011	2:35:46 PM	Main Vac valve opened
9/22/2011	2:35:46 PM	Helium MFC set to  20.000000
9/22/2011	2:35:46 PM	H2 MFC set to  0.000000
9/22/2011	2:35:46 PM	BCl3 MFC set to  0.000000
9/22/2011	2:35:46 PM	PHl3 MFC set to  0.000000
9/22/2011	2:35:46 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:35:46 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:35:47 PM	Tube furnace set to 150
9/22/2011	2:36:17 PM	Helium valve closed
9/22/2011	2:36:17 PM	H2 valve closed
9/22/2011	2:36:17 PM	BCl3 valve closed
9/22/2011	2:36:17 PM	PH3 valve closed
9/22/2011	2:36:17 PM	SiCl4 pre valve closed
9/22/2011	2:36:17 PM	SiCl4 post valve closed
9/22/2011	2:36:17 PM	Bypass valve closed
9/22/2011	2:36:17 PM	Bubbler valve closed
9/22/2011	2:36:17 PM	Main Vac valve opened
9/22/2011	2:36:17 PM	Helium MFC set to  0.000000
9/22/2011	2:36:17 PM	H2 MFC set to  0.000000
9/22/2011	2:36:17 PM	BCl3 MFC set to  0.000000
9/22/2011	2:36:17 PM	PHl3 MFC set to  0.000000
9/22/2011	2:36:17 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:36:17 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:36:17 PM	Tube furnace set to 150
9/22/2011	2:36:47 PM	H2 valve closed
9/22/2011	2:36:47 PM	BCl3 valve closed
9/22/2011	2:36:47 PM	PH3 valve closed
9/22/2011	2:36:47 PM	SiCl4 pre valve closed
9/22/2011	2:36:47 PM	SiCl4 post valve closed
9/22/2011	2:36:47 PM	Bypass valve closed
9/22/2011	2:36:47 PM	Bubbler valve closed
9/22/2011	2:36:47 PM	Helium valve opened
9/22/2011	2:36:47 PM	Main Vac valve opened
9/22/2011	2:36:47 PM	Helium MFC set to  20.000000
9/22/2011	2:36:47 PM	H2 MFC set to  0.000000
9/22/2011	2:36:47 PM	BCl3 MFC set to  0.000000
9/22/2011	2:36:47 PM	PHl3 MFC set to  0.000000
9/22/2011	2:36:47 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:36:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:36:47 PM	Tube furnace set to 150
9/22/2011	2:37:17 PM	Helium valve closed
9/22/2011	2:37:17 PM	H2 valve closed
9/22/2011	2:37:17 PM	BCl3 valve closed
9/22/2011	2:37:17 PM	PH3 valve closed
9/22/2011	2:37:17 PM	SiCl4 pre valve closed
9/22/2011	2:37:17 PM	SiCl4 post valve closed
9/22/2011	2:37:17 PM	Bypass valve closed
9/22/2011	2:37:17 PM	Bubbler valve closed
9/22/2011	2:37:17 PM	Main Vac valve opened
9/22/2011	2:37:17 PM	Helium MFC set to  0.000000
9/22/2011	2:37:17 PM	H2 MFC set to  0.000000
9/22/2011	2:37:17 PM	BCl3 MFC set to  0.000000
9/22/2011	2:37:17 PM	PHl3 MFC set to  0.000000
9/22/2011	2:37:17 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:37:17 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:37:17 PM	Tube furnace set to 150
9/22/2011	2:37:47 PM	H2 valve closed
9/22/2011	2:37:47 PM	BCl3 valve closed
9/22/2011	2:37:47 PM	PH3 valve closed
9/22/2011	2:37:47 PM	SiCl4 pre valve closed
9/22/2011	2:37:47 PM	SiCl4 post valve closed
9/22/2011	2:37:47 PM	Bypass valve closed
9/22/2011	2:37:47 PM	Bubbler valve closed
9/22/2011	2:37:47 PM	Helium valve opened
9/22/2011	2:37:47 PM	Main Vac valve opened
9/22/2011	2:37:47 PM	Helium MFC set to  20.000000
9/22/2011	2:37:47 PM	H2 MFC set to  0.000000
9/22/2011	2:37:47 PM	BCl3 MFC set to  0.000000
9/22/2011	2:37:47 PM	PHl3 MFC set to  0.000000
9/22/2011	2:37:47 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:37:47 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:37:47 PM	Tube furnace set to 150
9/22/2011	2:38:17 PM	Helium valve closed
9/22/2011	2:38:17 PM	H2 valve closed
9/22/2011	2:38:17 PM	BCl3 valve closed
9/22/2011	2:38:17 PM	PH3 valve closed
9/22/2011	2:38:17 PM	SiCl4 pre valve closed
9/22/2011	2:38:17 PM	SiCl4 post valve closed
9/22/2011	2:38:17 PM	Bypass valve closed
9/22/2011	2:38:17 PM	Bubbler valve closed
9/22/2011	2:38:17 PM	Main Vac valve opened
9/22/2011	2:38:17 PM	Helium MFC set to  0.000000
9/22/2011	2:38:18 PM	H2 MFC set to  0.000000
9/22/2011	2:38:18 PM	BCl3 MFC set to  0.000000
9/22/2011	2:38:18 PM	PHl3 MFC set to  0.000000
9/22/2011	2:38:18 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:38:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:38:18 PM	Tube furnace set to 150
9/22/2011	2:38:48 PM	H2 valve closed
9/22/2011	2:38:48 PM	BCl3 valve closed
9/22/2011	2:38:48 PM	PH3 valve closed
9/22/2011	2:38:48 PM	SiCl4 pre valve closed
9/22/2011	2:38:48 PM	SiCl4 post valve closed
9/22/2011	2:38:48 PM	Bypass valve closed
9/22/2011	2:38:48 PM	Bubbler valve closed
9/22/2011	2:38:48 PM	Helium valve opened
9/22/2011	2:38:48 PM	Main Vac valve opened
9/22/2011	2:38:48 PM	Helium MFC set to  20.000000
9/22/2011	2:38:48 PM	H2 MFC set to  0.000000
9/22/2011	2:38:48 PM	BCl3 MFC set to  0.000000
9/22/2011	2:38:48 PM	PHl3 MFC set to  0.000000
9/22/2011	2:38:48 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:38:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:38:48 PM	Tube furnace set to 150
9/22/2011	2:39:18 PM	Helium valve closed
9/22/2011	2:39:18 PM	H2 valve closed
9/22/2011	2:39:18 PM	BCl3 valve closed
9/22/2011	2:39:18 PM	PH3 valve closed
9/22/2011	2:39:18 PM	SiCl4 pre valve closed
9/22/2011	2:39:18 PM	SiCl4 post valve closed
9/22/2011	2:39:18 PM	Bypass valve closed
9/22/2011	2:39:18 PM	Bubbler valve closed
9/22/2011	2:39:18 PM	Main Vac valve opened
9/22/2011	2:39:18 PM	Helium MFC set to  0.000000
9/22/2011	2:39:18 PM	H2 MFC set to  0.000000
9/22/2011	2:39:18 PM	BCl3 MFC set to  0.000000
9/22/2011	2:39:18 PM	PHl3 MFC set to  0.000000
9/22/2011	2:39:18 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:39:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:39:18 PM	Tube furnace set to 150
9/22/2011	2:39:48 PM	H2 valve closed
9/22/2011	2:39:48 PM	BCl3 valve closed
9/22/2011	2:39:48 PM	PH3 valve closed
9/22/2011	2:39:48 PM	SiCl4 pre valve closed
9/22/2011	2:39:48 PM	SiCl4 post valve closed
9/22/2011	2:39:48 PM	Bypass valve closed
9/22/2011	2:39:48 PM	Bubbler valve closed
9/22/2011	2:39:48 PM	Helium valve opened
9/22/2011	2:39:48 PM	Main Vac valve opened
9/22/2011	2:39:48 PM	Helium MFC set to  20.000000
9/22/2011	2:39:48 PM	H2 MFC set to  0.000000
9/22/2011	2:39:48 PM	BCl3 MFC set to  0.000000
9/22/2011	2:39:48 PM	PHl3 MFC set to  0.000000
9/22/2011	2:39:48 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:39:48 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:39:48 PM	Tube furnace set to 150
9/22/2011	2:40:18 PM	Helium valve closed
9/22/2011	2:40:18 PM	H2 valve closed
9/22/2011	2:40:18 PM	BCl3 valve closed
9/22/2011	2:40:18 PM	PH3 valve closed
9/22/2011	2:40:18 PM	SiCl4 pre valve closed
9/22/2011	2:40:18 PM	SiCl4 post valve closed
9/22/2011	2:40:18 PM	Bypass valve closed
9/22/2011	2:40:18 PM	Bubbler valve closed
9/22/2011	2:40:18 PM	Main Vac valve opened
9/22/2011	2:40:18 PM	Helium MFC set to  0.000000
9/22/2011	2:40:18 PM	H2 MFC set to  0.000000
9/22/2011	2:40:18 PM	BCl3 MFC set to  0.000000
9/22/2011	2:40:18 PM	PHl3 MFC set to  0.000000
9/22/2011	2:40:18 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:40:18 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:40:18 PM	Tube furnace set to 150
9/22/2011	2:40:49 PM	H2 valve closed
9/22/2011	2:40:49 PM	BCl3 valve closed
9/22/2011	2:40:49 PM	PH3 valve closed
9/22/2011	2:40:49 PM	SiCl4 pre valve closed
9/22/2011	2:40:49 PM	SiCl4 post valve closed
9/22/2011	2:40:49 PM	Bypass valve closed
9/22/2011	2:40:49 PM	Bubbler valve closed
9/22/2011	2:40:49 PM	Helium valve opened
9/22/2011	2:40:49 PM	Main Vac valve opened
9/22/2011	2:40:49 PM	Helium MFC set to  20.000000
9/22/2011	2:40:49 PM	H2 MFC set to  0.000000
9/22/2011	2:40:49 PM	BCl3 MFC set to  0.000000
9/22/2011	2:40:49 PM	PHl3 MFC set to  0.000000
9/22/2011	2:40:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:40:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:40:49 PM	Tube furnace set to 150
9/22/2011	2:41:19 PM	Helium valve closed
9/22/2011	2:41:19 PM	H2 valve closed
9/22/2011	2:41:19 PM	BCl3 valve closed
9/22/2011	2:41:19 PM	PH3 valve closed
9/22/2011	2:41:19 PM	SiCl4 pre valve closed
9/22/2011	2:41:19 PM	SiCl4 post valve closed
9/22/2011	2:41:19 PM	Bypass valve closed
9/22/2011	2:41:19 PM	Bubbler valve closed
9/22/2011	2:41:19 PM	Main Vac valve opened
9/22/2011	2:41:19 PM	Helium MFC set to  0.000000
9/22/2011	2:41:19 PM	H2 MFC set to  0.000000
9/22/2011	2:41:19 PM	BCl3 MFC set to  0.000000
9/22/2011	2:41:19 PM	PHl3 MFC set to  0.000000
9/22/2011	2:41:19 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:41:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:41:19 PM	Tube furnace set to 150
9/22/2011	2:41:49 PM	H2 valve closed
9/22/2011	2:41:49 PM	BCl3 valve closed
9/22/2011	2:41:49 PM	PH3 valve closed
9/22/2011	2:41:49 PM	SiCl4 pre valve closed
9/22/2011	2:41:49 PM	SiCl4 post valve closed
9/22/2011	2:41:49 PM	Bypass valve closed
9/22/2011	2:41:49 PM	Bubbler valve closed
9/22/2011	2:41:49 PM	Helium valve opened
9/22/2011	2:41:49 PM	Main Vac valve opened
9/22/2011	2:41:49 PM	Helium MFC set to  20.000000
9/22/2011	2:41:49 PM	H2 MFC set to  0.000000
9/22/2011	2:41:49 PM	BCl3 MFC set to  0.000000
9/22/2011	2:41:49 PM	PHl3 MFC set to  0.000000
9/22/2011	2:41:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:41:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:41:49 PM	Tube furnace set to 150
9/22/2011	2:42:19 PM	Helium valve closed
9/22/2011	2:42:19 PM	H2 valve closed
9/22/2011	2:42:19 PM	BCl3 valve closed
9/22/2011	2:42:19 PM	PH3 valve closed
9/22/2011	2:42:19 PM	SiCl4 pre valve closed
9/22/2011	2:42:19 PM	SiCl4 post valve closed
9/22/2011	2:42:19 PM	Bypass valve closed
9/22/2011	2:42:19 PM	Bubbler valve closed
9/22/2011	2:42:19 PM	Main Vac valve opened
9/22/2011	2:42:19 PM	Helium MFC set to  0.000000
9/22/2011	2:42:19 PM	H2 MFC set to  0.000000
9/22/2011	2:42:19 PM	BCl3 MFC set to  0.000000
9/22/2011	2:42:19 PM	PHl3 MFC set to  0.000000
9/22/2011	2:42:19 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:42:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:42:19 PM	Tube furnace set to 150
9/22/2011	2:42:49 PM	H2 valve closed
9/22/2011	2:42:49 PM	BCl3 valve closed
9/22/2011	2:42:49 PM	PH3 valve closed
9/22/2011	2:42:49 PM	SiCl4 pre valve closed
9/22/2011	2:42:49 PM	SiCl4 post valve closed
9/22/2011	2:42:49 PM	Bypass valve closed
9/22/2011	2:42:49 PM	Bubbler valve closed
9/22/2011	2:42:49 PM	Helium valve opened
9/22/2011	2:42:49 PM	Main Vac valve opened
9/22/2011	2:42:49 PM	Helium MFC set to  20.000000
9/22/2011	2:42:49 PM	H2 MFC set to  0.000000
9/22/2011	2:42:49 PM	BCl3 MFC set to  0.000000
9/22/2011	2:42:49 PM	PHl3 MFC set to  0.000000
9/22/2011	2:42:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:42:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:42:50 PM	Tube furnace set to 150
9/22/2011	2:43:20 PM	Helium valve closed
9/22/2011	2:43:20 PM	H2 valve closed
9/22/2011	2:43:20 PM	BCl3 valve closed
9/22/2011	2:43:20 PM	PH3 valve closed
9/22/2011	2:43:20 PM	SiCl4 pre valve closed
9/22/2011	2:43:20 PM	SiCl4 post valve closed
9/22/2011	2:43:20 PM	Bypass valve closed
9/22/2011	2:43:20 PM	Bubbler valve closed
9/22/2011	2:43:20 PM	Main Vac valve opened
9/22/2011	2:43:20 PM	Helium MFC set to  0.000000
9/22/2011	2:43:20 PM	H2 MFC set to  0.000000
9/22/2011	2:43:20 PM	BCl3 MFC set to  0.000000
9/22/2011	2:43:20 PM	PHl3 MFC set to  0.000000
9/22/2011	2:43:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:43:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:43:20 PM	Tube furnace set to 150
9/22/2011	2:43:50 PM	H2 valve closed
9/22/2011	2:43:50 PM	BCl3 valve closed
9/22/2011	2:43:50 PM	PH3 valve closed
9/22/2011	2:43:50 PM	SiCl4 pre valve closed
9/22/2011	2:43:50 PM	SiCl4 post valve closed
9/22/2011	2:43:50 PM	Bypass valve closed
9/22/2011	2:43:50 PM	Bubbler valve closed
9/22/2011	2:43:50 PM	Helium valve opened
9/22/2011	2:43:50 PM	Main Vac valve opened
9/22/2011	2:43:50 PM	Helium MFC set to  20.000000
9/22/2011	2:43:50 PM	H2 MFC set to  0.000000
9/22/2011	2:43:50 PM	BCl3 MFC set to  0.000000
9/22/2011	2:43:50 PM	PHl3 MFC set to  0.000000
9/22/2011	2:43:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:43:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:43:50 PM	Tube furnace set to 150
9/22/2011	2:44:20 PM	Helium valve closed
9/22/2011	2:44:20 PM	H2 valve closed
9/22/2011	2:44:20 PM	BCl3 valve closed
9/22/2011	2:44:20 PM	PH3 valve closed
9/22/2011	2:44:20 PM	SiCl4 pre valve closed
9/22/2011	2:44:20 PM	SiCl4 post valve closed
9/22/2011	2:44:20 PM	Bypass valve closed
9/22/2011	2:44:20 PM	Bubbler valve closed
9/22/2011	2:44:20 PM	Main Vac valve opened
9/22/2011	2:44:20 PM	Helium MFC set to  0.000000
9/22/2011	2:44:20 PM	H2 MFC set to  0.000000
9/22/2011	2:44:20 PM	BCl3 MFC set to  0.000000
9/22/2011	2:44:20 PM	PHl3 MFC set to  0.000000
9/22/2011	2:44:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:44:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:44:20 PM	Tube furnace set to 150
9/22/2011	2:44:50 PM	H2 valve closed
9/22/2011	2:44:50 PM	BCl3 valve closed
9/22/2011	2:44:50 PM	PH3 valve closed
9/22/2011	2:44:50 PM	SiCl4 pre valve closed
9/22/2011	2:44:50 PM	SiCl4 post valve closed
9/22/2011	2:44:50 PM	Bypass valve closed
9/22/2011	2:44:50 PM	Bubbler valve closed
9/22/2011	2:44:50 PM	Helium valve opened
9/22/2011	2:44:50 PM	Main Vac valve opened
9/22/2011	2:44:50 PM	Helium MFC set to  20.000000
9/22/2011	2:44:50 PM	H2 MFC set to  0.000000
9/22/2011	2:44:50 PM	BCl3 MFC set to  0.000000
9/22/2011	2:44:50 PM	PHl3 MFC set to  0.000000
9/22/2011	2:44:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:44:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:44:50 PM	Tube furnace set to 150
9/22/2011	2:45:20 PM	Helium valve closed
9/22/2011	2:45:20 PM	H2 valve closed
9/22/2011	2:45:20 PM	BCl3 valve closed
9/22/2011	2:45:20 PM	PH3 valve closed
9/22/2011	2:45:20 PM	SiCl4 pre valve closed
9/22/2011	2:45:20 PM	SiCl4 post valve closed
9/22/2011	2:45:20 PM	Bypass valve closed
9/22/2011	2:45:20 PM	Bubbler valve closed
9/22/2011	2:45:20 PM	Main Vac valve opened
9/22/2011	2:45:20 PM	Helium MFC set to  0.000000
9/22/2011	2:45:20 PM	H2 MFC set to  0.000000
9/22/2011	2:45:20 PM	BCl3 MFC set to  0.000000
9/22/2011	2:45:20 PM	PHl3 MFC set to  0.000000
9/22/2011	2:45:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:45:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:45:21 PM	Tube furnace set to 150
9/22/2011	2:45:22 PM	Run finished at 2:45 PM
9/22/2011	2:51:14 PM	Main Vac valve closed
9/22/2011	2:51:31 PM	Main Vac valve opened
9/22/2011	2:54:00 PM	Recipe started at 2:53 PM
9/22/2011	2:54:00 PM	Helium valve closed
9/22/2011	2:54:00 PM	H2 valve closed
9/22/2011	2:54:00 PM	BCl3 valve closed
9/22/2011	2:54:00 PM	PH3 valve closed
9/22/2011	2:54:00 PM	SiCl4 pre valve closed
9/22/2011	2:54:00 PM	SiCl4 post valve closed
9/22/2011	2:54:00 PM	Main Vac valve closed
9/22/2011	2:54:00 PM	Bypass valve closed
9/22/2011	2:54:00 PM	Bubbler valve closed
9/22/2011	2:54:00 PM	Helium MFC set to  0.000000
9/22/2011	2:54:00 PM	H2 MFC set to  0.000000
9/22/2011	2:54:00 PM	BCl3 MFC set to  0.000000
9/22/2011	2:54:00 PM	PHl3 MFC set to  0.000000
9/22/2011	2:54:00 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:54:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:54:01 PM	Tube furnace set to 0
9/22/2011	2:54:04 PM	Helium valve closed
9/22/2011	2:54:04 PM	BCl3 valve closed
9/22/2011	2:54:04 PM	PH3 valve closed
9/22/2011	2:54:04 PM	SiCl4 pre valve closed
9/22/2011	2:54:04 PM	SiCl4 post valve closed
9/22/2011	2:54:04 PM	Main Vac valve closed
9/22/2011	2:54:04 PM	Bypass valve closed
9/22/2011	2:54:04 PM	Bubbler valve closed
9/22/2011	2:54:04 PM	H2 valve opened
9/22/2011	2:54:04 PM	Helium MFC set to  0.000000
9/22/2011	2:54:04 PM	H2 MFC set to  500.000000
9/22/2011	2:54:04 PM	BCl3 MFC set to  0.000000
9/22/2011	2:54:04 PM	PHl3 MFC set to  0.000000
9/22/2011	2:54:04 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:54:04 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:54:04 PM	Tube furnace set to 0
9/22/2011	2:55:07 PM	Helium valve closed
9/22/2011	2:55:07 PM	BCl3 valve closed
9/22/2011	2:55:07 PM	PH3 valve closed
9/22/2011	2:55:08 PM	SiCl4 pre valve closed
9/22/2011	2:55:08 PM	SiCl4 post valve closed
9/22/2011	2:55:08 PM	Main Vac valve closed
9/22/2011	2:55:08 PM	Bypass valve closed
9/22/2011	2:55:08 PM	H2 valve opened
9/22/2011	2:55:08 PM	Bubbler valve opened
9/22/2011	2:55:08 PM	Helium MFC set to  0.000000
9/22/2011	2:55:08 PM	H2 MFC set to  500.000000
9/22/2011	2:55:08 PM	BCl3 MFC set to  0.000000
9/22/2011	2:55:08 PM	PHl3 MFC set to  0.000000
9/22/2011	2:55:08 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:55:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:55:08 PM	Tube furnace set to 0
9/22/2011	2:55:09 PM	Helium valve closed
9/22/2011	2:55:09 PM	BCl3 valve closed
9/22/2011	2:55:09 PM	PH3 valve closed
9/22/2011	2:55:09 PM	SiCl4 pre valve closed
9/22/2011	2:55:09 PM	SiCl4 post valve closed
9/22/2011	2:55:09 PM	Main Vac valve closed
9/22/2011	2:55:09 PM	Bypass valve closed
9/22/2011	2:55:09 PM	H2 valve opened
9/22/2011	2:55:09 PM	Bubbler valve opened
9/22/2011	2:55:09 PM	Helium MFC set to  0.000000
9/22/2011	2:55:09 PM	H2 MFC set to  500.000000
9/22/2011	2:55:09 PM	BCl3 MFC set to  0.000000
9/22/2011	2:55:09 PM	PHl3 MFC set to  0.000000
9/22/2011	2:55:09 PM	SiCl4 MFC set to  0.000000
9/22/2011	2:55:09 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	2:55:09 PM	Tube furnace set to 1000
9/22/2011	3:15:09 PM	Helium valve closed
9/22/2011	3:15:09 PM	PH3 valve closed
9/22/2011	3:15:09 PM	Main Vac valve closed
9/22/2011	3:15:09 PM	Bypass valve closed
9/22/2011	3:15:09 PM	H2 valve opened
9/22/2011	3:15:09 PM	BCl3 valve opened
9/22/2011	3:15:09 PM	SiCl4 pre valve opened
9/22/2011	3:15:09 PM	SiCl4 post valve opened
9/22/2011	3:15:09 PM	Bubbler valve opened
9/22/2011	3:15:09 PM	Helium MFC set to  0.000000
9/22/2011	3:15:09 PM	H2 MFC set to  500.000000
9/22/2011	3:15:09 PM	BCl3 MFC set to  2.000000
9/22/2011	3:15:09 PM	PHl3 MFC set to  0.000000
9/22/2011	3:15:09 PM	SiCl4 MFC set to  40.000000
9/22/2011	3:15:09 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:15:09 PM	Tube furnace set to 1000
9/22/2011	3:30:09 PM	Helium valve closed
9/22/2011	3:30:09 PM	BCl3 valve closed
9/22/2011	3:30:09 PM	PH3 valve closed
9/22/2011	3:30:09 PM	SiCl4 pre valve closed
9/22/2011	3:30:09 PM	SiCl4 post valve closed
9/22/2011	3:30:09 PM	Main Vac valve closed
9/22/2011	3:30:09 PM	Bypass valve closed
9/22/2011	3:30:09 PM	H2 valve opened
9/22/2011	3:30:09 PM	Bubbler valve opened
9/22/2011	3:30:09 PM	Helium MFC set to  0.000000
9/22/2011	3:30:09 PM	H2 MFC set to  500.000000
9/22/2011	3:30:09 PM	BCl3 MFC set to  0.000000
9/22/2011	3:30:09 PM	PHl3 MFC set to  0.000000
9/22/2011	3:30:09 PM	SiCl4 MFC set to  0.000000
9/22/2011	3:30:09 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:30:09 PM	Tube furnace set to 750
9/22/2011	3:35:09 PM	H2 valve closed
9/22/2011	3:35:09 PM	BCl3 valve closed
9/22/2011	3:35:09 PM	PH3 valve closed
9/22/2011	3:35:09 PM	SiCl4 pre valve closed
9/22/2011	3:35:09 PM	SiCl4 post valve closed
9/22/2011	3:35:09 PM	Main Vac valve closed
9/22/2011	3:35:09 PM	Bypass valve closed
9/22/2011	3:35:09 PM	Helium valve opened
9/22/2011	3:35:09 PM	Bubbler valve opened
9/22/2011	3:35:09 PM	Helium MFC set to  500.000000
9/22/2011	3:35:09 PM	H2 MFC set to  0.000000
9/22/2011	3:35:09 PM	BCl3 MFC set to  0.000000
9/22/2011	3:35:09 PM	PHl3 MFC set to  0.000000
9/22/2011	3:35:09 PM	SiCl4 MFC set to  0.000000
9/22/2011	3:35:09 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:35:09 PM	Tube furnace set to 0
9/22/2011	3:51:35 PM	Helium valve closed
9/22/2011	3:51:35 PM	H2 valve closed
9/22/2011	3:51:35 PM	BCl3 valve closed
9/22/2011	3:51:35 PM	PH3 valve closed
9/22/2011	3:51:35 PM	SiCl4 pre valve closed
9/22/2011	3:51:35 PM	SiCl4 post valve closed
9/22/2011	3:51:35 PM	Main Vac valve closed
9/22/2011	3:51:35 PM	Bypass valve closed
9/22/2011	3:51:35 PM	Bubbler valve closed
9/22/2011	3:51:35 PM	Helium MFC set to  0.000000
9/22/2011	3:51:35 PM	H2 MFC set to  0.000000
9/22/2011	3:51:35 PM	BCl3 MFC set to  0.000000
9/22/2011	3:51:35 PM	PHl3 MFC set to  0.000000
9/22/2011	3:51:35 PM	SiCl4 MFC set to  0.000000
9/22/2011	3:51:35 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:51:36 PM	Tube furnace set to 0
9/22/2011	3:51:37 PM	Run finished at 3:51 PM
9/22/2011	3:58:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	3:58:11 PM	Recipe started at 3:58 PM
9/22/2011	3:58:11 PM	Helium valve closed
9/22/2011	3:58:11 PM	H2 valve closed
9/22/2011	3:58:11 PM	BCl3 valve closed
9/22/2011	3:58:11 PM	PH3 valve closed
9/22/2011	3:58:11 PM	SiCl4 pre valve closed
9/22/2011	3:58:11 PM	SiCl4 post valve closed
9/22/2011	3:58:11 PM	Main Vac valve closed
9/22/2011	3:58:11 PM	Bubbler valve closed
9/22/2011	3:58:11 PM	Bypass valve opened
9/22/2011	3:58:11 PM	Helium MFC set to  0.000000
9/22/2011	3:58:11 PM	H2 MFC set to  0.000000
9/22/2011	3:58:11 PM	BCl3 MFC set to  0.000000
9/22/2011	3:58:11 PM	PHl3 MFC set to  0.000000
9/22/2011	3:58:11 PM	SiCl4 MFC set to  0.000000
9/22/2011	3:58:11 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:58:11 PM	Tube furnace set to 0
9/22/2011	3:59:21 PM	Helium valve closed
9/22/2011	3:59:21 PM	H2 valve closed
9/22/2011	3:59:21 PM	BCl3 valve closed
9/22/2011	3:59:21 PM	PH3 valve closed
9/22/2011	3:59:21 PM	SiCl4 pre valve closed
9/22/2011	3:59:21 PM	SiCl4 post valve closed
9/22/2011	3:59:21 PM	Main Vac valve closed
9/22/2011	3:59:21 PM	Bubbler valve closed
9/22/2011	3:59:21 PM	Bypass valve opened
9/22/2011	3:59:21 PM	Helium MFC set to  0.000000
9/22/2011	3:59:21 PM	H2 MFC set to  0.000000
9/22/2011	3:59:21 PM	BCl3 MFC set to  0.000000
9/22/2011	3:59:21 PM	PHl3 MFC set to  0.000000
9/22/2011	3:59:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	3:59:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:59:21 PM	Tube furnace set to 0
9/22/2011	3:59:58 PM	Helium valve closed
9/22/2011	3:59:58 PM	H2 valve closed
9/22/2011	3:59:58 PM	BCl3 valve closed
9/22/2011	3:59:58 PM	PH3 valve closed
9/22/2011	3:59:58 PM	SiCl4 pre valve closed
9/22/2011	3:59:58 PM	SiCl4 post valve closed
9/22/2011	3:59:58 PM	Bypass valve closed
9/22/2011	3:59:58 PM	Bubbler valve closed
9/22/2011	3:59:58 PM	Main Vac valve opened
9/22/2011	3:59:58 PM	Helium MFC set to  0.000000
9/22/2011	3:59:58 PM	H2 MFC set to  0.000000
9/22/2011	3:59:58 PM	BCl3 MFC set to  0.000000
9/22/2011	3:59:58 PM	PHl3 MFC set to  0.000000
9/22/2011	3:59:58 PM	SiCl4 MFC set to  0.000000
9/22/2011	3:59:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	3:59:58 PM	Tube furnace set to 0
9/22/2011	3:59:59 PM	Run finished at 3:59 PM
9/22/2011	3:59:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	4:02:00 PM	Recipe started at 4:01 PM
9/22/2011	4:02:00 PM	Helium valve closed
9/22/2011	4:02:00 PM	H2 valve closed
9/22/2011	4:02:00 PM	BCl3 valve closed
9/22/2011	4:02:00 PM	PH3 valve closed
9/22/2011	4:02:00 PM	SiCl4 pre valve closed
9/22/2011	4:02:00 PM	SiCl4 post valve closed
9/22/2011	4:02:00 PM	Bypass valve closed
9/22/2011	4:02:00 PM	Bubbler valve closed
9/22/2011	4:02:00 PM	Main Vac valve opened
9/22/2011	4:02:00 PM	Helium MFC set to  0.000000
9/22/2011	4:02:00 PM	H2 MFC set to  0.000000
9/22/2011	4:02:00 PM	BCl3 MFC set to  0.000000
9/22/2011	4:02:00 PM	PHl3 MFC set to  0.000000
9/22/2011	4:02:00 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:02:00 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:02:00 PM	Tube furnace set to 150
9/22/2011	4:02:07 PM	H2 valve closed
9/22/2011	4:02:07 PM	BCl3 valve closed
9/22/2011	4:02:07 PM	PH3 valve closed
9/22/2011	4:02:07 PM	SiCl4 pre valve closed
9/22/2011	4:02:07 PM	SiCl4 post valve closed
9/22/2011	4:02:07 PM	Bypass valve closed
9/22/2011	4:02:07 PM	Bubbler valve closed
9/22/2011	4:02:07 PM	Helium valve opened
9/22/2011	4:02:07 PM	Main Vac valve opened
9/22/2011	4:02:07 PM	Helium MFC set to  20.000000
9/22/2011	4:02:07 PM	H2 MFC set to  0.000000
9/22/2011	4:02:07 PM	BCl3 MFC set to  0.000000
9/22/2011	4:02:07 PM	PHl3 MFC set to  0.000000
9/22/2011	4:02:07 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:02:07 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:02:08 PM	Tube furnace set to 150
9/22/2011	4:02:38 PM	Helium valve closed
9/22/2011	4:02:38 PM	H2 valve closed
9/22/2011	4:02:38 PM	BCl3 valve closed
9/22/2011	4:02:38 PM	PH3 valve closed
9/22/2011	4:02:38 PM	SiCl4 pre valve closed
9/22/2011	4:02:38 PM	SiCl4 post valve closed
9/22/2011	4:02:38 PM	Bypass valve closed
9/22/2011	4:02:38 PM	Bubbler valve closed
9/22/2011	4:02:38 PM	Main Vac valve opened
9/22/2011	4:02:38 PM	Helium MFC set to  0.000000
9/22/2011	4:02:38 PM	H2 MFC set to  0.000000
9/22/2011	4:02:38 PM	BCl3 MFC set to  0.000000
9/22/2011	4:02:38 PM	PHl3 MFC set to  0.000000
9/22/2011	4:02:38 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:02:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:02:38 PM	Tube furnace set to 150
9/22/2011	4:03:08 PM	H2 valve closed
9/22/2011	4:03:08 PM	BCl3 valve closed
9/22/2011	4:03:08 PM	PH3 valve closed
9/22/2011	4:03:08 PM	SiCl4 pre valve closed
9/22/2011	4:03:08 PM	SiCl4 post valve closed
9/22/2011	4:03:08 PM	Bypass valve closed
9/22/2011	4:03:08 PM	Bubbler valve closed
9/22/2011	4:03:08 PM	Helium valve opened
9/22/2011	4:03:08 PM	Main Vac valve opened
9/22/2011	4:03:08 PM	Helium MFC set to  20.000000
9/22/2011	4:03:08 PM	H2 MFC set to  0.000000
9/22/2011	4:03:08 PM	BCl3 MFC set to  0.000000
9/22/2011	4:03:08 PM	PHl3 MFC set to  0.000000
9/22/2011	4:03:08 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:03:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:03:08 PM	Tube furnace set to 150
9/22/2011	4:03:38 PM	Helium valve closed
9/22/2011	4:03:38 PM	H2 valve closed
9/22/2011	4:03:38 PM	BCl3 valve closed
9/22/2011	4:03:38 PM	PH3 valve closed
9/22/2011	4:03:38 PM	SiCl4 pre valve closed
9/22/2011	4:03:38 PM	SiCl4 post valve closed
9/22/2011	4:03:38 PM	Bypass valve closed
9/22/2011	4:03:38 PM	Bubbler valve closed
9/22/2011	4:03:38 PM	Main Vac valve opened
9/22/2011	4:03:38 PM	Helium MFC set to  0.000000
9/22/2011	4:03:38 PM	H2 MFC set to  0.000000
9/22/2011	4:03:38 PM	BCl3 MFC set to  0.000000
9/22/2011	4:03:38 PM	PHl3 MFC set to  0.000000
9/22/2011	4:03:38 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:03:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:03:38 PM	Tube furnace set to 150
9/22/2011	4:04:08 PM	H2 valve closed
9/22/2011	4:04:08 PM	BCl3 valve closed
9/22/2011	4:04:08 PM	PH3 valve closed
9/22/2011	4:04:08 PM	SiCl4 pre valve closed
9/22/2011	4:04:08 PM	SiCl4 post valve closed
9/22/2011	4:04:08 PM	Bypass valve closed
9/22/2011	4:04:08 PM	Bubbler valve closed
9/22/2011	4:04:08 PM	Helium valve opened
9/22/2011	4:04:08 PM	Main Vac valve opened
9/22/2011	4:04:08 PM	Helium MFC set to  20.000000
9/22/2011	4:04:08 PM	H2 MFC set to  0.000000
9/22/2011	4:04:08 PM	BCl3 MFC set to  0.000000
9/22/2011	4:04:08 PM	PHl3 MFC set to  0.000000
9/22/2011	4:04:08 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:04:08 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:04:08 PM	Tube furnace set to 150
9/22/2011	4:04:38 PM	Helium valve closed
9/22/2011	4:04:38 PM	H2 valve closed
9/22/2011	4:04:38 PM	BCl3 valve closed
9/22/2011	4:04:38 PM	PH3 valve closed
9/22/2011	4:04:38 PM	SiCl4 pre valve closed
9/22/2011	4:04:38 PM	SiCl4 post valve closed
9/22/2011	4:04:38 PM	Bypass valve closed
9/22/2011	4:04:38 PM	Bubbler valve closed
9/22/2011	4:04:38 PM	Main Vac valve opened
9/22/2011	4:04:38 PM	Helium MFC set to  0.000000
9/22/2011	4:04:38 PM	H2 MFC set to  0.000000
9/22/2011	4:04:38 PM	BCl3 MFC set to  0.000000
9/22/2011	4:04:38 PM	PHl3 MFC set to  0.000000
9/22/2011	4:04:38 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:04:38 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:04:39 PM	Tube furnace set to 150
9/22/2011	4:05:09 PM	H2 valve closed
9/22/2011	4:05:09 PM	BCl3 valve closed
9/22/2011	4:05:09 PM	PH3 valve closed
9/22/2011	4:05:09 PM	SiCl4 pre valve closed
9/22/2011	4:05:09 PM	SiCl4 post valve closed
9/22/2011	4:05:09 PM	Bypass valve closed
9/22/2011	4:05:09 PM	Bubbler valve closed
9/22/2011	4:05:09 PM	Helium valve opened
9/22/2011	4:05:09 PM	Main Vac valve opened
9/22/2011	4:05:09 PM	Helium MFC set to  20.000000
9/22/2011	4:05:09 PM	H2 MFC set to  0.000000
9/22/2011	4:05:09 PM	BCl3 MFC set to  0.000000
9/22/2011	4:05:09 PM	PHl3 MFC set to  0.000000
9/22/2011	4:05:09 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:05:09 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:05:09 PM	Tube furnace set to 150
9/22/2011	4:05:39 PM	Helium valve closed
9/22/2011	4:05:39 PM	H2 valve closed
9/22/2011	4:05:39 PM	BCl3 valve closed
9/22/2011	4:05:39 PM	PH3 valve closed
9/22/2011	4:05:39 PM	SiCl4 pre valve closed
9/22/2011	4:05:39 PM	SiCl4 post valve closed
9/22/2011	4:05:39 PM	Bypass valve closed
9/22/2011	4:05:39 PM	Bubbler valve closed
9/22/2011	4:05:39 PM	Main Vac valve opened
9/22/2011	4:05:39 PM	Helium MFC set to  0.000000
9/22/2011	4:05:39 PM	H2 MFC set to  0.000000
9/22/2011	4:05:39 PM	BCl3 MFC set to  0.000000
9/22/2011	4:05:39 PM	PHl3 MFC set to  0.000000
9/22/2011	4:05:39 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:05:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:05:39 PM	Tube furnace set to 150
9/22/2011	4:06:09 PM	H2 valve closed
9/22/2011	4:06:09 PM	BCl3 valve closed
9/22/2011	4:06:09 PM	PH3 valve closed
9/22/2011	4:06:09 PM	SiCl4 pre valve closed
9/22/2011	4:06:09 PM	SiCl4 post valve closed
9/22/2011	4:06:09 PM	Bypass valve closed
9/22/2011	4:06:09 PM	Bubbler valve closed
9/22/2011	4:06:09 PM	Helium valve opened
9/22/2011	4:06:09 PM	Main Vac valve opened
9/22/2011	4:06:09 PM	Helium MFC set to  20.000000
9/22/2011	4:06:09 PM	H2 MFC set to  0.000000
9/22/2011	4:06:09 PM	BCl3 MFC set to  0.000000
9/22/2011	4:06:09 PM	PHl3 MFC set to  0.000000
9/22/2011	4:06:09 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:06:09 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:06:09 PM	Tube furnace set to 150
9/22/2011	4:06:39 PM	Helium valve closed
9/22/2011	4:06:39 PM	H2 valve closed
9/22/2011	4:06:39 PM	BCl3 valve closed
9/22/2011	4:06:39 PM	PH3 valve closed
9/22/2011	4:06:39 PM	SiCl4 pre valve closed
9/22/2011	4:06:39 PM	SiCl4 post valve closed
9/22/2011	4:06:39 PM	Bypass valve closed
9/22/2011	4:06:39 PM	Bubbler valve closed
9/22/2011	4:06:39 PM	Main Vac valve opened
9/22/2011	4:06:39 PM	Helium MFC set to  0.000000
9/22/2011	4:06:39 PM	H2 MFC set to  0.000000
9/22/2011	4:06:39 PM	BCl3 MFC set to  0.000000
9/22/2011	4:06:39 PM	PHl3 MFC set to  0.000000
9/22/2011	4:06:39 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:06:39 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:06:39 PM	Tube furnace set to 150
9/22/2011	4:07:09 PM	H2 valve closed
9/22/2011	4:07:09 PM	BCl3 valve closed
9/22/2011	4:07:09 PM	PH3 valve closed
9/22/2011	4:07:09 PM	SiCl4 pre valve closed
9/22/2011	4:07:10 PM	SiCl4 post valve closed
9/22/2011	4:07:10 PM	Bypass valve closed
9/22/2011	4:07:10 PM	Bubbler valve closed
9/22/2011	4:07:10 PM	Helium valve opened
9/22/2011	4:07:10 PM	Main Vac valve opened
9/22/2011	4:07:10 PM	Helium MFC set to  20.000000
9/22/2011	4:07:10 PM	H2 MFC set to  0.000000
9/22/2011	4:07:10 PM	BCl3 MFC set to  0.000000
9/22/2011	4:07:10 PM	PHl3 MFC set to  0.000000
9/22/2011	4:07:10 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:07:10 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:07:10 PM	Tube furnace set to 150
9/22/2011	4:07:40 PM	Helium valve closed
9/22/2011	4:07:40 PM	H2 valve closed
9/22/2011	4:07:40 PM	BCl3 valve closed
9/22/2011	4:07:40 PM	PH3 valve closed
9/22/2011	4:07:40 PM	SiCl4 pre valve closed
9/22/2011	4:07:40 PM	SiCl4 post valve closed
9/22/2011	4:07:40 PM	Bypass valve closed
9/22/2011	4:07:40 PM	Bubbler valve closed
9/22/2011	4:07:40 PM	Main Vac valve opened
9/22/2011	4:07:40 PM	Helium MFC set to  0.000000
9/22/2011	4:07:40 PM	H2 MFC set to  0.000000
9/22/2011	4:07:40 PM	BCl3 MFC set to  0.000000
9/22/2011	4:07:40 PM	PHl3 MFC set to  0.000000
9/22/2011	4:07:40 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:07:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:07:40 PM	Tube furnace set to 150
9/22/2011	4:08:10 PM	H2 valve closed
9/22/2011	4:08:10 PM	BCl3 valve closed
9/22/2011	4:08:10 PM	PH3 valve closed
9/22/2011	4:08:10 PM	SiCl4 pre valve closed
9/22/2011	4:08:10 PM	SiCl4 post valve closed
9/22/2011	4:08:10 PM	Bypass valve closed
9/22/2011	4:08:10 PM	Bubbler valve closed
9/22/2011	4:08:10 PM	Helium valve opened
9/22/2011	4:08:10 PM	Main Vac valve opened
9/22/2011	4:08:10 PM	Helium MFC set to  20.000000
9/22/2011	4:08:10 PM	H2 MFC set to  0.000000
9/22/2011	4:08:10 PM	BCl3 MFC set to  0.000000
9/22/2011	4:08:10 PM	PHl3 MFC set to  0.000000
9/22/2011	4:08:10 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:08:10 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:08:10 PM	Tube furnace set to 150
9/22/2011	4:08:40 PM	Helium valve closed
9/22/2011	4:08:40 PM	H2 valve closed
9/22/2011	4:08:40 PM	BCl3 valve closed
9/22/2011	4:08:40 PM	PH3 valve closed
9/22/2011	4:08:40 PM	SiCl4 pre valve closed
9/22/2011	4:08:40 PM	SiCl4 post valve closed
9/22/2011	4:08:40 PM	Bypass valve closed
9/22/2011	4:08:40 PM	Bubbler valve closed
9/22/2011	4:08:40 PM	Main Vac valve opened
9/22/2011	4:08:40 PM	Helium MFC set to  0.000000
9/22/2011	4:08:40 PM	H2 MFC set to  0.000000
9/22/2011	4:08:40 PM	BCl3 MFC set to  0.000000
9/22/2011	4:08:40 PM	PHl3 MFC set to  0.000000
9/22/2011	4:08:40 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:08:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:08:40 PM	Tube furnace set to 150
9/22/2011	4:09:10 PM	H2 valve closed
9/22/2011	4:09:10 PM	BCl3 valve closed
9/22/2011	4:09:10 PM	PH3 valve closed
9/22/2011	4:09:10 PM	SiCl4 pre valve closed
9/22/2011	4:09:10 PM	SiCl4 post valve closed
9/22/2011	4:09:10 PM	Bypass valve closed
9/22/2011	4:09:10 PM	Bubbler valve closed
9/22/2011	4:09:10 PM	Helium valve opened
9/22/2011	4:09:10 PM	Main Vac valve opened
9/22/2011	4:09:10 PM	Helium MFC set to  20.000000
9/22/2011	4:09:10 PM	H2 MFC set to  0.000000
9/22/2011	4:09:10 PM	BCl3 MFC set to  0.000000
9/22/2011	4:09:10 PM	PHl3 MFC set to  0.000000
9/22/2011	4:09:10 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:09:10 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:09:10 PM	Tube furnace set to 150
9/22/2011	4:09:41 PM	Helium valve closed
9/22/2011	4:09:41 PM	H2 valve closed
9/22/2011	4:09:41 PM	BCl3 valve closed
9/22/2011	4:09:41 PM	PH3 valve closed
9/22/2011	4:09:41 PM	SiCl4 pre valve closed
9/22/2011	4:09:41 PM	SiCl4 post valve closed
9/22/2011	4:09:41 PM	Bypass valve closed
9/22/2011	4:09:41 PM	Bubbler valve closed
9/22/2011	4:09:41 PM	Main Vac valve opened
9/22/2011	4:09:41 PM	Helium MFC set to  0.000000
9/22/2011	4:09:41 PM	H2 MFC set to  0.000000
9/22/2011	4:09:41 PM	BCl3 MFC set to  0.000000
9/22/2011	4:09:41 PM	PHl3 MFC set to  0.000000
9/22/2011	4:09:41 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:09:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:09:41 PM	Tube furnace set to 150
9/22/2011	4:10:11 PM	H2 valve closed
9/22/2011	4:10:11 PM	BCl3 valve closed
9/22/2011	4:10:11 PM	PH3 valve closed
9/22/2011	4:10:11 PM	SiCl4 pre valve closed
9/22/2011	4:10:11 PM	SiCl4 post valve closed
9/22/2011	4:10:11 PM	Bypass valve closed
9/22/2011	4:10:11 PM	Bubbler valve closed
9/22/2011	4:10:11 PM	Helium valve opened
9/22/2011	4:10:11 PM	Main Vac valve opened
9/22/2011	4:10:11 PM	Helium MFC set to  20.000000
9/22/2011	4:10:11 PM	H2 MFC set to  0.000000
9/22/2011	4:10:11 PM	BCl3 MFC set to  0.000000
9/22/2011	4:10:11 PM	PHl3 MFC set to  0.000000
9/22/2011	4:10:11 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:10:11 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:10:11 PM	Tube furnace set to 150
9/22/2011	4:10:41 PM	Helium valve closed
9/22/2011	4:10:41 PM	H2 valve closed
9/22/2011	4:10:41 PM	BCl3 valve closed
9/22/2011	4:10:41 PM	PH3 valve closed
9/22/2011	4:10:41 PM	SiCl4 pre valve closed
9/22/2011	4:10:41 PM	SiCl4 post valve closed
9/22/2011	4:10:41 PM	Bypass valve closed
9/22/2011	4:10:41 PM	Bubbler valve closed
9/22/2011	4:10:41 PM	Main Vac valve opened
9/22/2011	4:10:41 PM	Helium MFC set to  0.000000
9/22/2011	4:10:41 PM	H2 MFC set to  0.000000
9/22/2011	4:10:41 PM	BCl3 MFC set to  0.000000
9/22/2011	4:10:41 PM	PHl3 MFC set to  0.000000
9/22/2011	4:10:41 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:10:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:10:41 PM	Tube furnace set to 150
9/22/2011	4:11:11 PM	H2 valve closed
9/22/2011	4:11:11 PM	BCl3 valve closed
9/22/2011	4:11:11 PM	PH3 valve closed
9/22/2011	4:11:11 PM	SiCl4 pre valve closed
9/22/2011	4:11:11 PM	SiCl4 post valve closed
9/22/2011	4:11:11 PM	Bypass valve closed
9/22/2011	4:11:11 PM	Bubbler valve closed
9/22/2011	4:11:11 PM	Helium valve opened
9/22/2011	4:11:11 PM	Main Vac valve opened
9/22/2011	4:11:11 PM	Helium MFC set to  20.000000
9/22/2011	4:11:11 PM	H2 MFC set to  0.000000
9/22/2011	4:11:11 PM	BCl3 MFC set to  0.000000
9/22/2011	4:11:11 PM	PHl3 MFC set to  0.000000
9/22/2011	4:11:11 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:11:11 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:11:11 PM	Tube furnace set to 150
9/22/2011	4:11:41 PM	Helium valve closed
9/22/2011	4:11:41 PM	H2 valve closed
9/22/2011	4:11:41 PM	BCl3 valve closed
9/22/2011	4:11:41 PM	PH3 valve closed
9/22/2011	4:11:41 PM	SiCl4 pre valve closed
9/22/2011	4:11:41 PM	SiCl4 post valve closed
9/22/2011	4:11:41 PM	Bypass valve closed
9/22/2011	4:11:41 PM	Bubbler valve closed
9/22/2011	4:11:41 PM	Main Vac valve opened
9/22/2011	4:11:41 PM	Helium MFC set to  0.000000
9/22/2011	4:11:41 PM	H2 MFC set to  0.000000
9/22/2011	4:11:41 PM	BCl3 MFC set to  0.000000
9/22/2011	4:11:41 PM	PHl3 MFC set to  0.000000
9/22/2011	4:11:41 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:11:41 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:11:42 PM	Tube furnace set to 150
9/22/2011	4:11:43 PM	Run finished at 4:11 PM
9/22/2011	4:12:25 PM	Recipe started at 4:12 PM
9/22/2011	4:12:25 PM	Helium valve closed
9/22/2011	4:12:25 PM	H2 valve closed
9/22/2011	4:12:25 PM	BCl3 valve closed
9/22/2011	4:12:25 PM	PH3 valve closed
9/22/2011	4:12:25 PM	SiCl4 pre valve closed
9/22/2011	4:12:25 PM	SiCl4 post valve closed
9/22/2011	4:12:25 PM	Bypass valve closed
9/22/2011	4:12:25 PM	Bubbler valve closed
9/22/2011	4:12:25 PM	Main Vac valve opened
9/22/2011	4:12:25 PM	Helium MFC set to  0.000000
9/22/2011	4:12:25 PM	H2 MFC set to  0.000000
9/22/2011	4:12:25 PM	BCl3 MFC set to  0.000000
9/22/2011	4:12:25 PM	PHl3 MFC set to  0.000000
9/22/2011	4:12:25 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:12:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:12:25 PM	Tube furnace set to 150
9/22/2011	4:12:55 PM	H2 valve closed
9/22/2011	4:12:55 PM	BCl3 valve closed
9/22/2011	4:12:55 PM	PH3 valve closed
9/22/2011	4:12:55 PM	SiCl4 pre valve closed
9/22/2011	4:12:55 PM	SiCl4 post valve closed
9/22/2011	4:12:55 PM	Bypass valve closed
9/22/2011	4:12:55 PM	Bubbler valve closed
9/22/2011	4:12:55 PM	Helium valve opened
9/22/2011	4:12:55 PM	Main Vac valve opened
9/22/2011	4:12:55 PM	Helium MFC set to  20.000000
9/22/2011	4:12:55 PM	H2 MFC set to  0.000000
9/22/2011	4:12:55 PM	BCl3 MFC set to  0.000000
9/22/2011	4:12:55 PM	PHl3 MFC set to  0.000000
9/22/2011	4:12:55 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:12:55 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:12:56 PM	Tube furnace set to 150
9/22/2011	4:13:26 PM	Helium valve closed
9/22/2011	4:13:26 PM	H2 valve closed
9/22/2011	4:13:26 PM	BCl3 valve closed
9/22/2011	4:13:26 PM	PH3 valve closed
9/22/2011	4:13:26 PM	SiCl4 pre valve closed
9/22/2011	4:13:26 PM	SiCl4 post valve closed
9/22/2011	4:13:26 PM	Bypass valve closed
9/22/2011	4:13:26 PM	Bubbler valve closed
9/22/2011	4:13:26 PM	Main Vac valve opened
9/22/2011	4:13:26 PM	Helium MFC set to  0.000000
9/22/2011	4:13:26 PM	H2 MFC set to  0.000000
9/22/2011	4:13:26 PM	BCl3 MFC set to  0.000000
9/22/2011	4:13:26 PM	PHl3 MFC set to  0.000000
9/22/2011	4:13:26 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:13:26 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:13:26 PM	Tube furnace set to 150
9/22/2011	4:13:56 PM	H2 valve closed
9/22/2011	4:13:56 PM	BCl3 valve closed
9/22/2011	4:13:56 PM	PH3 valve closed
9/22/2011	4:13:56 PM	SiCl4 pre valve closed
9/22/2011	4:13:56 PM	SiCl4 post valve closed
9/22/2011	4:13:56 PM	Bypass valve closed
9/22/2011	4:13:56 PM	Bubbler valve closed
9/22/2011	4:13:56 PM	Helium valve opened
9/22/2011	4:13:56 PM	Main Vac valve opened
9/22/2011	4:13:56 PM	Helium MFC set to  20.000000
9/22/2011	4:13:56 PM	H2 MFC set to  0.000000
9/22/2011	4:13:56 PM	BCl3 MFC set to  0.000000
9/22/2011	4:13:56 PM	PHl3 MFC set to  0.000000
9/22/2011	4:13:56 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:13:56 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:13:56 PM	Tube furnace set to 150
9/22/2011	4:14:26 PM	Helium valve closed
9/22/2011	4:14:26 PM	H2 valve closed
9/22/2011	4:14:26 PM	BCl3 valve closed
9/22/2011	4:14:26 PM	PH3 valve closed
9/22/2011	4:14:26 PM	SiCl4 pre valve closed
9/22/2011	4:14:26 PM	SiCl4 post valve closed
9/22/2011	4:14:26 PM	Bypass valve closed
9/22/2011	4:14:26 PM	Bubbler valve closed
9/22/2011	4:14:26 PM	Main Vac valve opened
9/22/2011	4:14:26 PM	Helium MFC set to  0.000000
9/22/2011	4:14:26 PM	H2 MFC set to  0.000000
9/22/2011	4:14:26 PM	BCl3 MFC set to  0.000000
9/22/2011	4:14:26 PM	PHl3 MFC set to  0.000000
9/22/2011	4:14:26 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:14:26 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:14:26 PM	Tube furnace set to 150
9/22/2011	4:14:56 PM	H2 valve closed
9/22/2011	4:14:56 PM	BCl3 valve closed
9/22/2011	4:14:56 PM	PH3 valve closed
9/22/2011	4:14:56 PM	SiCl4 pre valve closed
9/22/2011	4:14:56 PM	SiCl4 post valve closed
9/22/2011	4:14:56 PM	Bypass valve closed
9/22/2011	4:14:56 PM	Bubbler valve closed
9/22/2011	4:14:56 PM	Helium valve opened
9/22/2011	4:14:56 PM	Main Vac valve opened
9/22/2011	4:14:56 PM	Helium MFC set to  20.000000
9/22/2011	4:14:56 PM	H2 MFC set to  0.000000
9/22/2011	4:14:56 PM	BCl3 MFC set to  0.000000
9/22/2011	4:14:56 PM	PHl3 MFC set to  0.000000
9/22/2011	4:14:56 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:14:56 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:14:56 PM	Tube furnace set to 150
9/22/2011	4:15:26 PM	Helium valve closed
9/22/2011	4:15:26 PM	H2 valve closed
9/22/2011	4:15:26 PM	BCl3 valve closed
9/22/2011	4:15:26 PM	PH3 valve closed
9/22/2011	4:15:26 PM	SiCl4 pre valve closed
9/22/2011	4:15:26 PM	SiCl4 post valve closed
9/22/2011	4:15:26 PM	Bypass valve closed
9/22/2011	4:15:26 PM	Bubbler valve closed
9/22/2011	4:15:26 PM	Main Vac valve opened
9/22/2011	4:15:26 PM	Helium MFC set to  0.000000
9/22/2011	4:15:26 PM	H2 MFC set to  0.000000
9/22/2011	4:15:26 PM	BCl3 MFC set to  0.000000
9/22/2011	4:15:26 PM	PHl3 MFC set to  0.000000
9/22/2011	4:15:26 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:15:26 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:15:27 PM	Tube furnace set to 150
9/22/2011	4:15:57 PM	H2 valve closed
9/22/2011	4:15:57 PM	BCl3 valve closed
9/22/2011	4:15:57 PM	PH3 valve closed
9/22/2011	4:15:57 PM	SiCl4 pre valve closed
9/22/2011	4:15:57 PM	SiCl4 post valve closed
9/22/2011	4:15:57 PM	Bypass valve closed
9/22/2011	4:15:57 PM	Bubbler valve closed
9/22/2011	4:15:57 PM	Helium valve opened
9/22/2011	4:15:57 PM	Main Vac valve opened
9/22/2011	4:15:57 PM	Helium MFC set to  20.000000
9/22/2011	4:15:57 PM	H2 MFC set to  0.000000
9/22/2011	4:15:57 PM	BCl3 MFC set to  0.000000
9/22/2011	4:15:57 PM	PHl3 MFC set to  0.000000
9/22/2011	4:15:57 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:15:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:15:57 PM	Tube furnace set to 150
9/22/2011	4:16:27 PM	Helium valve closed
9/22/2011	4:16:27 PM	H2 valve closed
9/22/2011	4:16:27 PM	BCl3 valve closed
9/22/2011	4:16:27 PM	PH3 valve closed
9/22/2011	4:16:27 PM	SiCl4 pre valve closed
9/22/2011	4:16:27 PM	SiCl4 post valve closed
9/22/2011	4:16:27 PM	Bypass valve closed
9/22/2011	4:16:27 PM	Bubbler valve closed
9/22/2011	4:16:27 PM	Main Vac valve opened
9/22/2011	4:16:27 PM	Helium MFC set to  0.000000
9/22/2011	4:16:27 PM	H2 MFC set to  0.000000
9/22/2011	4:16:27 PM	BCl3 MFC set to  0.000000
9/22/2011	4:16:27 PM	PHl3 MFC set to  0.000000
9/22/2011	4:16:27 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:16:27 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:16:27 PM	Tube furnace set to 150
9/22/2011	4:16:57 PM	H2 valve closed
9/22/2011	4:16:57 PM	BCl3 valve closed
9/22/2011	4:16:57 PM	PH3 valve closed
9/22/2011	4:16:57 PM	SiCl4 pre valve closed
9/22/2011	4:16:57 PM	SiCl4 post valve closed
9/22/2011	4:16:57 PM	Bypass valve closed
9/22/2011	4:16:57 PM	Bubbler valve closed
9/22/2011	4:16:57 PM	Helium valve opened
9/22/2011	4:16:57 PM	Main Vac valve opened
9/22/2011	4:16:57 PM	Helium MFC set to  20.000000
9/22/2011	4:16:57 PM	H2 MFC set to  0.000000
9/22/2011	4:16:57 PM	BCl3 MFC set to  0.000000
9/22/2011	4:16:57 PM	PHl3 MFC set to  0.000000
9/22/2011	4:16:57 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:16:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:16:57 PM	Tube furnace set to 150
9/22/2011	4:17:27 PM	Helium valve closed
9/22/2011	4:17:27 PM	H2 valve closed
9/22/2011	4:17:27 PM	BCl3 valve closed
9/22/2011	4:17:27 PM	PH3 valve closed
9/22/2011	4:17:27 PM	SiCl4 pre valve closed
9/22/2011	4:17:27 PM	SiCl4 post valve closed
9/22/2011	4:17:27 PM	Bypass valve closed
9/22/2011	4:17:27 PM	Bubbler valve closed
9/22/2011	4:17:27 PM	Main Vac valve opened
9/22/2011	4:17:27 PM	Helium MFC set to  0.000000
9/22/2011	4:17:27 PM	H2 MFC set to  0.000000
9/22/2011	4:17:27 PM	BCl3 MFC set to  0.000000
9/22/2011	4:17:27 PM	PHl3 MFC set to  0.000000
9/22/2011	4:17:27 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:17:27 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:17:27 PM	Tube furnace set to 150
9/22/2011	4:17:57 PM	H2 valve closed
9/22/2011	4:17:57 PM	BCl3 valve closed
9/22/2011	4:17:57 PM	PH3 valve closed
9/22/2011	4:17:57 PM	SiCl4 pre valve closed
9/22/2011	4:17:57 PM	SiCl4 post valve closed
9/22/2011	4:17:57 PM	Bypass valve closed
9/22/2011	4:17:57 PM	Bubbler valve closed
9/22/2011	4:17:57 PM	Helium valve opened
9/22/2011	4:17:57 PM	Main Vac valve opened
9/22/2011	4:17:57 PM	Helium MFC set to  20.000000
9/22/2011	4:17:57 PM	H2 MFC set to  0.000000
9/22/2011	4:17:57 PM	BCl3 MFC set to  0.000000
9/22/2011	4:17:57 PM	PHl3 MFC set to  0.000000
9/22/2011	4:17:57 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:17:57 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:17:58 PM	Tube furnace set to 150
9/22/2011	4:18:28 PM	Helium valve closed
9/22/2011	4:18:28 PM	H2 valve closed
9/22/2011	4:18:28 PM	BCl3 valve closed
9/22/2011	4:18:28 PM	PH3 valve closed
9/22/2011	4:18:28 PM	SiCl4 pre valve closed
9/22/2011	4:18:28 PM	SiCl4 post valve closed
9/22/2011	4:18:28 PM	Bypass valve closed
9/22/2011	4:18:28 PM	Bubbler valve closed
9/22/2011	4:18:28 PM	Main Vac valve opened
9/22/2011	4:18:28 PM	Helium MFC set to  0.000000
9/22/2011	4:18:28 PM	H2 MFC set to  0.000000
9/22/2011	4:18:28 PM	BCl3 MFC set to  0.000000
9/22/2011	4:18:28 PM	PHl3 MFC set to  0.000000
9/22/2011	4:18:28 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:18:28 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:18:28 PM	Tube furnace set to 150
9/22/2011	4:18:58 PM	H2 valve closed
9/22/2011	4:18:58 PM	BCl3 valve closed
9/22/2011	4:18:58 PM	PH3 valve closed
9/22/2011	4:18:58 PM	SiCl4 pre valve closed
9/22/2011	4:18:58 PM	SiCl4 post valve closed
9/22/2011	4:18:58 PM	Bypass valve closed
9/22/2011	4:18:58 PM	Bubbler valve closed
9/22/2011	4:18:58 PM	Helium valve opened
9/22/2011	4:18:58 PM	Main Vac valve opened
9/22/2011	4:18:58 PM	Helium MFC set to  20.000000
9/22/2011	4:18:58 PM	H2 MFC set to  0.000000
9/22/2011	4:18:58 PM	BCl3 MFC set to  0.000000
9/22/2011	4:18:58 PM	PHl3 MFC set to  0.000000
9/22/2011	4:18:58 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:18:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:18:58 PM	Tube furnace set to 150
9/22/2011	4:19:28 PM	Helium valve closed
9/22/2011	4:19:28 PM	H2 valve closed
9/22/2011	4:19:28 PM	BCl3 valve closed
9/22/2011	4:19:28 PM	PH3 valve closed
9/22/2011	4:19:28 PM	SiCl4 pre valve closed
9/22/2011	4:19:28 PM	SiCl4 post valve closed
9/22/2011	4:19:28 PM	Bypass valve closed
9/22/2011	4:19:28 PM	Bubbler valve closed
9/22/2011	4:19:28 PM	Main Vac valve opened
9/22/2011	4:19:28 PM	Helium MFC set to  0.000000
9/22/2011	4:19:28 PM	H2 MFC set to  0.000000
9/22/2011	4:19:28 PM	BCl3 MFC set to  0.000000
9/22/2011	4:19:28 PM	PHl3 MFC set to  0.000000
9/22/2011	4:19:28 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:19:28 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:19:28 PM	Tube furnace set to 150
9/22/2011	4:19:58 PM	H2 valve closed
9/22/2011	4:19:58 PM	BCl3 valve closed
9/22/2011	4:19:58 PM	PH3 valve closed
9/22/2011	4:19:58 PM	SiCl4 pre valve closed
9/22/2011	4:19:58 PM	SiCl4 post valve closed
9/22/2011	4:19:58 PM	Bypass valve closed
9/22/2011	4:19:58 PM	Bubbler valve closed
9/22/2011	4:19:58 PM	Helium valve opened
9/22/2011	4:19:58 PM	Main Vac valve opened
9/22/2011	4:19:58 PM	Helium MFC set to  20.000000
9/22/2011	4:19:58 PM	H2 MFC set to  0.000000
9/22/2011	4:19:58 PM	BCl3 MFC set to  0.000000
9/22/2011	4:19:58 PM	PHl3 MFC set to  0.000000
9/22/2011	4:19:58 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:19:58 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:19:58 PM	Tube furnace set to 150
9/22/2011	4:20:28 PM	Helium valve closed
9/22/2011	4:20:28 PM	H2 valve closed
9/22/2011	4:20:28 PM	BCl3 valve closed
9/22/2011	4:20:28 PM	PH3 valve closed
9/22/2011	4:20:28 PM	SiCl4 pre valve closed
9/22/2011	4:20:28 PM	SiCl4 post valve closed
9/22/2011	4:20:28 PM	Bypass valve closed
9/22/2011	4:20:28 PM	Bubbler valve closed
9/22/2011	4:20:28 PM	Main Vac valve opened
9/22/2011	4:20:28 PM	Helium MFC set to  0.000000
9/22/2011	4:20:28 PM	H2 MFC set to  0.000000
9/22/2011	4:20:28 PM	BCl3 MFC set to  0.000000
9/22/2011	4:20:28 PM	PHl3 MFC set to  0.000000
9/22/2011	4:20:28 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:20:28 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:20:29 PM	Tube furnace set to 150
9/22/2011	4:20:59 PM	H2 valve closed
9/22/2011	4:20:59 PM	BCl3 valve closed
9/22/2011	4:20:59 PM	PH3 valve closed
9/22/2011	4:20:59 PM	SiCl4 pre valve closed
9/22/2011	4:20:59 PM	SiCl4 post valve closed
9/22/2011	4:20:59 PM	Bypass valve closed
9/22/2011	4:20:59 PM	Bubbler valve closed
9/22/2011	4:20:59 PM	Helium valve opened
9/22/2011	4:20:59 PM	Main Vac valve opened
9/22/2011	4:20:59 PM	Helium MFC set to  20.000000
9/22/2011	4:20:59 PM	H2 MFC set to  0.000000
9/22/2011	4:20:59 PM	BCl3 MFC set to  0.000000
9/22/2011	4:20:59 PM	PHl3 MFC set to  0.000000
9/22/2011	4:20:59 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:20:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:20:59 PM	Tube furnace set to 150
9/22/2011	4:21:29 PM	Helium valve closed
9/22/2011	4:21:29 PM	H2 valve closed
9/22/2011	4:21:29 PM	BCl3 valve closed
9/22/2011	4:21:29 PM	PH3 valve closed
9/22/2011	4:21:29 PM	SiCl4 pre valve closed
9/22/2011	4:21:29 PM	SiCl4 post valve closed
9/22/2011	4:21:29 PM	Bypass valve closed
9/22/2011	4:21:29 PM	Bubbler valve closed
9/22/2011	4:21:29 PM	Main Vac valve opened
9/22/2011	4:21:29 PM	Helium MFC set to  0.000000
9/22/2011	4:21:29 PM	H2 MFC set to  0.000000
9/22/2011	4:21:29 PM	BCl3 MFC set to  0.000000
9/22/2011	4:21:29 PM	PHl3 MFC set to  0.000000
9/22/2011	4:21:29 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:21:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:21:29 PM	Tube furnace set to 150
9/22/2011	4:21:59 PM	H2 valve closed
9/22/2011	4:21:59 PM	BCl3 valve closed
9/22/2011	4:21:59 PM	PH3 valve closed
9/22/2011	4:21:59 PM	SiCl4 pre valve closed
9/22/2011	4:21:59 PM	SiCl4 post valve closed
9/22/2011	4:21:59 PM	Bypass valve closed
9/22/2011	4:21:59 PM	Bubbler valve closed
9/22/2011	4:21:59 PM	Helium valve opened
9/22/2011	4:21:59 PM	Main Vac valve opened
9/22/2011	4:21:59 PM	Helium MFC set to  20.000000
9/22/2011	4:21:59 PM	H2 MFC set to  0.000000
9/22/2011	4:21:59 PM	BCl3 MFC set to  0.000000
9/22/2011	4:21:59 PM	PHl3 MFC set to  0.000000
9/22/2011	4:21:59 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:21:59 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:21:59 PM	Tube furnace set to 150
9/22/2011	4:22:29 PM	Helium valve closed
9/22/2011	4:22:29 PM	H2 valve closed
9/22/2011	4:22:29 PM	BCl3 valve closed
9/22/2011	4:22:29 PM	PH3 valve closed
9/22/2011	4:22:29 PM	SiCl4 pre valve closed
9/22/2011	4:22:29 PM	SiCl4 post valve closed
9/22/2011	4:22:29 PM	Bypass valve closed
9/22/2011	4:22:29 PM	Bubbler valve closed
9/22/2011	4:22:29 PM	Main Vac valve opened
9/22/2011	4:22:29 PM	Helium MFC set to  0.000000
9/22/2011	4:22:29 PM	H2 MFC set to  0.000000
9/22/2011	4:22:29 PM	BCl3 MFC set to  0.000000
9/22/2011	4:22:29 PM	PHl3 MFC set to  0.000000
9/22/2011	4:22:29 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:22:29 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:22:29 PM	Tube furnace set to 150
9/22/2011	4:22:30 PM	Run finished at 4:22 PM
9/22/2011	4:24:18 PM	Main Vac valve closed
9/22/2011	4:24:34 PM	Main Vac valve opened
9/22/2011	4:29:23 PM	Recipe started at 4:29 PM
9/22/2011	4:29:23 PM	Helium valve closed
9/22/2011	4:29:23 PM	H2 valve closed
9/22/2011	4:29:23 PM	BCl3 valve closed
9/22/2011	4:29:23 PM	PH3 valve closed
9/22/2011	4:29:23 PM	SiCl4 pre valve closed
9/22/2011	4:29:24 PM	SiCl4 post valve closed
9/22/2011	4:29:24 PM	Main Vac valve closed
9/22/2011	4:29:24 PM	Bypass valve closed
9/22/2011	4:29:24 PM	Bubbler valve closed
9/22/2011	4:29:24 PM	Helium MFC set to  0.000000
9/22/2011	4:29:24 PM	H2 MFC set to  0.000000
9/22/2011	4:29:24 PM	BCl3 MFC set to  0.000000
9/22/2011	4:29:24 PM	PHl3 MFC set to  0.000000
9/22/2011	4:29:24 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:29:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:29:24 PM	Tube furnace set to 0
9/22/2011	4:29:27 PM	Helium valve closed
9/22/2011	4:29:27 PM	BCl3 valve closed
9/22/2011	4:29:27 PM	PH3 valve closed
9/22/2011	4:29:27 PM	SiCl4 pre valve closed
9/22/2011	4:29:27 PM	SiCl4 post valve closed
9/22/2011	4:29:27 PM	Main Vac valve closed
9/22/2011	4:29:27 PM	Bypass valve closed
9/22/2011	4:29:27 PM	Bubbler valve closed
9/22/2011	4:29:27 PM	H2 valve opened
9/22/2011	4:29:27 PM	Helium MFC set to  0.000000
9/22/2011	4:29:27 PM	H2 MFC set to  500.000000
9/22/2011	4:29:27 PM	BCl3 MFC set to  0.000000
9/22/2011	4:29:27 PM	PHl3 MFC set to  0.000000
9/22/2011	4:29:27 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:29:27 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:29:27 PM	Tube furnace set to 0
9/22/2011	4:30:30 PM	Helium valve closed
9/22/2011	4:30:30 PM	BCl3 valve closed
9/22/2011	4:30:30 PM	PH3 valve closed
9/22/2011	4:30:30 PM	SiCl4 pre valve closed
9/22/2011	4:30:30 PM	SiCl4 post valve closed
9/22/2011	4:30:30 PM	Main Vac valve closed
9/22/2011	4:30:30 PM	Bypass valve closed
9/22/2011	4:30:30 PM	H2 valve opened
9/22/2011	4:30:30 PM	Bubbler valve opened
9/22/2011	4:30:30 PM	Helium MFC set to  0.000000
9/22/2011	4:30:30 PM	H2 MFC set to  500.000000
9/22/2011	4:30:30 PM	BCl3 MFC set to  0.000000
9/22/2011	4:30:30 PM	PHl3 MFC set to  0.000000
9/22/2011	4:30:30 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:30:30 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:30:30 PM	Tube furnace set to 0
9/22/2011	4:30:31 PM	Helium valve closed
9/22/2011	4:30:31 PM	BCl3 valve closed
9/22/2011	4:30:31 PM	PH3 valve closed
9/22/2011	4:30:31 PM	SiCl4 pre valve closed
9/22/2011	4:30:31 PM	SiCl4 post valve closed
9/22/2011	4:30:31 PM	Main Vac valve closed
9/22/2011	4:30:31 PM	Bypass valve closed
9/22/2011	4:30:31 PM	H2 valve opened
9/22/2011	4:30:31 PM	Bubbler valve opened
9/22/2011	4:30:31 PM	Helium MFC set to  0.000000
9/22/2011	4:30:31 PM	H2 MFC set to  500.000000
9/22/2011	4:30:31 PM	BCl3 MFC set to  0.000000
9/22/2011	4:30:31 PM	PHl3 MFC set to  0.000000
9/22/2011	4:30:31 PM	SiCl4 MFC set to  0.000000
9/22/2011	4:30:31 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:30:32 PM	Tube furnace set to 1000
9/22/2011	4:50:31 PM	Helium valve closed
9/22/2011	4:50:31 PM	PH3 valve closed
9/22/2011	4:50:31 PM	Main Vac valve closed
9/22/2011	4:50:31 PM	Bypass valve closed
9/22/2011	4:50:31 PM	H2 valve opened
9/22/2011	4:50:31 PM	BCl3 valve opened
9/22/2011	4:50:31 PM	SiCl4 pre valve opened
9/22/2011	4:50:32 PM	SiCl4 post valve opened
9/22/2011	4:50:32 PM	Bubbler valve opened
9/22/2011	4:50:32 PM	Helium MFC set to  0.000000
9/22/2011	4:50:32 PM	H2 MFC set to  500.000000
9/22/2011	4:50:32 PM	BCl3 MFC set to  2.500000
9/22/2011	4:50:32 PM	PHl3 MFC set to  0.000000
9/22/2011	4:50:32 PM	SiCl4 MFC set to  50.000000
9/22/2011	4:50:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	4:50:32 PM	Tube furnace set to 1000
9/22/2011	5:05:32 PM	Helium valve closed
9/22/2011	5:05:32 PM	BCl3 valve closed
9/22/2011	5:05:32 PM	PH3 valve closed
9/22/2011	5:05:32 PM	SiCl4 pre valve closed
9/22/2011	5:05:32 PM	SiCl4 post valve closed
9/22/2011	5:05:32 PM	Main Vac valve closed
9/22/2011	5:05:32 PM	Bypass valve closed
9/22/2011	5:05:32 PM	H2 valve opened
9/22/2011	5:05:32 PM	Bubbler valve opened
9/22/2011	5:05:32 PM	Helium MFC set to  0.000000
9/22/2011	5:05:32 PM	H2 MFC set to  500.000000
9/22/2011	5:05:32 PM	BCl3 MFC set to  0.000000
9/22/2011	5:05:32 PM	PHl3 MFC set to  0.000000
9/22/2011	5:05:32 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:05:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:05:32 PM	Tube furnace set to 750
9/22/2011	5:10:32 PM	H2 valve closed
9/22/2011	5:10:32 PM	BCl3 valve closed
9/22/2011	5:10:32 PM	PH3 valve closed
9/22/2011	5:10:32 PM	SiCl4 pre valve closed
9/22/2011	5:10:32 PM	SiCl4 post valve closed
9/22/2011	5:10:32 PM	Main Vac valve closed
9/22/2011	5:10:32 PM	Bypass valve closed
9/22/2011	5:10:32 PM	Helium valve opened
9/22/2011	5:10:32 PM	Bubbler valve opened
9/22/2011	5:10:32 PM	Helium MFC set to  500.000000
9/22/2011	5:10:32 PM	H2 MFC set to  0.000000
9/22/2011	5:10:32 PM	BCl3 MFC set to  0.000000
9/22/2011	5:10:32 PM	PHl3 MFC set to  0.000000
9/22/2011	5:10:32 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:10:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:10:32 PM	Tube furnace set to 0
9/22/2011	5:30:32 PM	Helium valve closed
9/22/2011	5:30:32 PM	H2 valve closed
9/22/2011	5:30:32 PM	BCl3 valve closed
9/22/2011	5:30:32 PM	PH3 valve closed
9/22/2011	5:30:32 PM	SiCl4 pre valve closed
9/22/2011	5:30:32 PM	SiCl4 post valve closed
9/22/2011	5:30:32 PM	Main Vac valve closed
9/22/2011	5:30:32 PM	Bypass valve closed
9/22/2011	5:30:32 PM	Bubbler valve closed
9/22/2011	5:30:32 PM	Helium MFC set to  0.000000
9/22/2011	5:30:32 PM	H2 MFC set to  0.000000
9/22/2011	5:30:32 PM	BCl3 MFC set to  0.000000
9/22/2011	5:30:32 PM	PHl3 MFC set to  0.000000
9/22/2011	5:30:32 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:30:32 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:30:32 PM	Tube furnace set to 0
9/22/2011	5:30:33 PM	Run finished at 5:30 PM
9/22/2011	5:45:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	5:45:20 PM	Recipe started at 5:45 PM
9/22/2011	5:45:20 PM	Helium valve closed
9/22/2011	5:45:20 PM	H2 valve closed
9/22/2011	5:45:20 PM	BCl3 valve closed
9/22/2011	5:45:20 PM	PH3 valve closed
9/22/2011	5:45:20 PM	SiCl4 pre valve closed
9/22/2011	5:45:20 PM	SiCl4 post valve closed
9/22/2011	5:45:20 PM	Main Vac valve closed
9/22/2011	5:45:20 PM	Bubbler valve closed
9/22/2011	5:45:20 PM	Bypass valve opened
9/22/2011	5:45:20 PM	Helium MFC set to  0.000000
9/22/2011	5:45:20 PM	H2 MFC set to  0.000000
9/22/2011	5:45:20 PM	BCl3 MFC set to  0.000000
9/22/2011	5:45:20 PM	PHl3 MFC set to  0.000000
9/22/2011	5:45:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:45:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:45:20 PM	Tube furnace set to 0
9/22/2011	5:46:28 PM	Helium valve closed
9/22/2011	5:46:28 PM	H2 valve closed
9/22/2011	5:46:28 PM	BCl3 valve closed
9/22/2011	5:46:28 PM	PH3 valve closed
9/22/2011	5:46:28 PM	SiCl4 pre valve closed
9/22/2011	5:46:28 PM	SiCl4 post valve closed
9/22/2011	5:46:28 PM	Main Vac valve closed
9/22/2011	5:46:28 PM	Bubbler valve closed
9/22/2011	5:46:28 PM	Bypass valve opened
9/22/2011	5:46:28 PM	Helium MFC set to  0.000000
9/22/2011	5:46:28 PM	H2 MFC set to  0.000000
9/22/2011	5:46:28 PM	BCl3 MFC set to  0.000000
9/22/2011	5:46:28 PM	PHl3 MFC set to  0.000000
9/22/2011	5:46:28 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:46:28 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:46:28 PM	Tube furnace set to 0
9/22/2011	5:46:49 PM	Helium valve closed
9/22/2011	5:46:49 PM	H2 valve closed
9/22/2011	5:46:49 PM	BCl3 valve closed
9/22/2011	5:46:49 PM	PH3 valve closed
9/22/2011	5:46:49 PM	SiCl4 pre valve closed
9/22/2011	5:46:49 PM	SiCl4 post valve closed
9/22/2011	5:46:49 PM	Bypass valve closed
9/22/2011	5:46:49 PM	Bubbler valve closed
9/22/2011	5:46:49 PM	Main Vac valve opened
9/22/2011	5:46:49 PM	Helium MFC set to  0.000000
9/22/2011	5:46:49 PM	H2 MFC set to  0.000000
9/22/2011	5:46:49 PM	BCl3 MFC set to  0.000000
9/22/2011	5:46:49 PM	PHl3 MFC set to  0.000000
9/22/2011	5:46:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:46:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:46:49 PM	Tube furnace set to 0
9/22/2011	5:46:50 PM	Run finished at 5:46 PM
9/22/2011	5:46:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	5:47:19 PM	Recipe started at 5:47 PM
9/22/2011	5:47:19 PM	Helium valve closed
9/22/2011	5:47:19 PM	H2 valve closed
9/22/2011	5:47:19 PM	BCl3 valve closed
9/22/2011	5:47:19 PM	PH3 valve closed
9/22/2011	5:47:19 PM	SiCl4 pre valve closed
9/22/2011	5:47:19 PM	SiCl4 post valve closed
9/22/2011	5:47:19 PM	Bypass valve closed
9/22/2011	5:47:19 PM	Bubbler valve closed
9/22/2011	5:47:19 PM	Main Vac valve opened
9/22/2011	5:47:19 PM	Helium MFC set to  0.000000
9/22/2011	5:47:19 PM	H2 MFC set to  0.000000
9/22/2011	5:47:19 PM	BCl3 MFC set to  0.000000
9/22/2011	5:47:19 PM	PHl3 MFC set to  0.000000
9/22/2011	5:47:19 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:47:19 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:47:19 PM	Tube furnace set to 150
9/22/2011	5:47:49 PM	H2 valve closed
9/22/2011	5:47:49 PM	BCl3 valve closed
9/22/2011	5:47:49 PM	PH3 valve closed
9/22/2011	5:47:49 PM	SiCl4 pre valve closed
9/22/2011	5:47:49 PM	SiCl4 post valve closed
9/22/2011	5:47:49 PM	Bypass valve closed
9/22/2011	5:47:49 PM	Bubbler valve closed
9/22/2011	5:47:49 PM	Helium valve opened
9/22/2011	5:47:49 PM	Main Vac valve opened
9/22/2011	5:47:49 PM	Helium MFC set to  20.000000
9/22/2011	5:47:49 PM	H2 MFC set to  0.000000
9/22/2011	5:47:49 PM	BCl3 MFC set to  0.000000
9/22/2011	5:47:49 PM	PHl3 MFC set to  0.000000
9/22/2011	5:47:49 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:47:49 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:47:49 PM	Tube furnace set to 150
9/22/2011	5:48:20 PM	Helium valve closed
9/22/2011	5:48:20 PM	H2 valve closed
9/22/2011	5:48:20 PM	BCl3 valve closed
9/22/2011	5:48:20 PM	PH3 valve closed
9/22/2011	5:48:20 PM	SiCl4 pre valve closed
9/22/2011	5:48:20 PM	SiCl4 post valve closed
9/22/2011	5:48:20 PM	Bypass valve closed
9/22/2011	5:48:20 PM	Bubbler valve closed
9/22/2011	5:48:20 PM	Main Vac valve opened
9/22/2011	5:48:20 PM	Helium MFC set to  0.000000
9/22/2011	5:48:20 PM	H2 MFC set to  0.000000
9/22/2011	5:48:20 PM	BCl3 MFC set to  0.000000
9/22/2011	5:48:20 PM	PHl3 MFC set to  0.000000
9/22/2011	5:48:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:48:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:48:20 PM	Tube furnace set to 150
9/22/2011	5:48:50 PM	H2 valve closed
9/22/2011	5:48:50 PM	BCl3 valve closed
9/22/2011	5:48:50 PM	PH3 valve closed
9/22/2011	5:48:50 PM	SiCl4 pre valve closed
9/22/2011	5:48:50 PM	SiCl4 post valve closed
9/22/2011	5:48:50 PM	Bypass valve closed
9/22/2011	5:48:50 PM	Bubbler valve closed
9/22/2011	5:48:50 PM	Helium valve opened
9/22/2011	5:48:50 PM	Main Vac valve opened
9/22/2011	5:48:50 PM	Helium MFC set to  20.000000
9/22/2011	5:48:50 PM	H2 MFC set to  0.000000
9/22/2011	5:48:50 PM	BCl3 MFC set to  0.000000
9/22/2011	5:48:50 PM	PHl3 MFC set to  0.000000
9/22/2011	5:48:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:48:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:48:50 PM	Tube furnace set to 150
9/22/2011	5:49:20 PM	Helium valve closed
9/22/2011	5:49:20 PM	H2 valve closed
9/22/2011	5:49:20 PM	BCl3 valve closed
9/22/2011	5:49:20 PM	PH3 valve closed
9/22/2011	5:49:20 PM	SiCl4 pre valve closed
9/22/2011	5:49:20 PM	SiCl4 post valve closed
9/22/2011	5:49:20 PM	Bypass valve closed
9/22/2011	5:49:20 PM	Bubbler valve closed
9/22/2011	5:49:20 PM	Main Vac valve opened
9/22/2011	5:49:20 PM	Helium MFC set to  0.000000
9/22/2011	5:49:20 PM	H2 MFC set to  0.000000
9/22/2011	5:49:20 PM	BCl3 MFC set to  0.000000
9/22/2011	5:49:20 PM	PHl3 MFC set to  0.000000
9/22/2011	5:49:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:49:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:49:20 PM	Tube furnace set to 150
9/22/2011	5:49:50 PM	H2 valve closed
9/22/2011	5:49:50 PM	BCl3 valve closed
9/22/2011	5:49:50 PM	PH3 valve closed
9/22/2011	5:49:50 PM	SiCl4 pre valve closed
9/22/2011	5:49:50 PM	SiCl4 post valve closed
9/22/2011	5:49:50 PM	Bypass valve closed
9/22/2011	5:49:50 PM	Bubbler valve closed
9/22/2011	5:49:50 PM	Helium valve opened
9/22/2011	5:49:50 PM	Main Vac valve opened
9/22/2011	5:49:50 PM	Helium MFC set to  20.000000
9/22/2011	5:49:50 PM	H2 MFC set to  0.000000
9/22/2011	5:49:50 PM	BCl3 MFC set to  0.000000
9/22/2011	5:49:50 PM	PHl3 MFC set to  0.000000
9/22/2011	5:49:50 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:49:50 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:49:50 PM	Tube furnace set to 150
9/22/2011	5:50:20 PM	Helium valve closed
9/22/2011	5:50:20 PM	H2 valve closed
9/22/2011	5:50:20 PM	BCl3 valve closed
9/22/2011	5:50:20 PM	PH3 valve closed
9/22/2011	5:50:20 PM	SiCl4 pre valve closed
9/22/2011	5:50:20 PM	SiCl4 post valve closed
9/22/2011	5:50:20 PM	Bypass valve closed
9/22/2011	5:50:20 PM	Bubbler valve closed
9/22/2011	5:50:20 PM	Main Vac valve opened
9/22/2011	5:50:20 PM	Helium MFC set to  0.000000
9/22/2011	5:50:20 PM	H2 MFC set to  0.000000
9/22/2011	5:50:20 PM	BCl3 MFC set to  0.000000
9/22/2011	5:50:20 PM	PHl3 MFC set to  0.000000
9/22/2011	5:50:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:50:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:50:21 PM	Tube furnace set to 150
9/22/2011	5:50:51 PM	H2 valve closed
9/22/2011	5:50:51 PM	BCl3 valve closed
9/22/2011	5:50:51 PM	PH3 valve closed
9/22/2011	5:50:51 PM	SiCl4 pre valve closed
9/22/2011	5:50:51 PM	SiCl4 post valve closed
9/22/2011	5:50:51 PM	Bypass valve closed
9/22/2011	5:50:51 PM	Bubbler valve closed
9/22/2011	5:50:51 PM	Helium valve opened
9/22/2011	5:50:51 PM	Main Vac valve opened
9/22/2011	5:50:51 PM	Helium MFC set to  20.000000
9/22/2011	5:50:51 PM	H2 MFC set to  0.000000
9/22/2011	5:50:51 PM	BCl3 MFC set to  0.000000
9/22/2011	5:50:51 PM	PHl3 MFC set to  0.000000
9/22/2011	5:50:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:50:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:50:51 PM	Tube furnace set to 150
9/22/2011	5:51:21 PM	Helium valve closed
9/22/2011	5:51:21 PM	H2 valve closed
9/22/2011	5:51:21 PM	BCl3 valve closed
9/22/2011	5:51:21 PM	PH3 valve closed
9/22/2011	5:51:21 PM	SiCl4 pre valve closed
9/22/2011	5:51:21 PM	SiCl4 post valve closed
9/22/2011	5:51:21 PM	Bypass valve closed
9/22/2011	5:51:21 PM	Bubbler valve closed
9/22/2011	5:51:21 PM	Main Vac valve opened
9/22/2011	5:51:21 PM	Helium MFC set to  0.000000
9/22/2011	5:51:21 PM	H2 MFC set to  0.000000
9/22/2011	5:51:21 PM	BCl3 MFC set to  0.000000
9/22/2011	5:51:21 PM	PHl3 MFC set to  0.000000
9/22/2011	5:51:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:51:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:51:21 PM	Tube furnace set to 150
9/22/2011	5:51:51 PM	H2 valve closed
9/22/2011	5:51:51 PM	BCl3 valve closed
9/22/2011	5:51:51 PM	PH3 valve closed
9/22/2011	5:51:51 PM	SiCl4 pre valve closed
9/22/2011	5:51:51 PM	SiCl4 post valve closed
9/22/2011	5:51:51 PM	Bypass valve closed
9/22/2011	5:51:51 PM	Bubbler valve closed
9/22/2011	5:51:51 PM	Helium valve opened
9/22/2011	5:51:51 PM	Main Vac valve opened
9/22/2011	5:51:51 PM	Helium MFC set to  20.000000
9/22/2011	5:51:51 PM	H2 MFC set to  0.000000
9/22/2011	5:51:51 PM	BCl3 MFC set to  0.000000
9/22/2011	5:51:51 PM	PHl3 MFC set to  0.000000
9/22/2011	5:51:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:51:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:51:51 PM	Tube furnace set to 150
9/22/2011	5:52:21 PM	Helium valve closed
9/22/2011	5:52:21 PM	H2 valve closed
9/22/2011	5:52:21 PM	BCl3 valve closed
9/22/2011	5:52:21 PM	PH3 valve closed
9/22/2011	5:52:21 PM	SiCl4 pre valve closed
9/22/2011	5:52:21 PM	SiCl4 post valve closed
9/22/2011	5:52:21 PM	Bypass valve closed
9/22/2011	5:52:21 PM	Bubbler valve closed
9/22/2011	5:52:21 PM	Main Vac valve opened
9/22/2011	5:52:21 PM	Helium MFC set to  0.000000
9/22/2011	5:52:21 PM	H2 MFC set to  0.000000
9/22/2011	5:52:21 PM	BCl3 MFC set to  0.000000
9/22/2011	5:52:21 PM	PHl3 MFC set to  0.000000
9/22/2011	5:52:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:52:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:52:21 PM	Tube furnace set to 150
9/22/2011	5:52:51 PM	H2 valve closed
9/22/2011	5:52:51 PM	BCl3 valve closed
9/22/2011	5:52:51 PM	PH3 valve closed
9/22/2011	5:52:51 PM	SiCl4 pre valve closed
9/22/2011	5:52:51 PM	SiCl4 post valve closed
9/22/2011	5:52:51 PM	Bypass valve closed
9/22/2011	5:52:51 PM	Bubbler valve closed
9/22/2011	5:52:51 PM	Helium valve opened
9/22/2011	5:52:51 PM	Main Vac valve opened
9/22/2011	5:52:51 PM	Helium MFC set to  20.000000
9/22/2011	5:52:51 PM	H2 MFC set to  0.000000
9/22/2011	5:52:51 PM	BCl3 MFC set to  0.000000
9/22/2011	5:52:51 PM	PHl3 MFC set to  0.000000
9/22/2011	5:52:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:52:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:52:52 PM	Tube furnace set to 150
9/22/2011	5:53:22 PM	Helium valve closed
9/22/2011	5:53:22 PM	H2 valve closed
9/22/2011	5:53:22 PM	BCl3 valve closed
9/22/2011	5:53:22 PM	PH3 valve closed
9/22/2011	5:53:22 PM	SiCl4 pre valve closed
9/22/2011	5:53:22 PM	SiCl4 post valve closed
9/22/2011	5:53:22 PM	Bypass valve closed
9/22/2011	5:53:22 PM	Bubbler valve closed
9/22/2011	5:53:22 PM	Main Vac valve opened
9/22/2011	5:53:22 PM	Helium MFC set to  0.000000
9/22/2011	5:53:22 PM	H2 MFC set to  0.000000
9/22/2011	5:53:22 PM	BCl3 MFC set to  0.000000
9/22/2011	5:53:22 PM	PHl3 MFC set to  0.000000
9/22/2011	5:53:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:53:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:53:22 PM	Tube furnace set to 150
9/22/2011	5:53:52 PM	H2 valve closed
9/22/2011	5:53:52 PM	BCl3 valve closed
9/22/2011	5:53:52 PM	PH3 valve closed
9/22/2011	5:53:52 PM	SiCl4 pre valve closed
9/22/2011	5:53:52 PM	SiCl4 post valve closed
9/22/2011	5:53:52 PM	Bypass valve closed
9/22/2011	5:53:52 PM	Bubbler valve closed
9/22/2011	5:53:52 PM	Helium valve opened
9/22/2011	5:53:52 PM	Main Vac valve opened
9/22/2011	5:53:52 PM	Helium MFC set to  20.000000
9/22/2011	5:53:52 PM	H2 MFC set to  0.000000
9/22/2011	5:53:52 PM	BCl3 MFC set to  0.000000
9/22/2011	5:53:52 PM	PHl3 MFC set to  0.000000
9/22/2011	5:53:52 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:53:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:53:52 PM	Tube furnace set to 150
9/22/2011	5:54:22 PM	Helium valve closed
9/22/2011	5:54:22 PM	H2 valve closed
9/22/2011	5:54:22 PM	BCl3 valve closed
9/22/2011	5:54:22 PM	PH3 valve closed
9/22/2011	5:54:22 PM	SiCl4 pre valve closed
9/22/2011	5:54:22 PM	SiCl4 post valve closed
9/22/2011	5:54:22 PM	Bypass valve closed
9/22/2011	5:54:22 PM	Bubbler valve closed
9/22/2011	5:54:22 PM	Main Vac valve opened
9/22/2011	5:54:22 PM	Helium MFC set to  0.000000
9/22/2011	5:54:22 PM	H2 MFC set to  0.000000
9/22/2011	5:54:22 PM	BCl3 MFC set to  0.000000
9/22/2011	5:54:22 PM	PHl3 MFC set to  0.000000
9/22/2011	5:54:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:54:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:54:22 PM	Tube furnace set to 150
9/22/2011	5:54:52 PM	H2 valve closed
9/22/2011	5:54:52 PM	BCl3 valve closed
9/22/2011	5:54:52 PM	PH3 valve closed
9/22/2011	5:54:52 PM	SiCl4 pre valve closed
9/22/2011	5:54:52 PM	SiCl4 post valve closed
9/22/2011	5:54:52 PM	Bypass valve closed
9/22/2011	5:54:52 PM	Bubbler valve closed
9/22/2011	5:54:52 PM	Helium valve opened
9/22/2011	5:54:52 PM	Main Vac valve opened
9/22/2011	5:54:52 PM	Helium MFC set to  20.000000
9/22/2011	5:54:52 PM	H2 MFC set to  0.000000
9/22/2011	5:54:52 PM	BCl3 MFC set to  0.000000
9/22/2011	5:54:52 PM	PHl3 MFC set to  0.000000
9/22/2011	5:54:52 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:54:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:54:52 PM	Tube furnace set to 150
9/22/2011	5:55:22 PM	Helium valve closed
9/22/2011	5:55:22 PM	H2 valve closed
9/22/2011	5:55:22 PM	BCl3 valve closed
9/22/2011	5:55:22 PM	PH3 valve closed
9/22/2011	5:55:22 PM	SiCl4 pre valve closed
9/22/2011	5:55:22 PM	SiCl4 post valve closed
9/22/2011	5:55:22 PM	Bypass valve closed
9/22/2011	5:55:22 PM	Bubbler valve closed
9/22/2011	5:55:22 PM	Main Vac valve opened
9/22/2011	5:55:22 PM	Helium MFC set to  0.000000
9/22/2011	5:55:22 PM	H2 MFC set to  0.000000
9/22/2011	5:55:22 PM	BCl3 MFC set to  0.000000
9/22/2011	5:55:22 PM	PHl3 MFC set to  0.000000
9/22/2011	5:55:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:55:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:55:23 PM	Tube furnace set to 150
9/22/2011	5:55:53 PM	H2 valve closed
9/22/2011	5:55:53 PM	BCl3 valve closed
9/22/2011	5:55:53 PM	PH3 valve closed
9/22/2011	5:55:53 PM	SiCl4 pre valve closed
9/22/2011	5:55:53 PM	SiCl4 post valve closed
9/22/2011	5:55:53 PM	Bypass valve closed
9/22/2011	5:55:53 PM	Bubbler valve closed
9/22/2011	5:55:53 PM	Helium valve opened
9/22/2011	5:55:53 PM	Main Vac valve opened
9/22/2011	5:55:53 PM	Helium MFC set to  20.000000
9/22/2011	5:55:53 PM	H2 MFC set to  0.000000
9/22/2011	5:55:53 PM	BCl3 MFC set to  0.000000
9/22/2011	5:55:53 PM	PHl3 MFC set to  0.000000
9/22/2011	5:55:53 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:55:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:55:53 PM	Tube furnace set to 150
9/22/2011	5:56:23 PM	Helium valve closed
9/22/2011	5:56:23 PM	H2 valve closed
9/22/2011	5:56:23 PM	BCl3 valve closed
9/22/2011	5:56:23 PM	PH3 valve closed
9/22/2011	5:56:23 PM	SiCl4 pre valve closed
9/22/2011	5:56:23 PM	SiCl4 post valve closed
9/22/2011	5:56:23 PM	Bypass valve closed
9/22/2011	5:56:23 PM	Bubbler valve closed
9/22/2011	5:56:23 PM	Main Vac valve opened
9/22/2011	5:56:23 PM	Helium MFC set to  0.000000
9/22/2011	5:56:23 PM	H2 MFC set to  0.000000
9/22/2011	5:56:23 PM	BCl3 MFC set to  0.000000
9/22/2011	5:56:23 PM	PHl3 MFC set to  0.000000
9/22/2011	5:56:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:56:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:56:23 PM	Tube furnace set to 150
9/22/2011	5:56:53 PM	H2 valve closed
9/22/2011	5:56:53 PM	BCl3 valve closed
9/22/2011	5:56:53 PM	PH3 valve closed
9/22/2011	5:56:53 PM	SiCl4 pre valve closed
9/22/2011	5:56:53 PM	SiCl4 post valve closed
9/22/2011	5:56:53 PM	Bypass valve closed
9/22/2011	5:56:53 PM	Bubbler valve closed
9/22/2011	5:56:53 PM	Helium valve opened
9/22/2011	5:56:53 PM	Main Vac valve opened
9/22/2011	5:56:53 PM	Helium MFC set to  20.000000
9/22/2011	5:56:53 PM	H2 MFC set to  0.000000
9/22/2011	5:56:53 PM	BCl3 MFC set to  0.000000
9/22/2011	5:56:53 PM	PHl3 MFC set to  0.000000
9/22/2011	5:56:53 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:56:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:56:53 PM	Tube furnace set to 150
9/22/2011	5:57:23 PM	Helium valve closed
9/22/2011	5:57:23 PM	H2 valve closed
9/22/2011	5:57:23 PM	BCl3 valve closed
9/22/2011	5:57:23 PM	PH3 valve closed
9/22/2011	5:57:23 PM	SiCl4 pre valve closed
9/22/2011	5:57:23 PM	SiCl4 post valve closed
9/22/2011	5:57:23 PM	Bypass valve closed
9/22/2011	5:57:23 PM	Bubbler valve closed
9/22/2011	5:57:23 PM	Main Vac valve opened
9/22/2011	5:57:23 PM	Helium MFC set to  0.000000
9/22/2011	5:57:23 PM	H2 MFC set to  0.000000
9/22/2011	5:57:23 PM	BCl3 MFC set to  0.000000
9/22/2011	5:57:23 PM	PHl3 MFC set to  0.000000
9/22/2011	5:57:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:57:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:57:23 PM	Tube furnace set to 150
9/22/2011	5:57:24 PM	Run finished at 5:57 PM
9/22/2011	5:58:21 PM	Recipe started at 5:58 PM
9/22/2011	5:58:21 PM	Helium valve closed
9/22/2011	5:58:21 PM	H2 valve closed
9/22/2011	5:58:21 PM	BCl3 valve closed
9/22/2011	5:58:21 PM	PH3 valve closed
9/22/2011	5:58:21 PM	SiCl4 pre valve closed
9/22/2011	5:58:21 PM	SiCl4 post valve closed
9/22/2011	5:58:21 PM	Bypass valve closed
9/22/2011	5:58:21 PM	Bubbler valve closed
9/22/2011	5:58:21 PM	Main Vac valve opened
9/22/2011	5:58:21 PM	Helium MFC set to  0.000000
9/22/2011	5:58:21 PM	H2 MFC set to  0.000000
9/22/2011	5:58:21 PM	BCl3 MFC set to  0.000000
9/22/2011	5:58:21 PM	PHl3 MFC set to  0.000000
9/22/2011	5:58:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:58:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:58:21 PM	Tube furnace set to 150
9/22/2011	5:58:51 PM	H2 valve closed
9/22/2011	5:58:51 PM	BCl3 valve closed
9/22/2011	5:58:51 PM	PH3 valve closed
9/22/2011	5:58:51 PM	SiCl4 pre valve closed
9/22/2011	5:58:51 PM	SiCl4 post valve closed
9/22/2011	5:58:51 PM	Bypass valve closed
9/22/2011	5:58:51 PM	Bubbler valve closed
9/22/2011	5:58:51 PM	Helium valve opened
9/22/2011	5:58:51 PM	Main Vac valve opened
9/22/2011	5:58:51 PM	Helium MFC set to  20.000000
9/22/2011	5:58:51 PM	H2 MFC set to  0.000000
9/22/2011	5:58:51 PM	BCl3 MFC set to  0.000000
9/22/2011	5:58:51 PM	PHl3 MFC set to  0.000000
9/22/2011	5:58:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:58:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:58:51 PM	Tube furnace set to 150
9/22/2011	5:59:21 PM	Helium valve closed
9/22/2011	5:59:21 PM	H2 valve closed
9/22/2011	5:59:21 PM	BCl3 valve closed
9/22/2011	5:59:21 PM	PH3 valve closed
9/22/2011	5:59:21 PM	SiCl4 pre valve closed
9/22/2011	5:59:21 PM	SiCl4 post valve closed
9/22/2011	5:59:21 PM	Bypass valve closed
9/22/2011	5:59:21 PM	Bubbler valve closed
9/22/2011	5:59:21 PM	Main Vac valve opened
9/22/2011	5:59:21 PM	Helium MFC set to  0.000000
9/22/2011	5:59:21 PM	H2 MFC set to  0.000000
9/22/2011	5:59:21 PM	BCl3 MFC set to  0.000000
9/22/2011	5:59:21 PM	PHl3 MFC set to  0.000000
9/22/2011	5:59:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:59:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:59:21 PM	Tube furnace set to 150
9/22/2011	5:59:51 PM	H2 valve closed
9/22/2011	5:59:51 PM	BCl3 valve closed
9/22/2011	5:59:51 PM	PH3 valve closed
9/22/2011	5:59:51 PM	SiCl4 pre valve closed
9/22/2011	5:59:51 PM	SiCl4 post valve closed
9/22/2011	5:59:51 PM	Bypass valve closed
9/22/2011	5:59:51 PM	Bubbler valve closed
9/22/2011	5:59:51 PM	Helium valve opened
9/22/2011	5:59:51 PM	Main Vac valve opened
9/22/2011	5:59:51 PM	Helium MFC set to  20.000000
9/22/2011	5:59:51 PM	H2 MFC set to  0.000000
9/22/2011	5:59:51 PM	BCl3 MFC set to  0.000000
9/22/2011	5:59:51 PM	PHl3 MFC set to  0.000000
9/22/2011	5:59:51 PM	SiCl4 MFC set to  0.000000
9/22/2011	5:59:51 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	5:59:51 PM	Tube furnace set to 150
9/22/2011	6:00:21 PM	Helium valve closed
9/22/2011	6:00:21 PM	H2 valve closed
9/22/2011	6:00:21 PM	BCl3 valve closed
9/22/2011	6:00:21 PM	PH3 valve closed
9/22/2011	6:00:21 PM	SiCl4 pre valve closed
9/22/2011	6:00:21 PM	SiCl4 post valve closed
9/22/2011	6:00:21 PM	Bypass valve closed
9/22/2011	6:00:21 PM	Bubbler valve closed
9/22/2011	6:00:22 PM	Main Vac valve opened
9/22/2011	6:00:22 PM	Helium MFC set to  0.000000
9/22/2011	6:00:22 PM	H2 MFC set to  0.000000
9/22/2011	6:00:22 PM	BCl3 MFC set to  0.000000
9/22/2011	6:00:22 PM	PHl3 MFC set to  0.000000
9/22/2011	6:00:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:00:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:00:22 PM	Tube furnace set to 150
9/22/2011	6:00:52 PM	H2 valve closed
9/22/2011	6:00:52 PM	BCl3 valve closed
9/22/2011	6:00:52 PM	PH3 valve closed
9/22/2011	6:00:52 PM	SiCl4 pre valve closed
9/22/2011	6:00:52 PM	SiCl4 post valve closed
9/22/2011	6:00:52 PM	Bypass valve closed
9/22/2011	6:00:52 PM	Bubbler valve closed
9/22/2011	6:00:52 PM	Helium valve opened
9/22/2011	6:00:52 PM	Main Vac valve opened
9/22/2011	6:00:52 PM	Helium MFC set to  20.000000
9/22/2011	6:00:52 PM	H2 MFC set to  0.000000
9/22/2011	6:00:52 PM	BCl3 MFC set to  0.000000
9/22/2011	6:00:52 PM	PHl3 MFC set to  0.000000
9/22/2011	6:00:52 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:00:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:00:52 PM	Tube furnace set to 150
9/22/2011	6:01:22 PM	Helium valve closed
9/22/2011	6:01:22 PM	H2 valve closed
9/22/2011	6:01:22 PM	BCl3 valve closed
9/22/2011	6:01:22 PM	PH3 valve closed
9/22/2011	6:01:22 PM	SiCl4 pre valve closed
9/22/2011	6:01:22 PM	SiCl4 post valve closed
9/22/2011	6:01:22 PM	Bypass valve closed
9/22/2011	6:01:22 PM	Bubbler valve closed
9/22/2011	6:01:22 PM	Main Vac valve opened
9/22/2011	6:01:22 PM	Helium MFC set to  0.000000
9/22/2011	6:01:22 PM	H2 MFC set to  0.000000
9/22/2011	6:01:22 PM	BCl3 MFC set to  0.000000
9/22/2011	6:01:22 PM	PHl3 MFC set to  0.000000
9/22/2011	6:01:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:01:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:01:22 PM	Tube furnace set to 150
9/22/2011	6:01:52 PM	H2 valve closed
9/22/2011	6:01:52 PM	BCl3 valve closed
9/22/2011	6:01:52 PM	PH3 valve closed
9/22/2011	6:01:52 PM	SiCl4 pre valve closed
9/22/2011	6:01:52 PM	SiCl4 post valve closed
9/22/2011	6:01:52 PM	Bypass valve closed
9/22/2011	6:01:52 PM	Bubbler valve closed
9/22/2011	6:01:52 PM	Helium valve opened
9/22/2011	6:01:52 PM	Main Vac valve opened
9/22/2011	6:01:52 PM	Helium MFC set to  20.000000
9/22/2011	6:01:52 PM	H2 MFC set to  0.000000
9/22/2011	6:01:52 PM	BCl3 MFC set to  0.000000
9/22/2011	6:01:52 PM	PHl3 MFC set to  0.000000
9/22/2011	6:01:52 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:01:52 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:01:52 PM	Tube furnace set to 150
9/22/2011	6:02:22 PM	Helium valve closed
9/22/2011	6:02:22 PM	H2 valve closed
9/22/2011	6:02:22 PM	BCl3 valve closed
9/22/2011	6:02:22 PM	PH3 valve closed
9/22/2011	6:02:22 PM	SiCl4 pre valve closed
9/22/2011	6:02:22 PM	SiCl4 post valve closed
9/22/2011	6:02:22 PM	Bypass valve closed
9/22/2011	6:02:22 PM	Bubbler valve closed
9/22/2011	6:02:22 PM	Main Vac valve opened
9/22/2011	6:02:22 PM	Helium MFC set to  0.000000
9/22/2011	6:02:22 PM	H2 MFC set to  0.000000
9/22/2011	6:02:22 PM	BCl3 MFC set to  0.000000
9/22/2011	6:02:22 PM	PHl3 MFC set to  0.000000
9/22/2011	6:02:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:02:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:02:22 PM	Tube furnace set to 150
9/22/2011	6:02:53 PM	H2 valve closed
9/22/2011	6:02:53 PM	BCl3 valve closed
9/22/2011	6:02:53 PM	PH3 valve closed
9/22/2011	6:02:53 PM	SiCl4 pre valve closed
9/22/2011	6:02:53 PM	SiCl4 post valve closed
9/22/2011	6:02:53 PM	Bypass valve closed
9/22/2011	6:02:53 PM	Bubbler valve closed
9/22/2011	6:02:53 PM	Helium valve opened
9/22/2011	6:02:53 PM	Main Vac valve opened
9/22/2011	6:02:53 PM	Helium MFC set to  20.000000
9/22/2011	6:02:53 PM	H2 MFC set to  0.000000
9/22/2011	6:02:53 PM	BCl3 MFC set to  0.000000
9/22/2011	6:02:53 PM	PHl3 MFC set to  0.000000
9/22/2011	6:02:53 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:02:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:02:53 PM	Tube furnace set to 150
9/22/2011	6:03:23 PM	Helium valve closed
9/22/2011	6:03:23 PM	H2 valve closed
9/22/2011	6:03:23 PM	BCl3 valve closed
9/22/2011	6:03:23 PM	PH3 valve closed
9/22/2011	6:03:23 PM	SiCl4 pre valve closed
9/22/2011	6:03:23 PM	SiCl4 post valve closed
9/22/2011	6:03:23 PM	Bypass valve closed
9/22/2011	6:03:23 PM	Bubbler valve closed
9/22/2011	6:03:23 PM	Main Vac valve opened
9/22/2011	6:03:23 PM	Helium MFC set to  0.000000
9/22/2011	6:03:23 PM	H2 MFC set to  0.000000
9/22/2011	6:03:23 PM	BCl3 MFC set to  0.000000
9/22/2011	6:03:23 PM	PHl3 MFC set to  0.000000
9/22/2011	6:03:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:03:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:03:23 PM	Tube furnace set to 150
9/22/2011	6:03:53 PM	H2 valve closed
9/22/2011	6:03:53 PM	BCl3 valve closed
9/22/2011	6:03:53 PM	PH3 valve closed
9/22/2011	6:03:53 PM	SiCl4 pre valve closed
9/22/2011	6:03:53 PM	SiCl4 post valve closed
9/22/2011	6:03:53 PM	Bypass valve closed
9/22/2011	6:03:53 PM	Bubbler valve closed
9/22/2011	6:03:53 PM	Helium valve opened
9/22/2011	6:03:53 PM	Main Vac valve opened
9/22/2011	6:03:53 PM	Helium MFC set to  20.000000
9/22/2011	6:03:53 PM	H2 MFC set to  0.000000
9/22/2011	6:03:53 PM	BCl3 MFC set to  0.000000
9/22/2011	6:03:53 PM	PHl3 MFC set to  0.000000
9/22/2011	6:03:53 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:03:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:03:53 PM	Tube furnace set to 150
9/22/2011	6:04:23 PM	Helium valve closed
9/22/2011	6:04:23 PM	H2 valve closed
9/22/2011	6:04:23 PM	BCl3 valve closed
9/22/2011	6:04:23 PM	PH3 valve closed
9/22/2011	6:04:23 PM	SiCl4 pre valve closed
9/22/2011	6:04:23 PM	SiCl4 post valve closed
9/22/2011	6:04:23 PM	Bypass valve closed
9/22/2011	6:04:23 PM	Bubbler valve closed
9/22/2011	6:04:23 PM	Main Vac valve opened
9/22/2011	6:04:23 PM	Helium MFC set to  0.000000
9/22/2011	6:04:23 PM	H2 MFC set to  0.000000
9/22/2011	6:04:23 PM	BCl3 MFC set to  0.000000
9/22/2011	6:04:23 PM	PHl3 MFC set to  0.000000
9/22/2011	6:04:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:04:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:04:23 PM	Tube furnace set to 150
9/22/2011	6:04:53 PM	H2 valve closed
9/22/2011	6:04:53 PM	BCl3 valve closed
9/22/2011	6:04:53 PM	PH3 valve closed
9/22/2011	6:04:53 PM	SiCl4 pre valve closed
9/22/2011	6:04:53 PM	SiCl4 post valve closed
9/22/2011	6:04:53 PM	Bypass valve closed
9/22/2011	6:04:53 PM	Bubbler valve closed
9/22/2011	6:04:53 PM	Helium valve opened
9/22/2011	6:04:53 PM	Main Vac valve opened
9/22/2011	6:04:53 PM	Helium MFC set to  20.000000
9/22/2011	6:04:53 PM	H2 MFC set to  0.000000
9/22/2011	6:04:53 PM	BCl3 MFC set to  0.000000
9/22/2011	6:04:53 PM	PHl3 MFC set to  0.000000
9/22/2011	6:04:53 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:04:53 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:04:54 PM	Tube furnace set to 150
9/22/2011	6:05:24 PM	Helium valve closed
9/22/2011	6:05:24 PM	H2 valve closed
9/22/2011	6:05:24 PM	BCl3 valve closed
9/22/2011	6:05:24 PM	PH3 valve closed
9/22/2011	6:05:24 PM	SiCl4 pre valve closed
9/22/2011	6:05:24 PM	SiCl4 post valve closed
9/22/2011	6:05:24 PM	Bypass valve closed
9/22/2011	6:05:24 PM	Bubbler valve closed
9/22/2011	6:05:24 PM	Main Vac valve opened
9/22/2011	6:05:24 PM	Helium MFC set to  0.000000
9/22/2011	6:05:24 PM	H2 MFC set to  0.000000
9/22/2011	6:05:24 PM	BCl3 MFC set to  0.000000
9/22/2011	6:05:24 PM	PHl3 MFC set to  0.000000
9/22/2011	6:05:24 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:05:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:05:24 PM	Tube furnace set to 150
9/22/2011	6:05:54 PM	H2 valve closed
9/22/2011	6:05:54 PM	BCl3 valve closed
9/22/2011	6:05:54 PM	PH3 valve closed
9/22/2011	6:05:54 PM	SiCl4 pre valve closed
9/22/2011	6:05:54 PM	SiCl4 post valve closed
9/22/2011	6:05:54 PM	Bypass valve closed
9/22/2011	6:05:54 PM	Bubbler valve closed
9/22/2011	6:05:54 PM	Helium valve opened
9/22/2011	6:05:54 PM	Main Vac valve opened
9/22/2011	6:05:54 PM	Helium MFC set to  20.000000
9/22/2011	6:05:54 PM	H2 MFC set to  0.000000
9/22/2011	6:05:54 PM	BCl3 MFC set to  0.000000
9/22/2011	6:05:54 PM	PHl3 MFC set to  0.000000
9/22/2011	6:05:54 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:05:54 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:05:54 PM	Tube furnace set to 150
9/22/2011	6:06:24 PM	Helium valve closed
9/22/2011	6:06:24 PM	H2 valve closed
9/22/2011	6:06:24 PM	BCl3 valve closed
9/22/2011	6:06:24 PM	PH3 valve closed
9/22/2011	6:06:24 PM	SiCl4 pre valve closed
9/22/2011	6:06:24 PM	SiCl4 post valve closed
9/22/2011	6:06:24 PM	Bypass valve closed
9/22/2011	6:06:24 PM	Bubbler valve closed
9/22/2011	6:06:24 PM	Main Vac valve opened
9/22/2011	6:06:24 PM	Helium MFC set to  0.000000
9/22/2011	6:06:24 PM	H2 MFC set to  0.000000
9/22/2011	6:06:24 PM	BCl3 MFC set to  0.000000
9/22/2011	6:06:24 PM	PHl3 MFC set to  0.000000
9/22/2011	6:06:24 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:06:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:06:24 PM	Tube furnace set to 150
9/22/2011	6:06:54 PM	H2 valve closed
9/22/2011	6:06:54 PM	BCl3 valve closed
9/22/2011	6:06:54 PM	PH3 valve closed
9/22/2011	6:06:54 PM	SiCl4 pre valve closed
9/22/2011	6:06:54 PM	SiCl4 post valve closed
9/22/2011	6:06:54 PM	Bypass valve closed
9/22/2011	6:06:54 PM	Bubbler valve closed
9/22/2011	6:06:54 PM	Helium valve opened
9/22/2011	6:06:54 PM	Main Vac valve opened
9/22/2011	6:06:54 PM	Helium MFC set to  20.000000
9/22/2011	6:06:54 PM	H2 MFC set to  0.000000
9/22/2011	6:06:54 PM	BCl3 MFC set to  0.000000
9/22/2011	6:06:54 PM	PHl3 MFC set to  0.000000
9/22/2011	6:06:54 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:06:54 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:06:54 PM	Tube furnace set to 150
9/22/2011	6:07:24 PM	Helium valve closed
9/22/2011	6:07:24 PM	H2 valve closed
9/22/2011	6:07:24 PM	BCl3 valve closed
9/22/2011	6:07:24 PM	PH3 valve closed
9/22/2011	6:07:24 PM	SiCl4 pre valve closed
9/22/2011	6:07:24 PM	SiCl4 post valve closed
9/22/2011	6:07:24 PM	Bypass valve closed
9/22/2011	6:07:24 PM	Bubbler valve closed
9/22/2011	6:07:24 PM	Main Vac valve opened
9/22/2011	6:07:24 PM	Helium MFC set to  0.000000
9/22/2011	6:07:24 PM	H2 MFC set to  0.000000
9/22/2011	6:07:24 PM	BCl3 MFC set to  0.000000
9/22/2011	6:07:24 PM	PHl3 MFC set to  0.000000
9/22/2011	6:07:24 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:07:24 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:07:25 PM	Tube furnace set to 150
9/22/2011	6:07:55 PM	H2 valve closed
9/22/2011	6:07:55 PM	BCl3 valve closed
9/22/2011	6:07:55 PM	PH3 valve closed
9/22/2011	6:07:55 PM	SiCl4 pre valve closed
9/22/2011	6:07:55 PM	SiCl4 post valve closed
9/22/2011	6:07:55 PM	Bypass valve closed
9/22/2011	6:07:55 PM	Bubbler valve closed
9/22/2011	6:07:55 PM	Helium valve opened
9/22/2011	6:07:55 PM	Main Vac valve opened
9/22/2011	6:07:55 PM	Helium MFC set to  20.000000
9/22/2011	6:07:55 PM	H2 MFC set to  0.000000
9/22/2011	6:07:55 PM	BCl3 MFC set to  0.000000
9/22/2011	6:07:55 PM	PHl3 MFC set to  0.000000
9/22/2011	6:07:55 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:07:55 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:07:55 PM	Tube furnace set to 150
9/22/2011	6:08:25 PM	Helium valve closed
9/22/2011	6:08:25 PM	H2 valve closed
9/22/2011	6:08:25 PM	BCl3 valve closed
9/22/2011	6:08:25 PM	PH3 valve closed
9/22/2011	6:08:25 PM	SiCl4 pre valve closed
9/22/2011	6:08:25 PM	SiCl4 post valve closed
9/22/2011	6:08:25 PM	Bypass valve closed
9/22/2011	6:08:25 PM	Bubbler valve closed
9/22/2011	6:08:25 PM	Main Vac valve opened
9/22/2011	6:08:25 PM	Helium MFC set to  0.000000
9/22/2011	6:08:25 PM	H2 MFC set to  0.000000
9/22/2011	6:08:25 PM	BCl3 MFC set to  0.000000
9/22/2011	6:08:25 PM	PHl3 MFC set to  0.000000
9/22/2011	6:08:25 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:08:25 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:08:25 PM	Tube furnace set to 150
9/22/2011	6:08:26 PM	Run finished at 6:08 PM
9/22/2011	6:10:40 PM	Main Vac valve closed
9/22/2011	6:10:46 PM	Main Vac valve opened
9/22/2011	6:11:14 PM	Recipe started at 6:11 PM
9/22/2011	6:11:14 PM	Helium valve closed
9/22/2011	6:11:14 PM	H2 valve closed
9/22/2011	6:11:14 PM	BCl3 valve closed
9/22/2011	6:11:14 PM	PH3 valve closed
9/22/2011	6:11:14 PM	SiCl4 pre valve closed
9/22/2011	6:11:14 PM	SiCl4 post valve closed
9/22/2011	6:11:14 PM	Main Vac valve closed
9/22/2011	6:11:14 PM	Bypass valve closed
9/22/2011	6:11:14 PM	Bubbler valve closed
9/22/2011	6:11:14 PM	Helium MFC set to  0.000000
9/22/2011	6:11:14 PM	H2 MFC set to  0.000000
9/22/2011	6:11:14 PM	BCl3 MFC set to  0.000000
9/22/2011	6:11:14 PM	PHl3 MFC set to  0.000000
9/22/2011	6:11:14 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:11:14 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:11:14 PM	Tube furnace set to 0
9/22/2011	6:11:17 PM	Helium valve closed
9/22/2011	6:11:17 PM	BCl3 valve closed
9/22/2011	6:11:17 PM	PH3 valve closed
9/22/2011	6:11:17 PM	SiCl4 pre valve closed
9/22/2011	6:11:17 PM	SiCl4 post valve closed
9/22/2011	6:11:17 PM	Main Vac valve closed
9/22/2011	6:11:17 PM	Bypass valve closed
9/22/2011	6:11:17 PM	Bubbler valve closed
9/22/2011	6:11:17 PM	H2 valve opened
9/22/2011	6:11:17 PM	Helium MFC set to  0.000000
9/22/2011	6:11:17 PM	H2 MFC set to  500.000000
9/22/2011	6:11:17 PM	BCl3 MFC set to  0.000000
9/22/2011	6:11:17 PM	PHl3 MFC set to  0.000000
9/22/2011	6:11:17 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:11:17 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:11:17 PM	Tube furnace set to 0
9/22/2011	6:12:21 PM	Helium valve closed
9/22/2011	6:12:21 PM	BCl3 valve closed
9/22/2011	6:12:21 PM	PH3 valve closed
9/22/2011	6:12:21 PM	SiCl4 pre valve closed
9/22/2011	6:12:21 PM	SiCl4 post valve closed
9/22/2011	6:12:21 PM	Main Vac valve closed
9/22/2011	6:12:21 PM	Bypass valve closed
9/22/2011	6:12:21 PM	H2 valve opened
9/22/2011	6:12:21 PM	Bubbler valve opened
9/22/2011	6:12:21 PM	Helium MFC set to  0.000000
9/22/2011	6:12:21 PM	H2 MFC set to  500.000000
9/22/2011	6:12:21 PM	BCl3 MFC set to  0.000000
9/22/2011	6:12:21 PM	PHl3 MFC set to  0.000000
9/22/2011	6:12:21 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:12:21 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:12:21 PM	Tube furnace set to 0
9/22/2011	6:12:22 PM	Helium valve closed
9/22/2011	6:12:22 PM	BCl3 valve closed
9/22/2011	6:12:22 PM	PH3 valve closed
9/22/2011	6:12:22 PM	SiCl4 pre valve closed
9/22/2011	6:12:22 PM	SiCl4 post valve closed
9/22/2011	6:12:22 PM	Main Vac valve closed
9/22/2011	6:12:22 PM	Bypass valve closed
9/22/2011	6:12:22 PM	H2 valve opened
9/22/2011	6:12:22 PM	Bubbler valve opened
9/22/2011	6:12:22 PM	Helium MFC set to  0.000000
9/22/2011	6:12:22 PM	H2 MFC set to  500.000000
9/22/2011	6:12:22 PM	BCl3 MFC set to  0.000000
9/22/2011	6:12:22 PM	PHl3 MFC set to  0.000000
9/22/2011	6:12:22 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:12:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:12:22 PM	Tube furnace set to 1000
9/22/2011	6:32:22 PM	Helium valve closed
9/22/2011	6:32:22 PM	PH3 valve closed
9/22/2011	6:32:22 PM	Main Vac valve closed
9/22/2011	6:32:22 PM	Bypass valve closed
9/22/2011	6:32:22 PM	H2 valve opened
9/22/2011	6:32:22 PM	BCl3 valve opened
9/22/2011	6:32:22 PM	SiCl4 pre valve opened
9/22/2011	6:32:22 PM	SiCl4 post valve opened
9/22/2011	6:32:22 PM	Bubbler valve opened
9/22/2011	6:32:22 PM	Helium MFC set to  0.000000
9/22/2011	6:32:22 PM	H2 MFC set to  500.000000
9/22/2011	6:32:22 PM	BCl3 MFC set to  2.500000
9/22/2011	6:32:22 PM	PHl3 MFC set to  0.000000
9/22/2011	6:32:22 PM	SiCl4 MFC set to  50.000000
9/22/2011	6:32:22 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:32:23 PM	Tube furnace set to 1000
9/22/2011	6:47:23 PM	Helium valve closed
9/22/2011	6:47:23 PM	BCl3 valve closed
9/22/2011	6:47:23 PM	PH3 valve closed
9/22/2011	6:47:23 PM	SiCl4 pre valve closed
9/22/2011	6:47:23 PM	SiCl4 post valve closed
9/22/2011	6:47:23 PM	Main Vac valve closed
9/22/2011	6:47:23 PM	Bypass valve closed
9/22/2011	6:47:23 PM	H2 valve opened
9/22/2011	6:47:23 PM	Bubbler valve opened
9/22/2011	6:47:23 PM	Helium MFC set to  0.000000
9/22/2011	6:47:23 PM	H2 MFC set to  500.000000
9/22/2011	6:47:23 PM	BCl3 MFC set to  0.000000
9/22/2011	6:47:23 PM	PHl3 MFC set to  0.000000
9/22/2011	6:47:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:47:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:47:23 PM	Tube furnace set to 750
9/22/2011	6:52:23 PM	H2 valve closed
9/22/2011	6:52:23 PM	BCl3 valve closed
9/22/2011	6:52:23 PM	PH3 valve closed
9/22/2011	6:52:23 PM	SiCl4 pre valve closed
9/22/2011	6:52:23 PM	SiCl4 post valve closed
9/22/2011	6:52:23 PM	Main Vac valve closed
9/22/2011	6:52:23 PM	Bypass valve closed
9/22/2011	6:52:23 PM	Helium valve opened
9/22/2011	6:52:23 PM	Bubbler valve opened
9/22/2011	6:52:23 PM	Helium MFC set to  500.000000
9/22/2011	6:52:23 PM	H2 MFC set to  0.000000
9/22/2011	6:52:23 PM	BCl3 MFC set to  0.000000
9/22/2011	6:52:23 PM	PHl3 MFC set to  0.000000
9/22/2011	6:52:23 PM	SiCl4 MFC set to  0.000000
9/22/2011	6:52:23 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	6:52:23 PM	Tube furnace set to 0
9/22/2011	7:11:20 PM	Helium valve closed
9/22/2011	7:11:20 PM	H2 valve closed
9/22/2011	7:11:20 PM	BCl3 valve closed
9/22/2011	7:11:20 PM	PH3 valve closed
9/22/2011	7:11:20 PM	SiCl4 pre valve closed
9/22/2011	7:11:20 PM	SiCl4 post valve closed
9/22/2011	7:11:20 PM	Main Vac valve closed
9/22/2011	7:11:20 PM	Bypass valve closed
9/22/2011	7:11:20 PM	Bubbler valve closed
9/22/2011	7:11:20 PM	Helium MFC set to  0.000000
9/22/2011	7:11:20 PM	H2 MFC set to  0.000000
9/22/2011	7:11:20 PM	BCl3 MFC set to  0.000000
9/22/2011	7:11:20 PM	PHl3 MFC set to  0.000000
9/22/2011	7:11:20 PM	SiCl4 MFC set to  0.000000
9/22/2011	7:11:20 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:11:20 PM	Tube furnace set to 0
9/22/2011	7:11:21 PM	Run finished at 7:11 PM
9/22/2011	7:14:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	7:14:35 PM	Recipe started at 7:14 PM
9/22/2011	7:14:35 PM	Helium valve closed
9/22/2011	7:14:35 PM	H2 valve closed
9/22/2011	7:14:35 PM	BCl3 valve closed
9/22/2011	7:14:35 PM	PH3 valve closed
9/22/2011	7:14:35 PM	SiCl4 pre valve closed
9/22/2011	7:14:35 PM	SiCl4 post valve closed
9/22/2011	7:14:35 PM	Main Vac valve closed
9/22/2011	7:14:35 PM	Bubbler valve closed
9/22/2011	7:14:35 PM	Bypass valve opened
9/22/2011	7:14:35 PM	Helium MFC set to  0.000000
9/22/2011	7:14:35 PM	H2 MFC set to  0.000000
9/22/2011	7:14:35 PM	BCl3 MFC set to  0.000000
9/22/2011	7:14:35 PM	PHl3 MFC set to  0.000000
9/22/2011	7:14:35 PM	SiCl4 MFC set to  0.000000
9/22/2011	7:14:35 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:14:35 PM	Tube furnace set to 0
9/22/2011	7:15:40 PM	Helium valve closed
9/22/2011	7:15:40 PM	H2 valve closed
9/22/2011	7:15:40 PM	BCl3 valve closed
9/22/2011	7:15:40 PM	PH3 valve closed
9/22/2011	7:15:40 PM	SiCl4 pre valve closed
9/22/2011	7:15:40 PM	SiCl4 post valve closed
9/22/2011	7:15:40 PM	Main Vac valve closed
9/22/2011	7:15:40 PM	Bubbler valve closed
9/22/2011	7:15:40 PM	Bypass valve opened
9/22/2011	7:15:40 PM	Helium MFC set to  0.000000
9/22/2011	7:15:40 PM	H2 MFC set to  0.000000
9/22/2011	7:15:40 PM	BCl3 MFC set to  0.000000
9/22/2011	7:15:40 PM	PHl3 MFC set to  0.000000
9/22/2011	7:15:40 PM	SiCl4 MFC set to  0.000000
9/22/2011	7:15:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:15:40 PM	Tube furnace set to 0
9/22/2011	7:16:40 PM	Helium valve closed
9/22/2011	7:16:40 PM	H2 valve closed
9/22/2011	7:16:40 PM	BCl3 valve closed
9/22/2011	7:16:40 PM	PH3 valve closed
9/22/2011	7:16:40 PM	SiCl4 pre valve closed
9/22/2011	7:16:40 PM	SiCl4 post valve closed
9/22/2011	7:16:40 PM	Bypass valve closed
9/22/2011	7:16:40 PM	Bubbler valve closed
9/22/2011	7:16:40 PM	Main Vac valve opened
9/22/2011	7:16:40 PM	Helium MFC set to  0.000000
9/22/2011	7:16:40 PM	H2 MFC set to  0.000000
9/22/2011	7:16:40 PM	BCl3 MFC set to  0.000000
9/22/2011	7:16:40 PM	PHl3 MFC set to  0.000000
9/22/2011	7:16:40 PM	SiCl4 MFC set to  0.000000
9/22/2011	7:16:40 PM	Bypass solenoid MFC set to  0.000000
9/22/2011	7:16:40 PM	Tube furnace set to 0
9/22/2011	7:16:41 PM	Run finished at 7:16 PM
9/22/2011	7:16:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/22/2011	7:37:29 PM	Main Vac valve closed
9/22/2011	7:37:33 PM	H2 MFC set to  50.000000
9/22/2011	7:37:34 PM	H2 valve opened
9/22/2011	7:37:36 PM	Bypass valve opened
9/22/2011	7:37:41 PM	H2 MFC set to  200.000000
9/22/2011	7:37:49 PM	H2 MFC set to  500.000000
9/22/2011	7:42:51 PM	Bypass valve closed
9/22/2011	7:42:52 PM	Main Vac valve opened
9/22/2011	8:03:06 PM	H2 valve closed
9/22/2011	8:08:56 PM	Main Vac valve closed
9/22/2011	8:08:58 PM	H2 valve opened
9/22/2011	8:09:19 PM	Bypass valve opened
9/22/2011	8:10:33 PM	Bypass valve closed
9/22/2011	8:10:34 PM	Main Vac valve opened
9/22/2011	8:17:03 PM	H2 valve closed
9/22/2011	8:17:12 PM	H2 valve opened
9/22/2011	8:56:37 PM	H2 valve closed
9/22/2011	8:56:50 PM	H2 valve opened
9/22/2011	8:57:15 PM	Main Vac valve closed
9/22/2011	8:57:23 PM	Main Vac valve opened
9/22/2011	8:57:36 PM	Main Vac valve closed
9/22/2011	8:57:40 PM	Main Vac valve opened
9/22/2011	8:57:53 PM	Tube furnace set to 70
9/22/2011	8:58:23 PM	Tube furnace set to 80
9/22/2011	8:58:53 PM	Main Vac valve closed
9/22/2011	8:58:58 PM	Main Vac valve opened
9/22/2011	8:59:25 PM	Tube furnace set to 110
9/22/2011	9:34:37 PM	Main Vac valve closed
9/22/2011	9:34:41 PM	Main Vac valve opened
9/22/2011	9:35:01 PM	H2 valve closed
9/22/2011	9:35:11 PM	Main Vac valve closed
9/22/2011	9:35:21 PM	Main Vac valve opened
9/22/2011	9:35:22 PM	H2 valve opened
9/22/2011	9:35:39 PM	Main Vac valve closed
9/22/2011	9:35:44 PM	Main Vac valve opened
9/22/2011	9:35:59 PM	Main Vac valve closed
9/22/2011	9:36:02 PM	Main Vac valve opened
9/22/2011	9:46:33 PM	Main Vac valve closed
9/22/2011	9:46:39 PM	Main Vac valve opened
9/22/2011	9:46:45 PM	H2 valve closed
9/22/2011	9:47:16 PM	H2 valve opened
9/22/2011	9:48:28 PM	H2 valve closed
9/22/2011	9:48:28 PM	Main Vac valve closed
9/22/2011	9:48:41 PM	Main Vac valve opened
9/22/2011	9:48:45 PM	H2 valve opened
9/22/2011	9:48:58 PM	H2 valve closed
9/22/2011	9:49:38 PM	Main Vac valve closed
9/22/2011	9:50:01 PM	H2 valve opened
9/22/2011	9:50:33 PM	Bypass valve opened
9/22/2011	9:51:15 PM	Bypass valve closed
9/22/2011	9:51:16 PM	Main Vac valve opened
9/22/2011	9:54:02 PM	Main Vac valve closed
9/22/2011	9:54:06 PM	Main Vac valve opened
9/22/2011	10:05:38 PM	Main Vac valve closed
9/22/2011	10:05:44 PM	Main Vac valve opened
9/22/2011	10:07:57 PM	Main Vac valve closed
9/22/2011	10:08:04 PM	Main Vac valve opened
9/22/2011	10:13:27 PM	H2 valve closed
9/22/2011	10:13:38 PM	H2 valve opened
9/22/2011	10:13:43 PM	Main Vac valve closed
9/22/2011	10:14:18 PM	Main Vac valve opened
9/22/2011	10:14:21 PM	H2 valve closed
9/22/2011	10:19:14 PM	Main Vac valve closed
9/22/2011	10:19:14 PM	H2 valve opened
9/22/2011	10:19:16 PM	Bypass valve opened
9/22/2011	10:22:06 PM	Bypass valve closed
9/22/2011	10:22:07 PM	Main Vac valve opened
9/22/2011	10:33:51 PM	Main Vac valve closed
9/22/2011	10:34:00 PM	Main Vac valve opened
9/22/2011	10:39:29 PM	Main Vac valve closed
9/22/2011	10:39:37 PM	Main Vac valve opened
9/22/2011	10:43:03 PM	Main Vac valve closed
9/22/2011	10:43:07 PM	Main Vac valve opened
9/22/2011	10:43:34 PM	Main Vac valve closed
9/22/2011	10:43:36 PM	H2 valve closed
9/22/2011	10:44:37 PM	H2 valve opened
9/22/2011	10:44:41 PM	Bypass valve opened
9/22/2011	10:46:25 PM	Bypass valve closed
9/22/2011	10:46:26 PM	Main Vac valve opened
9/22/2011	11:03:28 PM	Main Vac valve closed
9/22/2011	11:03:37 PM	Main Vac valve opened
9/22/2011	11:05:04 PM	H2 valve closed
9/22/2011	11:05:19 PM	H2 valve opened
9/22/2011	11:05:50 PM	H2 valve closed
9/22/2011	11:05:53 PM	H2 valve opened
9/22/2011	11:05:58 PM	Main Vac valve closed
9/22/2011	11:06:03 PM	Main Vac valve opened
9/22/2011	11:06:12 PM	H2 valve closed
9/22/2011	11:06:18 PM	Main Vac valve closed
9/22/2011	11:06:29 PM	Main Vac valve opened
9/22/2011	11:06:33 PM	H2 valve opened
9/22/2011	11:06:43 PM	H2 valve closed
9/22/2011	11:18:56 PM	Main Vac valve closed
9/22/2011	11:18:57 PM	H2 valve opened
9/22/2011	11:18:59 PM	Bypass valve opened
9/22/2011	11:21:06 PM	Bypass valve closed
9/22/2011	11:21:07 PM	Main Vac valve opened
9/22/2011	11:57:55 PM	H2 valve closed
9/22/2011	11:58:33 PM	Tube furnace set to 0
